45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

10

(with surge voltage suppressor) Grommet U U1 U U1 X X X1 X1 300 Q F D D 300 Q F 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole E C R C R E 1.2 1.2 1.2 1.2 B1 B B1 B 2 x P Port size 2 x P Port size Y W Y W DIN terminal Conduit terminal U U1 U U1 X X X1 X1 Cable 6 to 12 F Q S 2 x 3.4 Mounting hole 2 x 3.4 Mounting hole D 34 D G1/2 Q2 F (44) 31.5 32 25 E T E C R C R G1/2 S2 B B1 2 x P Port size

Digital Flow Switch (Integrated display type)

min Display flow range 7 to 140 L/min (Displays 0 when the value is 20 to 350 L/min (Displays 0 when the value is below 20 L/min) below 7 L/min) Switch point range 7 to 140 L/min 20 to 350 L/min Min. setting unit 1 L/min 2 L/min Conversion of accumulated pulse (Pulse width = 50ms) 1 L/pulse Fluid temperature 0 to 70 oC (No freezing and condensation) Display unit L/min for real-time flow and

New

Q F D Q F z 300 z300 R E C C R E Water For Air For Medium A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

Tamper Proof and Flat Head Screw

M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32UNF NPT1/8 NPT1/4 NPT3/8 NPT1/2 01 02 03 04 U10/32 N01 N02 N03 N04 SMC Pneumatics, Inc. 17 Series ASIII1F-T Dimensions (mm) 1in=25.4mm L5 D3 Elbow type H (width across flats) Applicable tubing O.D. d A L4 D1 L3 M1 D2 T L1 L2 Metric sizes Inch sizes A d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 Model d D1 Model T H D2 D3 L1 L2

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

D 5 D 5 Individual SUP block assembly Individual EXH block assembly U side D side U side D side B A B A B A B A B A B A B A B A P P R R P R [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold specification sheet.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

NV:654(l-OH/Pressur center DIN connector (D)/ 3 rrzs+lo-o$$ 5 i r r , . : : : ; ' ; , , . , . t . , I : : . , , . r , ' _ : : ; r . , r r , , l : . , r . , . r I ' r , , r ' l l : t i , I r r r r , ' . : : : i , r . r r , , . , . . i 1 i . r r , r ; ft type plug connector/tllz5340-OM/Cl@d c.rt6r : Nlzs44o-owExhaust center , Nlz5540-Oll/Pre$ue cer er L lype plug conneclor/tttz594Gol/Clo6d

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5 67 27.5 77

Title not found

NV:654(l-OH/Pressur center DIN connector (D)/ 3 rrzs+lo-o$$ 5 i r r , . : : : ; ' ; , , . , . t . , I : : . , , . r , ' _ : : ; r . , r r , , l : . , r . , . r I ' r , , r ' l l : t i , I r r r r , ' . : : : i , r . r r , , . , . . i 1 i . r r , r ; ft type plug connector/tllz5340-OM/Cl@d c.rt6r : Nlzs44o-owExhaust center , Nlz5540-Oll/Pre$ue cer er L lype plug conneclor/tttz594Gol/Clo6d

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

LEKFS16 LE-D-6-5 9.8 pull LEKFS25 LE-D-6-2 19.6 LEKFS32 LE-D-6-3 49.0 LEKFS40 LE-D-6-4 98.1 Bolts Refer to (A) (A) Model Type of bolt Bolt size Tightening torque [Nm] LEKFS16 Round head combination M2.5x5 0.3610% LEKFS25 M3x6 0.6310% LEKFS32 M3x6 screw LEKFS40 M3x6 (B) Model Type of bolt Bolt size Tightening torque [Nm] Cross recessed round head screw with washer M2.5x7(without

3

D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-P3DW 13 11 11.5 10.5 11 12 D17 7 14.5 6 15.5 5.5 14 6 14 15.5 -X 397 MK Series Auto Switch Proper Mounting Position (Detection at Stroke End) and its Mounting Height D-F79F/F7NT D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-F7/J79 D-F7V D-J79C D-F7W/J79W D-F7WV D-F7BA/F7BAV B A U 20, 25 20, 25 U B A 32

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Note 7) In case of an external pilot "R", indicate external pilot specification "R" for the applicable valve also. B3 Stations B4 D side B6 B5 LM Note) Stations are counted starting from station 1 on the D side. Note 1) Indicate CM and LM in the specification table. Note 2) Inch sizes use the following symbols.

VZ1000

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

VZS

from D side as the 1st one.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

CV/MVGQ

(Not mountable after the time of shipment) RHC MK(2) Auto Switch Mounting Height RS Q G D-B5/B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G59F D-F5 D-J5 D-F5W D-J59W D-F59F D-F5NTL Auto switch model D-Z7/Z80 D-Y59 D-Y7P D-Y7W D-Y69 D-Y7PV D-Y7lWV D-A44 D-A44C D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W RS H A RZQ Bore size (mm) Hs Ht Hs Hs Hs Ht Hs Hs Ht Hs Ht Hs Hw Hs Hw MI W S

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

1/4 3(R) port VQ 43.5 11 The broken lines indicate the DIN rail mounting style [-D].