ITV

1000 2000 2500 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) 14-8-21 22 Series ITV1000/2000/3000 Series ITV305 Linearity Hysteresis Repeatability 1.0 1.0 1.0 0.9 0.8 Output deviation factor (%F.S.)

Step Motor Driver （ Pulse input type ）

2000 2000 2000 Step data default Deceleration 2000 2000 2000 2000 Pushing force 100 100 100 100 Trigger LV 100 100 100 100 Pushing speed 20 30 30 30 Moving force 150 150 150 150 Area1 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 98 - LEHF Basic parameter default Model LEHF10 LEHF20 LEHF32 LEHF40 Lead [mm] 40 / 15 50 / 15 70 / 16 70 / 16 Controller ID 1 1

Table of Contents

Series IR1000/2000/3000 Precision Regulator. Series Variations. Features. Precautions. Series IR1000/2000/3000 Precision Regulator. Specifications. How to Order. Construction. Dimensions . Made to Order Specifications. Series IRV1000/2000/3000 Vacuum Regulator. Features. Precautions. Series IRV1000/2000/3000 Vacuum Regulator. Specifications. How to Order. Construction. Dimensions .

1

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

Precision Regulator

0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Flow rate (L/min (ANR)) Relief flow rate (L/min (ANR)) Supply pressure P1 (MPa) 818 IR1000/2000/3000 Series Made to Order Please contact SMC for detailed dimensions, specifications, each part number and lead times.

V

Note 4) Grommet type (G) is also available for C-kit, single type of VQ0/1000/2000.

Table of Contents

Note 2) Strokes over 2000 mm are available as made-to-order. (Refer to -XB11 on page 10-21-1.)

IR1000/2000/3000

1 Precision Regulator Series IR1000/2000/3000 G F.R.L.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

Uniaxial Electric Actuator Series LJ1

W: Work load (N) L1, L2, L3: Amount of overhang to work piece center of gravity (mm) a: Table acceleration (mm/s) Mounting position Direction of load movement Model LJ1H10 LJ1H20 LJ1H30 Horizontal/Lateral Horizontal/Lateral Vertical Lateral Horizontal a M1 2000 a=1000 a=1000 2000 2000 a=1000 L1 mm L1 mm L1 mm Pitching W a=2000 a=2000 a=3000 a=3000 a=2000 1000 1000 1000 L1 a=3000 0 2 4 6 8

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1000/2000 Plug-in Unit Base Mounted VQ2000 The broken lines indicate DIN rail mounting style [D].

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Socket Hook 1.12-4 VQZ1000/2000/3000 Body Ported Mounting 3 Port Valves on 5 Port Manifolds(VQZ 82 , N.C.

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

HRX-OM-W002

Facility water temp. 2000 2000 2000 2000 Facility water temp. Facility water temp. 2000 2000 Cooling capacity[W] Cooling capacity[W] Facility water temp.

Mechanically Jointed Rodless Cylinders

However, when exceeding 2000 mm stroke, add -XB11 to the end of the model number. Refer to Made to Order on page 40.

Ionizer

0 0 100 200 300 400 500 600 1000 Distance (mm) Distance (mm) Air purge: Yes Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Air purge: Yes Supply pressure: 0.05 MPa (3.5 L/min (ANR) per nozzle) 45 25 40 35 20 Discharge time (s) Discharge time (s) 60 Hz 30 15 25 1 Hz/60 Hz 20 1 Hz 10 15 Sensing DC Sensing DC 10 5 5 00 500 1000 1500 2000 00 500 1000 1500 2000 Distance (mm) Distance (mm

AC

4 Note 1) Bowl guard (SPC) is attached to the bowl assembly of "AW3000" to "AW4000-06". 1.8-4 Filter Regulator AW1000 to 4000 Dimensions Options (AW3000/4000) AW1000/2000 Metal bowl With drain guide AC Drain cock style for AW1000/2000 is same as the standard. Without valve mechanism.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEC Y 10 5 5 Motorless 0 0 500 1000 1500 2000 0 0 500 1000 1500 2000 2500 3000 LAT Speed [mm/s] Speed [mm/s] When the stroke of the LEJB40 series exceeds 1000 mm, the work load is 10 kg.

JXCx-OMT0023

2000 100 100 0 0 3 4000 2000 70 60 500 1 4 -500 2000 60 70 1000 1 Position 5 1000 2000 80 80 0 0 control 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 Position command creation USB I/F CN1 CN3 D I/O con trol Personal Servo-on Start Failure, etc. computer USB Note 1.

IR1000/2000/3000

Setting point 0.4 0.5 0.198 0.4 0.3 0.3 0.196 0.2 0.2 0.1 0.194 0.1 0 1000 2000 3000 4000 5000 6000 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 6000 0 1000 2000 3000 4000 5000 1.0 Relief flow rate l/min (ANR) Flow rate l/min (ANR) Supply pressure P1 MPa 7 Series IR1000/2000/3000 Order Made Specifications Contact SMC regarding detailed dimensions, specifications and delivery times.