Type: Coil, Material: Urethane, Cutting Service: Not Available, Color: [Transparent (Including Non-Whites)] Translucent, Outer Diameter Class: ~10, Compatible Fluid: Air, Outer Diameter D(Ø): 10, Inner Diameter Class: ~7, Inner Diameter d(Ø): 6.5, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): -, Operating Environment: Standard, Coil Winding Length(m): -, Applicable

Type: Coil, Material: Urethane, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~15, Compatible Fluid: Air, Outer Diameter D(Ø): 12, Inner Diameter Class: ~8, Inner Diameter d(Ø): 8, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): -, Operating Environment: Standard, Coil Winding Length(m): -, Applicable Tube Size: -, Specification

Type: Coil, Material: Urethane, Cutting Service: Not Available, Color: [Transparent (Including Non-Whites)] Translucent, Outer Diameter Class: ~15, Compatible Fluid: Air, Outer Diameter D(Ø): 12, Inner Diameter Class: ~8, Inner Diameter d(Ø): 8, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): -, Operating Environment: Standard, Coil Winding Length(m): -, Applicable

Type: Coil, Material: Urethane, Cutting Service: Not Available, Color: [Red] Red (opaque), Outer Diameter Class: ~15, Compatible Fluid: Air, Outer Diameter D(Ø): 12, Inner Diameter Class: ~8, Inner Diameter d(Ø): 8, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): -, Operating Environment: Standard, Coil Winding Length(m): -, Applicable Tube Size: -, Specification

Type: Coil, Material: Urethane, Cutting Service: Not Available, Color: [Yellow] Yellow (opaque), Outer Diameter Class: ~15, Compatible Fluid: Air, Outer Diameter D(Ø): 12, Inner Diameter Class: ~8, Inner Diameter d(Ø): 8, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): -, Operating Environment: Standard, Coil Winding Length(m): -, Applicable Tube Size: -, Specification

1

6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 OFF ON Max. 10 Symbol 2 port 60.8 (A) 2 23 R port (3 port only) 33.5 12 10 112.8 1 (P) 3 port (A) 2 52 22 13 12 10 32 1 (P) 3 (R) 16 2 x 1/4 2 x 5.5 mounting hole 25 30 40 * 0.5 MPa supply F.O.F.* 12 N T.T. 60 Push button (Mushroom) VM220-02-30 (R, B, G, Y) A VM230-02-30 (R, B, G, Y) A Panel mounting hole 40 T.T. 29.5 22.1 Max. 6 3

2

Connection Female Thread: Rc, NPT, NPTF Uni thread size Wrench tightening angle after hand-tightening (deg) Tightening torque (Nm) 1/8 30 to 60 3 to 5 1/4 30 to 60 8 to 12 3/8 15 to 45 14 to 16 1/2 15 to 30 20 to 22 Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening (deg) Tightening torque (Nm) 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to

Table of Contents

For detailed specifications, refer to page 8-30-1.

Table of Contents

30 30 Data 20 20 20 1.

CATALOG

10 M8x1.25 6 71 M14x1.5 40 27 7/16-20 30 ~600 20~600 35 70 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 M8x1.25 7 80 M18x1.5 50 32 3/4-16 30 ~600 20~600 35 86 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 M18x1.5 63 32 3/4-16 40 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 M22x1.5 80 37 3/4-16 48 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31

Table of Contents

Rc 1/8 56 57.5 30 14 41 40 5.5 M6 x 1 Rc 1/8 62 64.5 30 14 49 50 6.6 M8 x 1.25 Rc 1/4 61.5 76.5 35 19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

A

10 M8x1.25 6 71 M14x1.5 40 27 7/16-20 30 ~600 20~600 35 70 108 1/4 1/4 52 20 40 10 95 17 27 59 13 12 M8x1.25 7 80 M18x1.5 50 32 3/4-16 30 ~600 20~600 35 86 115 1/4 1/4 64 20 40 10 102 17 26 67 18 15 M10x1.25 7 99 M18x1.5 63 32 3/4-16 40 ~750 20~750 40 102 129 1/4 1/4 78 25 52 14 113 21 30 72 23 17 M12x1.75 11 117 M22x1.5 80 37 3/4-16 48 ~750 20~750 40 116 140 1/4 1/4 92 30 52 14 124 21 31

Compact Hydraulic Cylinder

M14 1.5 32 25 to 800 45 33.2 32 1/4 56 12 46 23 17 18 12 7 19 16 15 18 43 12 14 35 30 M8 1 M16 1.5 40 25 to 800 63 41.7 43 3/8 73 14 51 32 17 22 18 9 19 20 19 22 19 47 12 37 34 M12 1.25 M20 1.5 50 25 to 800 75 52.3 60 1/2 74 20 57 33 29 28 18 11 32 30 25 28 53 24 42 9 42 M12 1.25 M27 2 63 25 to 800 90 64.3 60 1/2 80 20 55 33 29 36 17 13 32 30 32 36 68 13 30 50 39 M16 1.5 M33 2 80

Table of Contents

2 2 0.3 0.4 0.4 D0.2 1 1 0.3 200 30 20 10 0 30 20 10 0 30 20 10 Gripping point L mm Gripping point L mm Gripping point L mm 12-8-11 12 Series MHC2/MHCA2/MHCM2 Confirmation of Inertial Moment of Attachment Step 2 Confirm the inertial moment of one of the two attachments.

Electric Actuators

Stroke + 124 Stroke + 141 Motor unit 4.5 4H9 4H9 3 6 38 34 Section C detail (Scale: 5/1) Stroke + 104 Stroke + 121 12 7.5 4-M6 x 1 4H9 E 1 5.4 8.4 4-9.5 4-5.6 50 4.5 Section C 4-M6 x 1 9 43 5.5 D 30 Cross section BB Refer to page 300 for mounting.

Air Slide Table

14.9 16.7 M8 x 1 2.5 MXQ12B 27 13 5 20 20.2 21.9 M10 x 1 3 MXQ16B 30 16 6 27 25.5 28.1 M12 x 1 4 MXQ20B 31 17 6 27 32.3 34.8 M14 x 1.5 5 Model C F J K L1 L2 M N MXQ12 29 11 7 16.2 21.9 23.7 M8 x 1 2.5 MXQ12A, MXQ12C 18.9 20.7 MXQ16 30 11 9 20 27.2 28.9 M10 x 1 3 MXQ16A 25.2 26.9 MXQ20 26 6 9 27 34.5 37.1 M10 x 1 4 MXQ20A 31.5 34.1 MXQ25 45 25 12 27 41.3 43.8 M14 x 1.5 5 MXQ25A 38.3 40.8 MXQ8B

Table of Contents

3.5 1 2 5 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

Compact Cylinder

size Stroke (mm) 15 25 35 52.5 45.5 3.5 49 15 25 35 58 47 3.5 54.5 15 25 35 65.5 56 3.5 62 M16 x 2 21 15 25 35 75 65.5 3.5 71.5 15 25 35 51.5 45 3.5 48 M6 x 1 9 15 25 35 43 35.5 3.5 39.5 M6 x 1 9 5 10 10, 20 30, 40 10, 20 30, 40 10, 20 30, 40 10, 20 30, 40 10, 20 30, 40 5 15 Symbol A B L S H C 37 30.5 3.5 33.5 M6 x 1 9 33 25.2 3.5 29.5 47.5 40.5 3.5 44 53 42 3.5 49.5 60.5 51 3.5 57 M16 x

Hydraulic

) Load (kN) 126 Technical Data 2 Series CH2E, CH2F, CH2G, CH2H Stroke range limit charts: Bore sizes 50, 63, 80, 100 Bore size 50 B-rod C-rod 5 2 4 8 3 7 2 4 8 3 7 5 2000 6 1 6 1 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 30 0.5 1 5 10 20 30 Load (kN) Load (kN) Bore size 63 B-rod C-rod 2000 1 2 8 5 4 3 7 6 1 2 3 5 4 8 7 6 1000 Stroke (mm) 500 100 50 0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (