5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 9 Other 4 VFR C: Locking type (Lever) 4 Body type VQ7 5 6 1: Non plug-in type sub-plate 7 Option Option Pilot type Nil R Internal pilot External pilot Option How to Order Pilot Valve Assembly Body option 0 1 Standard Direct manual override SF4 F 1 30 Option Manual override Coil rated voltage 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port size (A, B port) VQ7 Type of actuation Nil Non-locking push type 1 Single solenoid 2 Double solenoid 1 8 02 01 Rated voltage B Locking type B EVS 1 4 C Locking type C 1 2 100 VAC, 50/60 Hz 3 Closed center R port of VF370 is Rc. 200 VAC, 50/60 Hz 4 Exhaust center VFN 3 5 Pressure center 110 V to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 4 4 Light/Surge voltage suppressor 5 24 VDC 12 VDC

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical LEJS40H LEJS63H 20 20 LEF Acceleration/Deceleration [mm/s2] Duty ratio: 50% Acceleration/Deceleration [mm/s2] LEJ 15000 15000 LEL Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% 10 10 LEM Duty ratio: 75% Duty ratio: 50% LEY 5000 5000 Duty ratio: 25% LES The value of 50% or less is the same as duty ratio 50% LEPY LEPS 0 0 0 1 2 3 4 5 6 0 1 2 3 Work load [kg] Work load [kg] LER

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

#7 to $1 (excluding #8 and #9) for 50 to 80.

ZP

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Electric Slide Tables

0.5 10 to 200 4 Series LECP6 LES8 30, 50, 75 Basic type/ R Type 1 0.25 20 to 400 8 3 3 10 to 200 5 Step motor (Servo/24 VDC) 30, 50 75, 100 Series LECP1 LES16 3 1.5 20 to 400 10 5 5 10 to 200 8 30, 50, 75 100, 125, 150 Series LECPA LES25 Symmetrical type/L Type 5 2.5 20 to 400 16 Page 1 30, 50, 75 1 1 4 10 to 200 LES8A 1 0.5 8 20 to 400 3 3 5 10 to 200 Servo motor (24 VDC) 30, 50 75, 100

MB

) Ambient and fluid temperature CJ1 Not required (Non-lube) Lubrication CJP 50 to 700 mm/s 50 to 1000 mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance CJ2 Cushion Note 1) Both ends (Air cushion) JIS Class 2 CM2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting CG1 Courtesy of Steven

Modular Design with Uniform Body Style

R S U V1 V2 AC20C-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 40 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30C-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 50 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40C-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 75 35.5 50 75.2 40 55 9 18 7 50 65 AC40C-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 75 35.5 50 80.2 40 55 9 18 7 50 65 Model Optional

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

CG1

47 55 16 8 94 19 39 52.4 1/8 27 10 14 26 37 30 30 6 32 135 M14 X 1.5 50 Up to 300 17 30 58 62 20 11 108 27 45 64.5 1/4 32 12 18 44 32 35 33 7 41 155 M18 X 1.5 63 Up to 300 19 32 72 64 20 11 114 27 45 76.6 1/4 32 12 18 38 50 35 39 7 46 161 M18 X 1.5 With air cushion (mm) Bore (mm) Stroke range (mm) W P WA WB WC WD WH WH2 30 30 25 20 20 20 20 25 32 40 50 63 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1

Cylinder with Lock

1 !5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

Electric Actuator with Integrated Guide

Power supply voltage Lead screw type Photo micro sensor 2 pcs., Photo micro sensor rail 1 pc. P N 1 2 0 100V AC 50/60Hz Ground ball screw Photo micro sensor 3 pcs., Photo micro sensor rail 1 pc. 200V AC 50/60Hz Rolled ball screw Proximity switch (A contact) 1 pc., Proximity switch rail 1 pc. Without motor Proximity switch (A contact) 2 pcs., Proximity switch rail 1 pc.

5-Port Solenoid Valve

V V N7 1/4" V V N9 5/16" V V N11 3/8" V Fixed SS5Y3-50S5-05D-C6 1 set (Type 50 5-station manifold base part no.)

C95

Contents CS95-32 Piston seal 32 #8 1 NBR CS95-40 Tube gasket 40 #9 2 NBR CS95-50 Kits include items Rod seal A 50 $0 1 NBR CS95-63 #0 and #8 to $1.

Electric Actuator

load (kg) Stroke (mm) Size Max. work load (kg) Stroke (mm) High torque Basic 0.2 0.8 6.6 280 High torque Basic 10 30 50 0.3 1.2 10 6 10 1 2 25, 50, 75 6 10 1 2 25 50 420 Gripper Step Motor (Servo/24 VDC) 2-finger type Long stroke 2-finger type With dust cover 3-finger type 2-finger type Series LEHZ Series LEHS Series LEHZJ Series LEHF CAT.ES100-77 Series LEHZ Series LEHZJ Series LEHF Series

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

Hygienic Design Cylinder Series HY

59 74 15.5 15.5 18.5 18.5 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 G 1/8 G 1/8 G 1/4 G 1/4 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 20 20.5 22 24 25, 50, 100, 150, 200 SB Bore size PC PD PE PF QA QB RA RB RC RD RE RF SA 26 to 50 st TA TB TC TD UA UB UC UD PB 25 st or less 51 to 100 st Over 101 st 32 40 50 63 46.5 48 55 52.5 22.5 21 21 23.5 76.5 78 85 82.5 42.5 40.5 41.5 45 16 17 22 23 37.8 42.5 52 61 4.7 4.7 6.2

CNA

100 100 100 MGF 50 50 50 40 40 40 200 200 80 80 80 63 63 63 100 100 CY1 50 50 50 Load weight m(kg) Load weight m(kg) 50 40 30 50 40 30 40 40 40 MY1 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Max. speed V(mm/s) Max. speed V(mm/s) 3.3-7 Cylinder with Lock/Double Acting Single Rod Series CNA 45, 50, 63, 80, 100 How to Order CNA L N 50 100 JN D Standard