Cylinder (Tube) Inner Diameter(φ): 200, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 200, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: No, Valves: Presence, Cushion: Without cushion, Operating Pressure(MPa): 0.05 to 0.97, Port thread type: G, Auto Switches: Without auto

Cylinder (Tube) Inner Diameter(φ): 125, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

Cylinder (Tube) Inner Diameter(φ): 160, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Air cushion, Specification: -, Port thread type: Rc, Auto Switches: Without auto switch, Lead Wire Length(m): N/A, The number of the switches

•

(A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

AZ1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

C76

can be used according to buckling strength 100.0 Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100

Cylinder

IO 28J3 3 38 10 5 , 1O,~ 25a 610 15 5.10,'5 450 I 1100 *' WeIght of hose nipple(.dgf) IS not included. lllSame spring force 1 0 f each stroke. Hose Nipple For Panel Mount Type(With Fixed Orifice) Stroke Bore size (mm) Stroke (mm) 6/4 '~ CJ-5H-6 . , I w'"" .Jt.'

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Use flexible tubing in between to avoid such an effect. 1100

3

Max. operating pressure differential Note 3) (MPa) Flow rate characteristics Max. system pressure Note 3) (MPa) Weight Note 2) (g) AC DC Kv Cv Body material Size Port size (Nominal diameter) Orifice diameter (mm) Model Min. operating pressure differential Note 1) (MPa) VXH 2.1 2.4 3 1/4 (8A) 10 VXS235 600 3/8 (10A) 2.4 2.8 4 1/2 (15A) 15 VXS245 4.6 5.3 720 5 3/4 (20A) 20 VXS255 7.9 9.2 1100

Table of Contents

(Safety valve port) Manhole Air inlet Inspection hole Air inlet socket Drain Drain Anchor bolt mounting hole Anchor bolt mounting hole Model Air connection Socket Flange A B C D E F G H J K L Anchor bolt 406.4 609 609 609 962 962 962 1216 1216 361 510 510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100

Air Tank Series AT 1

(Safety valve port) Manhole Air inlet Inspection hole Air inlet socket Drain Drain Anchor bolt mounting hole Anchor bolt mounting hole Model Air connection Socket Flange A B C D E F G H J K L Anchor bolt 406.4 609 609 609 962 962 962 1216 1216 361 510 510 510 824 824 824 1019 1019 440 650 650 650 1080 1080 1080 1300 1300 1268 1258 1978 2278 1550 2160 2770 2558 3288 1000 945 1340 1340 1100

C76

Local Area: (800) 258-9200-www.stevenengineering.com Nominal symbol C76 Mounting bracket diagram 32 40 (MPa) Lateral load applied to the rod end fR (N) Foot: L Rod side flange: F Head side flange: G 0.3 58 54 10.0 L C7640 44 0.5 40 W W W F 36 0.7 33 C7632 24 0.3 23 G 17 0.5 16 1.0 13 0.7 13 Clevis: C, D Rod side trunnion: U 0.3 C 0.5 W W D 0.7 0.1 (100) (100) 0.3 600 500 400 300 1000 1100

C85

(100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25 0.5 52 C8525 33 22 32 15 20 0.7 C8520 43 1.0 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 L (100) (40) (40) (40) (40) (100) 0.5 W W F W (100) (40) (40) (40) (40) (100) 0.7 (40) (40) (40) (100) 79 38 0.3 0.1 G (40) (40) 60 29 37 0.5 76 600 500 400 300 1000 1100

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Without magnet, Port thread type: Rc, Auto Switches

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 1100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: -, Valves: -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto