Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Applicable solenoid valve: Type 10-SYJ314M Type 10-SYJ324M Plug (SYJ3000-33-1) Plug (SYJ3000-33-1) Seal the unused "R" port on the end cover side of the manifold. Seal the unused "R" port on the end cover side of the manifold. e 10-SS5YJ3-41/-S41 The 3 port valve can be used by simply sealing off the unused "R" port with rubber plug (SYJ3000-33-1).

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 2 x EE 80, 100 D1 PL 2 x EE port Sectional view A-A SL PL Cushion valve PL WA WB A KK B B R E R E A WA WB A WH G L2 BG L9 VD E R 2 x 4 x RT BG L9 80, 100 ZZ + Stroke L8 + Stroke H VA G 2 x 4 x RT BG C96K (D) B CW Bore size Stroke 32, 40 2 x EE 80, 100 80, 100 D1 PL 2 x EE port SL PL 2 x

CLA

SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!lH 55 V-1Od 100 37 40 83 M26Xl .S 21 38 201rer\'Id 1'-< t~ m L ~ ~1 -r0 ~ '-' P. _(mm) e ,.

HRS100/150

Applicable model HRS HRS-BP008 HRS100-HRS150-HRS 090 HRS 100/150 HRS 100/150 HRSH 090 q To circulating fluid outlet To circulating fluid return port HRSH r t w y HRSE r HRZ u r HRZD t r e HRW HECR HEC Parts List HEB No. Description (The figure shows the HRS-150-A-20.)

Electric Grippers

4 q u w e r t !7 Component Parts No.

CEx-OML0058

1 0 0 80 100 100 80 63 L o a d w e i g h t k g f L o a d w e i g h t k g f I s t h e s p e e d w i t h i n t h e g i v e n r a n g e i n t h e 63 d i a g r a m ? A n d , w i t h i n 50 s p e c i f i c a t i o n s ?

Series AK1000

Pressure gauge unit 2) e 2P 3P 4PL r t Sample Order Number Port Unit psig/bar MPa Code qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) AK1202S e q 8 8 8 8 w 8 8 8 8 r r No code MPA q w 2P 3P 4PL 5PC MPA MPA MPA V3 V3 V3 2) Pressure gauge unit MPa or psig/bar selectable.

Hygienic Design Cylinder Series HY

1.0 M8 x 1.25 M10 x 1.5 M12 x 1.75 I 62 71 88 102 K 6 6.5 8 8 KA 10 13 16 16 L 11 12 14 14 M 32.5 38 46.5 56.5 N 5.4 5.4 6.8 6.8 OA M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 P 1/8 1/8 1/4 1/4 Q 13.5 16 20 21 R 16 16 16 16 W 4 2 4 4 Stroke range 100 or less 100 or less 100 or less 100 or less 32 40 50 63 Note 1) Refer to pages 885 to 889 for details about the rod end nut, mounting bracket and

Shock Absorbers and Rate Controls

$nds) TOTAL ENEFGY (n Ib'C) ',t;,; , Pa 1 2 0 100 6 o 9 u o | o o ^ N x ' ' E i . ^ e ' L lo rO t l = o. 9 8 0 9 j o " y 2 0 . . . , . : t':r,/,i o = 2 0 0 2 3 4 5 6 7 TOTAL ENEFGY (in |bs/c) (lhorsands) 1r;;", /l:rt po 120 :-,::: ioo a o : 8 0 t o r { t s o c t 3 = !

IZx-OMT0049

in height fr om ioniz er to workpiec e [ mm] Installation distance in height fr om ioniz er to workpiec e [ mm] mm mm 250 200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (150) (100) (50) 0 50 100 150 200 250 300 350 400 450 500 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm

One-touch Fittings

Connection thread Face seal R One-touch IN/OUT connection. Possible to use in vacuum to 100 kPa.

HEC_001W-E

After the error is reset, the indication of [WRN] disappears. 8-1 Alarm 8.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.8-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.8-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 2 x EE 80, 100 SL PL D1 PL 2 x EE port Sectional view A-A PL WB WA Cushion valve B WA WB A KK B R E A ZZ + Stroke L8 + Stroke H A WH G L2 BG L9 VD E R VA G BG L9 2 x 4 x RT 80, 100 BG 2 x 4 x RT CP96K (D) B CW Bore size Stroke 32, 40 2 x EE 80, 100 80, 100 PL SL PL 2 x EE port D1 Sectional

90

M ZK2 ZS A E A G Supply valve, self-holding type (Linked to release valve) Supply valve only (Single) e Rated voltage r Lead wire entry direction C L LO q w e r t q Rated pressure range and function 5 6 24 VDC 12 VDC For plug-in (Manifold common wiring) L-type plug connector with lead wire (Individual wiring) L-type plug connector, without connector E F V 0 to 101 kPa 100 to 100 kPa 100 to

LEC-OM02904

PD30 TLC / C1MR Configurator2 0h 0h TM No.PD1500101016 5001601F4h500500 100%160064h110010090% 16005Ah0.910090 01FFh PD31 VLC / C1MR Configurator2 0h 0h TM No.PD1500101016 5001601F4h500500 100%160064h1 No.PD31(VLC)0078h(120%)No.PD32(VLL)012Ch(300r/min) 01FFh 1000[r/min] (r/min) 1200r/min 1000r/min VLL () 300r/min 0 PD32 VLL / C1MR Configurator2 0h r/min 0h TM No.PD1500101016

Stopper Cylinder

0 w q e r t u !

MB

0 14B @2@3N@4@5 Locking at rod end Manual release non-locking type: L Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 No. !7 !8 !

SX

S 5 VDC R 3 VDC 1-6-55 56 Manifold Specifications SS5X3-41 SS5X3-42 SS5X5-41 SS5X5-42 SS5X7-42 SX340 SX340(R) SX540 SX540(R) SX740(R) Single base/B mount Common SUP/Common EXH 2 to 20 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P(SUP)/R(EXH) Valve stations Note) Location Direction A, B Porting specifications P, EA, EB port Rc 1 4 Rc 1 4 M5 x

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E S 10 R 14 W 42 Q 43 Model LQ3F22 LQ3F42 LQ3F43 LQ3F51 LQ3F52 LQ3F53 LQ3F62 LQ3F63 LQ3F64 17 16 16 32.1 30.9 56.1 54.9 20 58 58 69 53 58 69 58 69 84 14 W 24 10 14 42 43 22 24 49 46.8 73 70.8 29 22 M (R) 12 80 77.3 Q P 10 42 43 26.5 24 32 58 55.3 37 30 14 82 79.3 (E,E) 47 48 92.5 88.2 H L1,L1 T 10 16 30 26 41 68.5 64.2 49 36 55 56 L2,L2 94.5 90.2 Inch Size (E,E): Reference dimension for the