1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Compact Cylinder with Air Cushion and Lock Series RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2 x D through 2 x O counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) Mass (g) Bore size (mm) T1 RS T2 V W Part No.

RLQ

Type A mounting bracket part number .YA-03 Joint .YU-03 T1 B 2-D through 2-O counterbore Material: Precision die-casting material equivalent to stainless steel 304 (mm) Bore size (mm) B D E J M O Part No. YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No.

F

Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

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Millirrfeter size 1{1' Q I1'SiZeJ' , 0.6' r'~ '" 0Ur 0~ '2. , ~1/4' a!;'16" 03/4" 'ol/2~ AsP330F'!U R(PT)1/8 M5 X 0.8 J\SP. 4;JOF~02 R(PT)I /4 Rc(PD1 /8 IIS'P530F:03 R(PT)318 Rc(PT)lIS 'ASi"!)30l"'lJ4 " R(PT)1!2 Rc(PT)1I4 ASP;l3OF:,FO~ RIPT)114 G(PF)1I8 I\Sps:ioFf;03' R(PT)318 G(PF)118 ),I'SPsJOF;;04: R(PT)1 /2 G{PF)1/4 A~P33!1F" 'l Il1 NPT1 /8 10-32UNF ,~Sp430FNO,?

Compact Cylinder with Air Cushion and Lock Series RLQ

YA-03 Joint . YU-03 T1 B 2-D through 2-O counterbore (mm) Bore size (mm) B D E J M O Part No. 12 7 25 9 34 11.5 depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5 depth 8.5 YB-05 50, 63 Joint Weight (g) Bore size (mm) T1 RS T2 V W Part No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

0 70 _ _ 4 0 17.6 _ _ 0 1 2250 _ _ 2 1 66 _ _ 4 1 16.5 _ _ 0 2 1125 _ _ 2 2 62 _ _ 4 2 15.6 _ _ 0 3 750 _ _ 2 3 59 _ _ 4 3 14.8 _ _ 0 4 562 _ _ 2 4 56 _ _ 4 4 14.1 _ _ 0 5 450 _ _ 2 5 53 _ _ 4 5 13.4 _ _ 0 6 375 _ _ 2 6 51 _ _ 4 6 12.8 _ _ 0 7 321 _ _ 2 7 48 _ _ 4 7 12.2 _ _ 0 8 281 _ _ 2 8 46 _ _ 4 8 11.7 _ _ 0 9 250 _ _ 2 9 45 _ _ 4 9 11.3 _ _ 0 A 225 _ _ 2 A 43 _ _ 4 A 10.8 _ _ 0 B 204

0.4

VQ 2 x Rc 3/4 1 2 3 4 5 6 7 8 n Stations D-side U-side VQ4 3(R) port 2 x Rc 1/2 4 x G 1/2 1(P) port VQ5 Conduit port SMC SMC SMC SMC SMC SMC SMC VQC 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 13 VQZ 55.5 42.7 43.5 20.5 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A SQ 33.5 12 11.5 15.7 2 x Rc 1/8 Pilot EXH port (6.5) 21.5 2 x Rc 1/8 VFS External pilot port 27 31 2n x Rc 1/4, 3/8, C8, C10, C12 Rc 1/

LEC-OM071xx

Panel Display and Sigma Win+TM.2-2 2.1 Panel Display.2-2 2.1.1 Status Display.2-2 2.1.2 Alarm and Warning Display.2-2 2.1.3 Hard Wire Base Block Display.2-2 2.1.4 Overtravel Display.2-2 2.2 Operation of SigmaWin+TM.2-3 2.2.1 Compatible Devices.2-3 2.2.2 Hardware requirements.2-3 2.2.3 Installing SigmaWin+ Program.2-3 2.2.4 Starting SigmaWin+TM.2-12 2.3 Utility Functions.2-15 2.4 Parameters

7.5

2!

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Free Mount Cylinder

Seal kit includes @0, @1, @2.

MB

8 MB n (Same side) 2 (Different sides or Same side) 20 25 25 MB1 (n2) 2 (n2) 2 (n2) 2 25 + 55 n = 2, 4, 6, 8 20 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) D-A59W CA2 1 15 25 25 D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F 15 25 25 2 (Different sides or Same side) CS1 (n2) 2 (n2) 2 (n2) 2 15 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 25 + 55 n = 2, 4, 6, 8 n (Same side) C76 1 10 25

Plug-in/Plug Lead: Single Unit

b 3.4 3.4 3.4 Cv 2 position rubber seal VQ5 01 1 2 16 16 16 C [dm3/(sbar)] 0.33 0.33 0.33 4/2 5/3 (A/B EA/EB) b 4.4 4.4 4.4 Cv Note) For port size Rc 1/2 Manifold Option Blanking plate assembly VVQ5000-10A-5 Individual EXH spacer VVQ5000-R-5Individual SUP spacer VVQ5000-P-5-03 04 03 04 EXH block plate VVQ5000-16A-2 Throttle valve spacer VVQ5000-20A-5 SUP stop valve spacer VVQ5000-37A-5

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LQ 2 U 03 Tubing size Tubing O.D. 1/8", 3 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 3/4", 19 1", 25 Body class Applicable fitting Symbol 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 19 25 Type of fitting Applicable fitting LQ2 LQ1 Symbol Nil 1 2 Body class Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Applicable fitting 3 LQ2 LQ2 4 LQ1 Type of part Symbol U B N Type of

Modular Type Lubricators Series AL

assembly Bumper retainer seal -2, -8 -2, -8 Standard -2 -3 -6 -8 -1 -1S-1 -1S-2 NBR C4SL C4SL-2 C4SL-3 C4SL-6 C4LL-8 800147AP 800147A-S1P 800147A-S2P O-ring 15 1 NBR C4SFP-260S C4SFP-260S Case assembly Note 2) 14 1 Note 1) Description: Bumper assembly Note) O-ring !

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Manual override P L 5 24 VDC 02 Rc 1/4 (8A) Rc 3/8 (10A) 9 Other 03 3-9-1 2 Series VS410 Accessory (Option) Apparent Power (Power Consumption) 1.

Silencer Series AN

Carbon steel ADC: Aluminum alloy Note 2) Recommended flow rate is the flow at 0.5 MPa in the inlet pressure. 70 60 AN200 AN400 AN600 AN800 AN300 AN500 AN700 AN900 5-10-2 Silencer Compact Type Series AN03 How to Order Over 25 dB (A) noise reduction Space-saving compact type AN 403 04 Port size Thread type Body size 01 02 03 04 1/8 1/4 3/8 1/2 R NPT Nil N 103 203 303 403 Specifications Max

AS-FPQ/AS-FPG

Max. 1 2 Min.