SZ3000 Note 1) 11 Series SZ3000 Plug-in Manifold Station Expansion Caution In addition to solenoid valves, housing holders (SX3000-113-1) are necessary for expansion of manifold stations.
How to Order Specifications 11 MSQ 1 M9BW B A E S Particle generation grade Grade 1 Note 1) Suction flow rate (example) 1 l/min (ANR) 11-MSQA is identical to the high precision type and 11-MSQB is identical to the basic type. Number of auto switches Clean Series Vacuum type Auto switch Note) Please refer to Pneumatic Clean Series catalog for further details.
8 133 142 20 0 0.033 25 45 8 13 10 10 9 22 62 30 30 9 14 19.5 17 6 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 137 146 1/8 26 0 0.033 32 45 8 13 12 10 9 22 64 30 30 9 14 19.5 17 6 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 139 148 1/8 26 0 0.039 40 50 11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to
9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18
S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5
Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.
9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.
Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40
6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12 6 14 M14 x 1.5 44 Rc 1/8 28 2.5 81 169 (178) 12 10 (12) 107 15
B RESET 72 - <>+JOG <>+1-052 B RESET <> 1-096 C RESET <> (1-097) <> C RESET <> <>OFF JOG OFF 1-098 OFF DRV C RESET <>ON SVRE ON DRIVE ON 1-099 <> SETOFF DRV C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON
10 F9E8 8618 -31208 -10 -5 -20 F 8000 -32767 -10.5 -5.25 -21 Data format Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Sign MSB AD value LSB -23No.EX-OMN0038-C Dimensions -24No.EX-OMN0038-C Analog output unit Model Indication and How to Order EX600-AY Analog output Connector and number of output channels Symbol
CJ2-Z Series Air Cylinder/10, 16 10-/1121-/22How to Order Cushion Clean series 10 11 Relief type Vacuum suction type Nil A Rubber bumper (Standard) Air cushion 10 D L 16 60 A R C J 2 M9BW Z B 21 D L 16 60 R C J 2 M9BW Z B Number of auto switches Nil Built-in magnet Head cover port location Nil S n 2 pcs. 1 pc. n pcs.
(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer
Flow Characteristics at the Number of Manifold Stations (Operated individually) Model Passage/Stations Station 1 Station 5 Station 10 b C [dm3/(sbar)] 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 10.5 0.20 2.5 11 0.20 2.9 1 4/2 (P A/B) Non plug-in type: 6 stations (Manifold base) VV5FS4-10-061-04 1 (2 position single) VFS4110-5D 5 (3 position exhaust center) VFS4410-5D 1 (Individual
Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.
B L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62
Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.
Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Model C [dm3/ (sbar)] b 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Cv C [dm3/ (sbar)] b Cv SS5X3-45 SS5X5-45 C6 0.88 2.2 0.21 0.24 0.22 0.53 0.95 2.5 0.18 0.18 0.22 0.58 C8 C8 C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type. 1-6-76 Base Mounted Series SX3000/5000
B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.
8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2 (B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1/8 1/8 1/8 M5 x 0.8 C4 C6 0.46 0.62 0.79 0.39 0.33 0.36 0.12 0.16 0.21 0.75 0.83