. * Air purication rating: JIS B 8392-1 (ISO8573-1) Quality Degree 4, 4, 2 or more Bernoulli type XT661 X321 4C Outer body diameter: 4C 39 mm 6C 59 mm 8C 79 mm 10C 99 mm 4C 6C 8C 10C 120E 150E Bernoulli type Outer body diameter (mm) 39 59 79 99 l120 l150 Piping port size M5 x 0.8 Rc 1/8 XT661 X322 120E Fluid Air* Operating pressure 0.01 to 0.4 MPa Body size: l Proof pressure 0.6 MPa Ambient
10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)6.1(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 22Approx. 17Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.718/23Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)2.9(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.76/6Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
Rate) Seal material Leakage rate Operating fluid temperature (C) Solenoid valve option (symbol) Ambient temperature (C) Note) Non-leak, Medium vacuum 106 Pam3/sec or less Power source Air Nil, G V, M 10 Note) to 60 10 Note) to 40 1 cm3/min or less NBR, FKM 10 Note) to 80 10 Note) to 60 20 to 60 20 to 40 AC DC Note) Value on option V, M (non-leak, medium vacuum) Note) Dew point temperature: 10C
VXD21 DC AC VXD22 DC AC VXD23 DC 5 4 7 6 9 8 Operating Fluid and Ambient Temperature Operating fluid temperature (C ) High temperature oil Ambient temperature (C ) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E, N, P) High temperature water (3) (D, N) 99(4) 100(4) AC DC AC/DC 60 40 1 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C
45 17 AC VXP23 DC 4 5 6 7 8 9 Operating Fluid and Ambient Temperature High temperature water (3) Operating fluid temperature (C) Ambient temperature (C ) Steam (3) Temperature conditions Power source Water (Standard) Air (Standard) Oil (Standard) (D, E) High temperature oil (3) (S) (D) 99 100 183 AC DC AC DC 60 40 80 60 60 40 40 60 Maximum Minimum 1 10 5 (2) 10 (1) Note 1) Dew point: 10C
10C)2.5(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.75/5Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
10C)3.4(at ?10C)?0.10.25/0.40 (at 20 l/min)20Approx. 15Approx. 16Rc 3/4Stainless steel, EPDM, Copper brazing (Heat exchanger), PPS, Silicone, Fluororesin10 to 250.3 to 0.715/22Rc 1/2Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation ?
Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.
Indicator light Yes Applicable model Load voltage Type Special function Electrical entry Wiring (Output) 0.5 Nil 3 (L) 5 Note 2) DC Perpendicular 10 16 20 25 In-line AC (Z) M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B 3-wire (NPN) Solid state auto switch 5 V 12 V IC circuit Relay PLC 3-wire (PNP) 24 V Grommet 2-wire 12 V Note 1) Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL
L (Example) M9NL 5 m . Z (Example) M9NZ PLC: Programmable Logic Controller Refer to page 889 for the applicable auto switch list. 799 MXQ 1322Air Slide Table Specifications 6 8 12 16 20 25 Bore size (mm) Fluid Air Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.
model Electrical entry direction Perpendicular In-line Indicator light Wiring (Output) Special function Type Electrical entry 5 (Z) AC DC F8N F8P F8B M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN) Solid state switch 3-wire (PNP) 12 V 24 V Grommet Yes 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Diagnosis indication (2-color) Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL
model Electrical entry direction Perpendicular In-line Indicator light Wiring (Output) Special function Type Electrical entry 5 (Z) AC DC F8N F8P F8B M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN) Solid state switch 3-wire (PNP) 12 V 24 V Grommet Yes 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire Diagnosis indication (2-color) Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL
Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.
Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 3-wire (PNP) F9PW F9PWV F9BW 12 V F9BWV 2-wire Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL