High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

HEC-OM-R008

Stop filling once the level of fluid reaches the H mark. 600, 1200, 2400, [AT]: Used to start auto tuning in auto tuning mode 5. Turn on the power switch to fill the piping with the fluid. 6.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

mb1

25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175, 200, 250,

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202PA-K 100W to 500 LJ1H202NA-K 100W to 500 LJ1H303PA-K 200W to 500 LJ1H303NA-K 200W to 500 Standard stroke (mm) and Speed (mm/s) Model Motor type 200 300 400 500 600 700 800 900 1000 1200 1500 Capacity 100 LG1H202SC 100W to 500 LG1H202PA 100W to 500 Standard motor LG1H202NA 100W to 500 [Tamagawa Seiki Co., Ltd.]

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

Pneumatic Purification

7.8 8.8 23.6 78.7 55.1 19.7 19.7 460/3/60 FLANGE 3 150 174 R134a 1060 5 PDE410-S 1483 13.5 15.0 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1180 6 PDE510-S 1840 15.5 17.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1200 8.5 PDE610-S 2400 20.0 22.8 27.6 78.7 68.8 19.7 21.3 460/3/60 FLANGE 4 150 174 R134a 1400 10 *Voltage Option : add C for 575/3/60; Example : PDE200

Air Fittings & Tubing

Thread Rotating Torque/Allowable Number of Rotations Applicable tube O.D. 8 10 12 4 6 Rotating torque (Nm) (1) 0.022 0.006 0.012 0.020 0.014 Allowable number of rotations Series KS Series KX (rpm) 500 1500 300 1000 250 1000 500 1200 400 1200 Note1) Value under pressure 0.5MPa Male elbow Component Materials Principal element Series KS Series KX Male connector Body Stud, Holder, Guide Chuck

IR1000/2000/3000

1.0 0 100 200 300 400 500 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa IR2020-02 IR2020-02 IR2020-02 Conditions: Supply pressure 1.0MPa Conditions: Back pressure 1.0MPa 1.0 0.8 0.204 0.9 0.7 Set pressure P2 MPa Set pressure MPa 0.8 Set pressure MPa 0.6 0.202 0.7 Setting point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200

KS/KX

Thread Rotating Torque/Allowable Number of Rotations Applicable tube O.D. 8 10 12 4 6 Rotating torque (Nm) (1) 0.022 0.006 0.012 0.020 0.014 Allowable number of rotations Series KS Series KX (rpm) 500 1500 300 1000 250 1000 500 1200 400 1200 Note1) Value under pressure 0.5MPa Male elbow Component Materials Principal element Series KS Series KX Male connector Body Stud, Holder, Guide Chuck

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

F

1200 1000 1000 6 12 14 20 22 Starting Torque Nm x 10-3 An ambient atmosphere that causes rust is non permissible.

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 5.5 LPM , 5.5 LPM, Max Pressure: 17.4 PSIG / 1200 mbar , 17.4 PSIG / 1200 mbar, Max Vacuum: 23 in HgV / -780 mbar , 23 in HgV / -780 mbar, Voltage (50 Hz): 230, Frequency (Hz): 50, Phase: 1-phase, Item Dimensions: Length: 4.29 in / 109 mm Width: 2.4 in / 61 mm Height: 3.27 in / 83 mm

Thomas Oil-less WOB-L Piston Compressor Flow Rate: 12.7 LPM , 12.7 LPM, Max Pressure: 17.4 PSIG / 1200 mbar , 17.4 PSIG / 1200 mbar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 5.71 in / 145 mm Width: 2.48 in / 63 mm Height: 4.09 in / 104 mm , Length: 5.71 in / 145 mm, Width: 2.48 in / 63 mm, Height: 4.09 in / 104 mm, Net Weight

Thomas Oil-less WOB-L Piston Compressor Flow Rate: 12.7 LPM , 12.7 LPM, Max Pressure: 17.4 PSIG / 1200 mbar , 17.4 PSIG / 1200 mbar, Voltage (DC): 12, DC Motor Type: Standard, Item Dimensions: Length: 5.71 in / 145 mm Width: 2.48 in / 63 mm Height: 4.09 in / 104 mm , Length: 5.71 in / 145 mm, Width: 2.48 in / 63 mm, Height: 4.09 in / 104 mm, Net Weight

Mechanically Jointed Rodless Cylinder Series MY2

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) D16 100, 200, 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1400, 1600, 1800, 2000 3000 -X 25, 40 5000 Strokes are manufacturable in 1 mm increments, up to the maximum stroke. When exceeding a 2000 mm stroke, specify -XB11 at the end of the model number.

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or

When the LEF is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein..Body size: 16, 25, 32 , Belt drive , Applicable stroke range: 300, 500, 600, 700, 800, 900, 1000, 1200, 1500, 1800, 2000 , 2 types of motors: servo motor ball screw drive or step motor belt drive , Controller mounting: screw or