Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

mA), Holding 1.26 VA (6 mA) 200 VAC Inrush 1.38 VA (6 mA), Holding 1.38 VA (6 mA) 220 VAC Note 1) Use dry air to prevent condensation when operating at low temperatures.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

7-6-20.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

0.4

6) Special wiring spec.

MY1

@7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !

New

Step 1 Item Selection item Symbol Page VX2 Air Page 2 2 Water VXN 3 2 q C A Select the fluid. q Medium vacuum Page 4 3 Page 6 Oil 4 Select Body material, Port size and Orifice diameter from Flow rate Pressure of each fluid.

High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Rotary Actuator

4 w q !2 !6 !0 !4 !7 !1 o q !5 !1 Component Parts Description Material Note Description Material Note No. No.

Basic type / Direct mount type Series CY3B/CY3R

6@4 @6!0i q !4 !2 r CY3R6 @3 @7 o u y t @8 !8 !9 @2 CY3R10 2a 3a @0 !5 !6 @4 @9 @6 !0 i q !1 !4 !2 r @3 @7 @8 @5 o u y t @0 !8 !9 @2 CY3R15 to 63 !3 !0 !1 !4 !2 y r i q 2a 3a @0 @4 @9 @6 !5 !6 !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 No. Description Material Note Component Parts No.

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19

New

q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

1

spring pin 6-17-87 2 -XC30 Rod side trunnion 6-17-88 3 -XC34 Rod does not extend beyond non-rotating plate 6-17-90 4 -XC35 With coil scraper 6-17-91 5 -XC36 With boss in rod side 6-17-95 6 -XC37 Larger throttle diameter of connecting port 6-17-95 7 -XC38 Vacuum (Rod through-hole) 6-17-96 8 -XC42 Built-in shock absorber in head cover side 6-17-97 9 -XC51 With hose nipple 6-17-98 0 -

New

DIN terminal 1 + () 2 (+) q There is no polarity. Use compatible heavy duty cords with cable O.D. of 6 to 12 mm.

Modular F.R.L. Units

D Note 6) N.O.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

5 3 3 3 5 5 33 33 33 (mm) NB 5h9 6h9 6h9 NA 8 10 12 K 4 5 6 J 10 12 14 G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 DC 15 18 21 DO 17 20 24 B 30 36 42 R 25 29 34 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Q 6 7 8 Model MHS3-16D MHS3-20D MHS3-25D 0 -0.030 0 -0.030 0 -0.030 4 5 5 VA 2H9 2H9 3H9 UB 4.5 6 6 UA M3 x 0.5 M3 x 0.5 M4 x 0.7

7

suppressor) C 300 U E R B T A N IN OUT SMC 8 x 18 S Q D F U V E DIN terminal G1/2 Cable 6 to 12 C (44) 31.5 R T A SMC IN OUT N B 8 x 18 S Q D F (mm) Electrical entry Model Grommet (with surge voltage suppressor) DIN terminal Grommet Applicable flange A B C E F N Q R S D T T U U 90 (98) V T 76 (84) 179.5 (187.5) 90.5 (98.5) 98.5 (106.5) 85 (93) 192.5 (200.5) 96 (104) 104 (112) 90.5 (98.5

NCQ8

Q J E D-rod Dia.

VFS

-1 VVF2000-26-6 AXT625-6 q w e r t y u Steel plate NBR NBR NBR NBR NBR Resin Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations AXT333-12 Rubber plug NBR !