, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-
5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !
Standard 59 (mm) CQ2 NCQ2 NCQ2 CQ2 NCQ2 P CQ2 P Bore size (mm) Stroke range (mm) W Q N F E M I J G K2 C H K1 Th9 H B C D L Z A inch 12 5 to 30 15 3.5 15.5 25 32 1.5 5.4 5.2 5 #8-32UNC 37.2 30.2 10 M3 x 0.5 3.5 6 6 15 0 0.043 M5 x 0.8 M5 x 0.8 16 5 to 30 15 3.5 29 20 1.5 38 5.4 6 6 38 31 10 M4 x 0.7 #8-32UNC 3.5 8 8 20 0 0.052 M5 x 0.8 M5 x 0.8 20 5 to 50 17.5 25.5 5.5 36 2 47 7 8
VFR40-F(-Q) 2 to 8 VFR41-E VFR41-D(-Q) VFR44-G VFR44-E VFR44-T VFR44-D(-Q) Non plug-in type VV5FR4-10(-Q) 1 2 3 8, 1 2 Side/Bottom 2 to 10 Grommet Grommet terminal Conduit terminal DIN terminal Non plug-in type VV5FR4-40(-Q) How to Order Manifold Assembly
Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F G H I J K1 K2 L M N Q W Z Th9 P 12 16 20 25 0 0.043 37.2 30.2 6 6 25 10 1.5 M3 x 0.5 32 5.2 5 3.5 15.5 3.5 15 15 M5 x 0.8 5 to 30 0 0.052 38 31 20 8 8 29 10 1.5 M4 x 0.7 38 6 6 3.5 3.5 15 20 M5 x 0.8 5 to 30 0 0.043 25.5 17.5 43 34 7 10 36 9.5 2 M5 x 0.8 47 8 8 4.5 5.5 13 M5 x 0.8 5 to 50 0 28 19 47 37 12 12 40 11 2 M6 x
Valve + Interface regulator (ARBQ5000-00 A B C -1 5) q AXT632-25-6 (M4 x 114) 4 w AXT632-66-1 (M4 x 64) 2 Not necessary when mounting the sub-plate. q AXT632-25-4 (M4 x 50) 4 q w Blanking plate Blanking plate (Top) + SUP stop valve (Bottom) For manifold Spacer w AXT632-25-10 (M4 x 34) 2 + Individual EXH (Bottom) (Top) Valve + Individual SUP (Top) (Bottom) q AXT632-25-6 (M4 x 114) 4 For manifold
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
Refer to table q for configuration. Table w Voltage-Electrical Entry-Options Table q Port/Orifice Size Insulation Electrical entry Options 1 (100V) 2 (200V) 3 (110V) 4 (220V) 7 (240V) 8 (48V) 5 (24V) 6 (12V) Class B Class H G C Orifice size (No.)
0 For output 0 V For output +24 V PNP output q w Functions 1 0 4 1 2 3 8 5 6 7 9 Description CN3 No.
to 29 6 to 29 6 to 49 6 to 49 6 to 99 6 to 99 11 to 99 11 to 99 (mm) ( ): Denotes the dimensions of auto switch type.
7 @9 @6 !8 o e @2 @3 @1 !3 !4 @7 @8 !6 !5 q w !2 !1 !
AD48 AD48N(6) AD47 AD47N(6) AD48 AD48N(6) AD38 AD38N(6) (5) N.O.
q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.
Refer to manifolds ordering. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3mm2 x 25C O.D. 1.4 !
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
6 CK1 !1 u t !5 CLK2 !0 o q i @2 @9 #1 @4 @5 #1 @6 #0 @1 @8 !3 @3 @7 !9 @0 !2 !7 !8 t !7 !6 y Enlarged drawing of shim part !