0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

LAR T LB LBR /2 400 s or more LZ LZR (4) Analog output Driver Servo amplifier MO1 (MO2) Output voltage: 10 V Maximum output current: 1 mA Resolution: 10 bits or equivalent LG Note. Output voltage range varies depending on the output contents. 3 26 3.

Air Cylinder NCQ7 Series Compact Cylinder

Boro 106 (1116") 400 (4") Auto switch installation.

LG1H

LG1H21PA-100-F LG1H21PA-200-F LG1H21PA-300-F LG1H21PA-400-F 100 200 300 400 60 80 160 260 180 280 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4 sec.)

Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

LEKF-OMZ0035

Weight[kg] Series LEKFS25 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 S2 2.0 2.1 2.3 2.4 2.6 2.7 2.8 2.9 3.1 3.2 3.5 3.7 4.0 Motor type T6 2.1 2.2 2.4 2.5 2.7 2.8 2.9 3.0 3.2 3.3 3.6 3.8 4.1 Additional weight with lock [kg] 0.2 Series LEKFS32 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 S3 3.4 3.6 3.8 4.0 4.3 4.5 4.7 4.9 5.1 5.3 5.8 6.2 6.6 7.1

Step Motor Driver （ Pulse input type ）

1 1 Acceleration / 1 1 1 Deceleration pattern S-motion ratio 0 0 0 Storoke (+) Storoke +1 Storoke +1 Storoke +1 Storoke (-) -1.00 -1.00 -1.00 Maximum speed 200 400 200 400 150 400 Maximum acceleration/ 5000 5000 5000 Basic parameter default deceleration Default In position 0.50 0.50 0.50 ORIG offset 0.00 0.00 0.00 Max force 70 70 70 Para protect 1 1 1 Enable SW 2 2 2 Unit name Part no. of

Magnetically Coupled Rodless Cylinder

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Mechanically Jointed Rodless Cylinder Series MY2

MY2C16 MY2H16 Horizontal impact: P = 0.5 MPa Horizontal impact: P = 0.5 MPa 2000 2000 1500 1500 H unit Impact speed mm/s Impact speed mm/s 1000 1000 L unit 500 400 500 L unit 400 300 300 Air cushion Air cushion 200 200 1000.5 1 2 3 4 5 100 10 30 20 0.5 1 2 3 4 5 10 20 30 m2 max. m1 max. m3 max. m1 max. m2, m3 max.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

C92

160, 200, 250, 320, 400, 500 2900 125 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 CA1 2900 160 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 Intermediate strokes are available.

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

, 450, 500 15 1000 Note 2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact P/A if the maximum stroke will be exceeded.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

KN Series Nozzles for Blowing

Weight (g) L1 M Width across flats H1 H2 Nozzle size D Model KN-04-100 KN-04-150 KN-06-100 KN-06-150 KN-06-200 KN-08-150 KN-08-200 KN-10-250 KN-10-300 KN-10-350 KN-10-400 KN-10-600 KN-12-350 KN-12-400 KN-12-600 KN-16-400 KN-16-600 KN-20-400 KN-20-600 13 14 19 20 22 28 30 35 36 37 30 28 54 55 40 77 79 117 112 15 15 16 16 16 16 16 17 17 17 17 17 17 17 17 17 17 17 17 27 27.7 30.1 30.8 31.5 33.8