Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: Indicator, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: R, Rc, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Ammonium Hydroxide Compatible, Option: By-pass, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: NPT, Material: Body: PFA, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: NPT, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: Flow Rate Adjustment, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: R, Rc, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 3/4, Thread: R, Rc, Material: Body: PPS, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Port Size: 1/2, Thread: R, Rc, Material: Body: SUS, Endplate: PPS, Diaphragm: PTFE, Option: None, Specification: Vacuum, Z: -

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Fitting Type: w/Double Ferrule Fittings, Applicable Tube Size: 3/4, ø19, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: None, Option 2: Body Wetted Parts Equivalent to EP Grade

Body Class: Class 5, Orifice ø20, Valve Type: Normally Closed, Fitting Type: Integrated Tubing, Applicable Tube Size: 3/4, ø19, Pilot Port Thread Type: NPT 1/8, Material: Body: Stainless Steel, Seal: FKM, Buffer: FKM, Diaphragm: PTFE, Option 1: None, Option 2: Body Wetted Parts Equivalent to EP Grade

Compatible Fluid: Vacuum / Chemical, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 3/4, Operating Temperature Range(°C): 0～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): 0.3～0.5, Orifice Diameter(Ø): 20, Option

Electric Actuators

Refer to page 100 for part numbers. 61 Non-standard Motor Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 200W 25mm/25mm lead Horizontal Mount How to Order G Stroke 3 LJ1H30 F W X10 ND 1 Cable entry direction Top entry Power supply voltage Motor specification Cable entry direction Switch Left entry Matsushita Electric Industrial Co., Ltd.

SMC CORPORATION OF JAPAN

Could you nd the information you required easily using the index and/or the contents,if possible please identify your experience: . . . . . Do you have any comments in general about the SMC manuals?. . . . . product and this manual easy to use. Thank you for taking the time to ll out this questionnaire.

MU

MM NC 7.5Depth4.5 9Depth5.5 10.5Depth6.5 13.5Depth8.5 17Depth10.5 NS 43 45 44 54 53 Model MUB25 MUB32 MUB40 MUB50 MUB63 KA 10 12 14 18 18 N 14 15.5 16 21.5 21.5 ND M5 X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4

CNA

A L1 ND NX B C D Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 ND NX Part No. cylinder bore cylinder bore A A1 E1 L1 MM RR1 U1 ND size (mm) size (mm) CNA +0.058 0 +0.070 0 0.3 0.5 0.3 0.5 32, 40 +0.058 0 +0.070 0 Y-G04 42 14 22 30 M14 x 1.5 12 10 18 32, 40 I-G04 10 16 14 42 16 22 30 M14 x 1.5 12 14 50, 63 Y-G05 56 18 28 40 M18 x 1.5 14 22 50, 63 I-G05 14 20 56 20 28 40 M18 x 1.5 16 20 CNS Applicable pin part no.

5-Port Solenoid Valve

If the layout is specified, indicate it on the manifold specification sheet. i Mounting and Option Symbol Mounting Option Name plate Station number Nil Direct mounting 32 M12 NB NBN 16 NC NCN 32 *4 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *3 GAN Ethernet POWERLINK 32 M12 *3 GBN 16

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Note 3) Do not add value to long stroke models. 4 Compact Cylinder Series CQS Accessories Single knuckle joint Double knuckle joint ND hole H10 axis d9 L MM MM NDH10 RR1 RR1 E1 E1 NX NZ A1 U1 L1 A1 U1 NX L1 A A Metric Threads Metric Threads ND H10 NX Pin part No. NDH10 NX Bore size (mm) Bore size (mm) E1 A1 MM U1 Part No. A Part No.

Compact Cylinder with Air Cushion and Lock Series RLQ

Hole H10 Shaft d9 MM NDH10 MM L RR1 RR1 E1 E1 A1 L1 A U1 A1 L1 A NX NZ U1 NX Material: Cast iron Material: Cast iron (mm) (mm) ND NX Applicable cylinder bore size (mm) 32, 40 50, 63 10 14 18 22 Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

Made to Order

Applicable bore size A A1 E1 L1 MM RR1 U1 ND NX NZ L Y-G04-XC26A 32, 40 42 16 22 30 M14 x 1.5 12 14 10 16.5 36 52.5 Y-G04-XC26B 19.5 Y-G04-XC26C 12.5 Y-G05-XC26A 50, 63 56 20 28 40 M18 x 1.5 16 20 14 16.5 44 66 Y-G05-XC26B 19.5 Y-G05-XC26C 12.5 Note) A knuckle joint pin, 2 flat washers and 2 split pins are included.

Air Cylinder

Applicable bore size (mm) A A1 E1 L1 MM R1 U1 ND NX NZ L Included pin part no.