Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}
1/8 (R port) S070 VQ L Dimension n: Stations VKF n L 20 399 388 19 380 369 18 361 350 17 342 331 16 323 312 15 304 293 14 285 274 13 266 255 12 247 236 11 228 217 10 209 198 9 190 179 8 171 160 7 152 141 6 133 122 5 114 103 4 95 84 3 76 65 2 57 46 1 38 27 L1 L2 VQZ VZ VS VFN 4-5-7 8 Series VK300 Type 40 Manifold Base Mounted (Bottom ported) VV3K3-40Stations -01 Grommet: G DIN terminal: D
1/8 2(A) port VKF 23 8 19.5 VQZ VZ VS VFN L Dimension n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 113 103 89 4-13-9 10 Series VKF300 Dimensions
For IITV00-n Total weight (g) Stations (n) x 100 + 130 (Weight of end block A, B assembly) + Weight (g) of DIN rail Note 2) Specifications other than the following are optional.
wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300 Dimensions
wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6 133 122 7 152 141 8 171 160 9 190 179 10 209 198 11 228 217 12 247 236 13 266 255 14 285 274 15 304 293 16 323 312 17 342 331 18 361 350 19 380 369 20 399 388 L1 L2 5 Series VKF300
Dimensions (mm) A B C D E F G K L M N P Model IDFA100F IDFA125F Port size R2 670 460 335 107 700 1120 1276 267 1375 20 712 752 R2 1/2 700 655 350 78 935 IDFA150F E D B 10 note) A G F C N M L K Note) In addition to the overall length of the body, the filter mounting part (bracket) projects 10 mm.
Option VFS 2 position single solenoid F: With foot bracket (2 position single type only) Body option VS4 1 0: Individual exhaust for the pilot valve VQ7 2 position double solenoid EVS Note) Do not remove the factory installed bracket from models with the bracket option. 2 VFN PE port 3(R) port 3: Common exhaust type for main and pilot valve 3 position closed center Thread type 3 Nil Rc F N
40 74.0 39.0 + st 125 N 50 76.0 44.5 + st 195 N 63 91.0 44.5 + st 310 N 80 93.0 53.0 + st 500 N 100 104.0 57.5 + st 785 N e.g. 63mm bore, 100mm stroke, Ws = 20N Ws = (2kgs) 20N 144.5 91 FB1 = 20 (1+ ) = 51.76N Replacement parts: Seal kits 32 includes order No. from to , 40 100 includes from to FB1 = 51.76N 310N (from table) Therefore, side load is allowable Order No. 32 CS95-32 40 CS95
L A T C A N X 1 5 2 Made to Order Note3) Card Motor controller Note2) NIL Standard product X152 I/O cable (without shield) Option Parallel I/O NIL Direct mounting [N] NPN D Note1) DIN rail mounting P PNP I/O cable length Note3) NIL Without cable 1 1 m 3 3 m 5 5 m Note 1) The DIN rail is not included, this must be ordered separately.
(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33
Electric Actuator / Miniature Rod type 2.1 Specification Model LEPY 6 LEPY 10 Stroke [mm] 25, 50, 75 Screw lead [mm] 4 8 5 10 Basic 14 20 7 10 25 50 12.5 25 Pushing force [N] Note1) Note 6) Compact 24 40 12 20 Horizontal Basic 2 1 6 3 Compact 4 2 Work load [kg] Note2) Note3) Note6) Vertical Basic 0.5 0.25 1.5 1.0 Compact 1.5 1.0 Basic 10 to 150 20 to 300 Note4) 10 to 200 20 to 350 Note4
slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm Tolerance of metered flow 25 slpm N/A 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa) 2) At 80 psig (0.55 MPa) N2 110 Diaphragm Valve for Ultra High Purity Air operated type (Two Step) Series AP3571 & 4571 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow
VMG1-06-150-300 VMG1-06-200-300 VMG1-06-150-600 VMG1-06-200-600 VMG1-06-150-100 VMG1-06-200-100 VMG1-06-150-150 VMG1-06-200-150 VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size Nozzle length 1.5 2 1.5 2 1.5 2 1.5 2 2.5 3 3.5 2.5 3 3.5 2.5
[mmHg] to [kPa]. 1 [mmHg] = 1.3332 X 101 1.3332 X 101 X 350 = 46.662 [kPa] Ex.2) Convert the units of 80[kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 X 102[kgf/cm2] 1.01972 X 102 X 80 = 0.81576 [kgf/cm2] 3.14-13
Nil With R3 3 RB 15 N Without (Roller specification) R5 5 RC 20 Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 Controller Nil Without controller CH With controller C 5 H 7 T (Communication protocal Interface Communication plug connector I/O cable*2 /Input/Output) Symbol Type Applicable interface 5 Parallel inputNPN) Nil Without
See the table below Bolts Refer to
CG1 Standard N 25 B53 L 100 CDG1 With auto switch Number of auto switches S n With auto switch (magnet) 2 1 n Mounting B L F G U Basic Axial foot Front flange Rear flange Front trunnion Rear trunnion Clevis Rod boot (at one side) Auto switch Without rod boot Nylon tarpaulin Heat resistant tarpaulin J K Without auto switch (Built-in magnet) Refer to the table below for selecting applicable
Nil Without auto switch (Built-in magnet) S 1 pc. 6 25 6 mm 25 mm For the applicable auto switch model, refer to the table below. n n pcs. 10 32 10 mm 32 mm 15 40 15 mm 40 mm Adjustment type 20 20 mm Nil With adjusting bolt B With shock absorbers (2 pcs.) Port thread type With shock absorber (With plate A) Installed on side A at time of shipment.