%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Hydraulic

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-A79W D-F7NTL D-F7F D-F9BAL Bore size (mm) A B A A A A B A A A B B B B B B 20.5 11.5 21 18 25 26 12 9 16 17 20 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5 32

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Valve Single Unit

Poor wiring could cause damage to PLC, power source, etc. as well as manifold and valve. 1-6-91 SX5000: D-sub Connector/Plug-in C4 C6 C8 SS5X5-45FUStations D(Pitch) P = 16 DIN rail release button Note) The L1 to L4 dimensions of SS5X5-45FUStations Uare identical to those of SS5X545FUStations D-. 2n-One-touch fittings 2-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10

Aluminum High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

smcmaintenancepartslist

Pressure Control Equipment D B K P C C C K U P O S A A H L C to U S O H L to B D !0 o D-D C-C B-B A-A !0 o !1 !1 Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters y y q IN OUT IN OUT u r t u r t i i The numbers are the same as the "Construction" of the Best Pneumatics No.5 Series AWG.

Fieldbus System

D side U side Stations 7 6 5 4 3 2 1 n [Communication connector D-sub] (DIN rail clamping screw) BUS OUT BUS R R R 76.7 76.7 62.5 BUS IN 58.7 3 3 3 X 12 X 12 X 12 40.5 B B B B B B B B PWR PWR P P P 25 1 1 1 A A A A A A A A A 18.5 9.5 7.5 56.9 13 20.5 (7.5) One-touch fitting [1(P), 3(R) port] 13.4 56.9 Applicable tube O.D.

Digital Flow Switch (Integrated display type) ( compatible)

PD intercept b F32 N 2012 0x07DC 0 R Temp. peak value S16 0 N 0xFF9C to 0x044C (-100 to 1100) Can be displayed only when a temperature sensor is connected. 2013 0x07DD 0 R Temp. bottom value S16 0 N Accumulated PDAccumulated value conversion factor = Current accumulated flow value 2021 0x07E5 0 R Accumulated PD U16 0 N 0x0 to 0x270F (0 to 9) -82No.PF-OMW0010-D 1: "R" means Read and "W" means

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

7.5

for Flat Ribbon Cable / PC Wiring SS5J2-60 D B (S, R, RS) 1 2 P J Stations (Pitch) P = 7.5 11.5 [External pilot spec.]

Vacuum Unit

pages 11 and 12, and r on page 13.)

AC Servo Motor Driver

W Model D T D Max.

•

r 2 r -'w'"''' '"''-' ' '-'''-'..J Width 8Cf05S f lats 6 4)(0. i Width across 11.111 ' 9 , o I i. , , . Flat with rib Flat with rib Deep type/ ZPY25D only I~ Deep type/ ZPY40D only p M14X, . Wldlh across flatl 19 r Wtdth across flats 7 m o D U ~' -4= M5XO.8 ..

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

D-M9WV D-M9AL D-M9AVL 16, 20 U 25 B A D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NTL D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAVL 16, 20 U A B 32 to 50 U A B 32 to 50 D-A9 D-M9 D-M9W D-M9AL D-A9V D-M9V D-M9WV D-M9AVL U B A 1384 Stopper Cylinder / Fixed Mounting Height Series RSQ Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Table of Contents

brackets A and D.

C85

B 24 A Hs 18.6 B 16 A 29 D-H7 D-H7W D-H7BAL D-H7NF Hs 8.5 1 7 23.5 A B D-A79W 14 Hs A 38.2 B 16 D-H7C Hs D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F 23 A B 1 8.5 Hs 11 13.3 13.3 10 A B 26 Auto Switch Mounting Position (mm) D-J79C 17 D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C D-F7BAL D-F79F/A72 D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A79W Hs Bore

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

0.

(A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) q w e r q w e r N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.