MHZ

5@1@2@3 MHZ-A0603 MHZ2-6S MHZ-A0603C wio!0!2!3!5@0@2@3 MHZ2-6C 12-2-30 30 Parallel Style Air Gripper Standard Type Series MHZ2 Construction: MHZ2-10 to 40 Double acting/With fingers open Single acting/Normally open !1 e !9 w @0 @1 !4 MHZ MHF MHL i !7 !6 !5 !0 o q u !2 r t y !3 Single acting/Normally closed MHR !

C85

4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66 46 6 32 8 66 50 6.6 40 42 17 19 40 5 25 19 6.6 36 54 5 8 25 24 66 46 6 32 8 66 50 6.6 40 42 17 23 40 5 25 23 6.6 40 54 5 8

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 !6 !7 !

7ND9071en

Input: Ui 30 V. Output: Ui 30 V.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

30% 70% PF2M725 92% 8% 0.5 to 50 L/min 2.5 to 52.5 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 0.5 to 30 L/min 1.5 to 31.5 L/min 5 V 20 mA 30% 70% PF2M750 92% 8% 1 to 100 L/min 5 to 105 L/min 5 V 20 mA 90% 10% 80% 20% 70% 30% 60% 40% 40% 60% 1 to 60 L/min 3 to 63 L/min 5 V 20 mA 30% 70% PF2M711 * When changing the max. analog output, use the analog free span function on page 28

MXS Series Air Slide Table

(With stroke adjuster at retraction end) 6 6-M5 X 0.8 thread 8 deep 2 (With stroke adjuster at extension end) 30 30 76 46 58 FF 22.5 F 25 5H9 5 deep +0.030 0 N -1 x F 2 5H9 5 deep +0.030 0 27 2-M6 X 1 thread 13 deep 13 M 0.5 45.5 50 Z ZZ (NN-1) X H G H 29 11.5 29 11.5 A B 9.5 5.1 11 11 30 1.5 A B 5H9 5 deep +0.030 0 6 NN-M6 X 1 thread 12 deep 5H9 5 deep +0.030 0 HA GA Cross section AA Cross

Air Fittings & Tubing

5 32 19 19.5 3 16 3.5 16.5 10 11.4 4.6 1 4 17 10 20.5 13.2 6 27.5 18.5 5 16 12 23.5 15.2 21 17 25.5 7 3 8 17.9 30 Note1) D1: max. diameter Extended male elbow: KQ2W Tube O.D.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

HRX-OM-S004

10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 8-5 Cooling capacity(HRS100-A-20/40/46-) 8.4.2 HRS150-A-20/40/46: Ambient temperature: 32 oC : Ambient temperature: 40oC : Ambient temperature: 45 oC 18 18 16 16 14 14 Cooling capacity [kW] Cooling capacity [kW] 12 12 10 10 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10

Environment

Nil Without cable 2 2 5 5 A 10 !

VM

Metal Spool Dimensions Side piping: 30 x 53 x 91 Bottom piping: 30 x 48 x 91 VR4152 INDEX Mechanical Valves Page Series VM1000 P . 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle

KJ

: (800) 258-9200-www.stevenengineering.com T VMG Connecting Female Thread: G Recommended tightening torque (Nm) Approx. spanner tightening angle after tightened by hand (deg) Nominal size of Uni thread 1 8 1 4 3 8 1 2 30 to 45 15 to 30 15 to 30 15 to 30 3 to 4 4 to 5 8 to 9 14 to 15 2.

ZP

across flat 14 Width across flat 14 Width across flat 14 5 5 5 2 2 7 2 2 2 2 12 18 18 12 18 12 Vertical M12 x 1 M12 x 1 M12 x 1 Vertical 30 30 30 Width across flat 14 Width across flat 14 Width across flat 14 With Buffer: Vacuum Inlet With Buffer: Vacuum Inlet 5 5 5 7 7 Lateral Lateral With Adapter: Vacuum Inlet With Adapter: Vacuum Inlet 1.8 1.8 1 1.8 1.2 1.2 10 13 16 11 14 17 Lateral With

HRX-OM-M090

from power failure setting and checking . 5-27 5.11 Anti-freezing function . 5-28 5.11.1 Anti-freezing function . 5-28 5.11.2 Anti-freezing function setting and checking. 5-29 5.12 Key click sound setting . 5-30 5.12.1 Key click sound setting . 5-30 5.12.2 Key click sound setting and checking . 5-30 5.13 Temperature unit switching . 5-31 5.13.1 Temperature unit switching. 5-31 5.13.2 Temperature

ZP

5 x 10 5 x 20 Symbol Breadth x Length (mm) 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 3507 4010 4020 4030 5010 5020 5030 6010 6020 6030 8020 8030 ZF ZP ZCU Dimensions AMJ Series ZPT Series ZPR Series ZPY Misc.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Specifications mm kg C kg mm/s mm 50 2.0 75 2.2 100 2.3 125 2.6 150 2.8 175 2.9 200 3.1 5 to 40 (with no condensation) 6 horizontal/5 vertical Note 1) Standard stroke Body weight Operating temperature range Work load Speed Performance to 30 Note 2) Positioning repeatability 0.03 Motor 5 phase stepper motor (without brake) Ball screw 8mm, 2mm lead Ball bushing Lead screw Main parts Guide Note

Rotary Table/

Note 10 P523020-5 30 A set of above numbers r, !2, !3, !7, !

IDG

IDG 10 M 03 X016 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Option Size Symbol Contents Size 3 3 10 20 30 50 5 5 Nil Standard R Flow direction (Right Left) 10 20 S With dew point indicator Standard equipment 30 50 Drain discharge symbol Standard dew point

JIS Standard Hydraulic Cylinder

5 !8 !9 !6 !7 @9 !2 @2 @4 t e !0 CH2G Series !3 @3 r @5 !

MNB

F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-6-6 7 Model Selection Series MNB Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 1000 1000 500 400 300 500 400 300 100 100 80 80 200 200 63 63 100 100 50 50 40 40 80 80 100 100 Load weight: m (kg) Load weight: m (kg) CL 63 63 50 40 30 50 40 30 32 32 50 50 40 40 CL1 20 20 32 32 MLGC 10 10 CNG 5 4 3 5 4 3 MNB Courtesy