Thermo-chiller

) Ambient temperature 104F (40C) 10 10 8 8 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 6 6 4 4 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] Circulating fluid temperature F [C] Circulating fluid temperature F [C] HRS150-W -20/40(50 Hz) HRS150-W -20/40(60 Hz) 20 20 Facility water temperature 90F (32C)

Valve Single Unit

Thread type Nil Rc G F N NPT Dimensions NPTF T Applicable fitting d Model A L D Gasket KQ2P-04 16 32 6 4 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 Series Round head combination screw Gasket 22 16 18 20.5 22 12 6 8.5 10 11.5 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 10 5/32" 1/4" 5/16" 3/8" 43 32 35 39 43 Caution SX3000 SX3000-22-2 (M2 x 24) M3 x 30 (Matt nickel plated) M4 x 35 (Matt nickel plated

/

30 37 47.5 55 22.5 22.5 25 25 50 63 80 90 35 35 40 40 90 98 110 116.5 11 14 18 21 VXEZ2230 VXEZ2240 VXEZ2350 VXEZ2360 (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry Port size P Model L a b d e f g h i N.C.

Cylinder with Lock Series MNB

10 40 to 800 30 22 8 52 104 38 16 13 14 16.5 19.5 63 12 4 96.5 27 1/8 91 52.5 14 40 12.5 50 to 1000 35 27 11 65 120.5 46.5 20 14 15.5 19 22.4 75 15 5 111.2 32 1/4 104.5 58.5 18 45 17.5 63 to 1000 35 27 11 75 134.5 56.5 20 14 16.5 23 20.7 90 12 9 123.5 32 1/4 119.5 68 18 45 22 80 to 1000 40 32 13 95 169 72 25 20 19 33 26 102 18 11.5 157 37 1/4 150 81 22 55 25 100 to 1000 40 41 16 114 189

HRX-OM-T002

5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

106 48 5 3H9 (+0.025 0 ) depth 35 3H9 (+0.025 0 ) depth 35 8 46 46 47 47 H G *1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

53

Conditions DC inverter Inverter fan pump Low High Motor rotation rate (For air-cooled type) Inverter pump Power reducing effect of the inverter pump Inverter pump Current model HRSH090 35 L/min 55 L/min Inverter Power consumption (Pump only) Power consumption (Pump only) pump 0.6 kW 1.1 kW Tank Tank 55 L/min 35 L/min 35 L/min 0.3 MPa 35 L/min 0.3 MPa Users equipment Users equipment The motor

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers

Modular Type Lubricators Series AL

35 45 47.5 E 30 38 38 45 G 35 60 80 110 110 110 110 J 12.5 20 26.5 35 35 45 47.5 M 30 41 50 50 70 70 N 27 40 54 54 66 66 Q 22 23 26 25 35 35 R 5.4 6.5 8.5 8.5 11 11 S 8.4 8 10.5 10.5 13 13 T 40 53 70 70 90 90 U 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 Model Semi-standard specifications With barb fitting Metal bowl Metal bowl with drain cock Metal bowl with

SMC Pneumatic Clean Series

(mm) AL Bore size Stroke range Symbol B B B1 C D E FV FD FT J FX FY MM M FZ P S ZZ A GAGB H H1 K KA N 12 80 42 33 11 40 15 M8 x 1.25 27 Up to 1000 51 30 8 27 6 71 14 60 1/4 22 44 16 32 60 9 100 102 165 M14 x 1.5 12 90 50 35 11 50 17 M8 x 1.25 30 Up to 1000 58 35 11 32 7 81 18 70 3/8 27 52 20 40 70 9 110 108 178 M18 x 1.5 15 59 35 14 63 17 31 Up to 1000 58 35 11 32 101 7 18 85 3/8 27 64 20

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

VQC

Even when the ambient temperature range is within the specifications, do not use in locations where there are rapid temperature changes. 35 Series VQC Specific Product Precautions 4 Be sure to read before handling. Refer to pages 29 through 32 for safety instructions and common precautions. Power Supply Safety Instructions Caution Cable Safety Instructions Caution 1.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

LX

Driver Energization type Divisions per rotation Full step 200 LC6D-220ADHalf step 400 Full step 500 LC6D-507ADHalf step 1000 Dimensions 100 97 52 42 Operation window 35 38 96 35 Label DIN rail holding plate Connectors (included) [Manufacturer: Molex Japan, Co., Ltd.] Quantity Description Part no.

AS

Max. 34.4 18 18 38 4.5 16.8 37.6 1/8" 8.4 38 4.5 16.8 37.6 3.2 8.4 AS1001F-23-3 AS1001F-01-3 12.7 12.7 12 8 10.5 19 19 39.2 5.2 17.4 38.2 35 9.3 39.2 5.2 17.4 38.2 35 4 3.5 9.3 5/32" AS1001F-04-3 AS1001F-03-3 3.5 12 8 10.5 20 24 6.2 18.5 6 40.7 6.2 18.5 39.3 36.1 13.5 11.4 48.7 11.6 3/16" 16.5 AS1001F-06-3 AS1001F-05-3 39.3 36.1 28 21 4 40.7 5.2 20.7 48 42.5 12.7 12 40.7 1/4" 9.3 13.7 AS2001F

Membrane Air Dryer

20 209 195 1/4 7 12 6 6 10 66 209 14 99 78 40 24 223 209 1/4, 3/8 56 80 56 195 241 195 10 18 10 89 70 95 70 35 50 35 20 28 20 209 255 209 195 241 195 1/4 3/8 1/4 7.5 14 12 7 6 127 7 6 12 10 7 89 35 Made to Order Series IDG

0.55

Pg7 3.5 to 7 30.5 64.3 56.8 (AC) 53.1 46.1 (AC) 42 35 19.6 45.3 35.5 47.5 (AC) 30 37.7 (AC) 30 28 Series VF1000/3000 Dimensions (mm) VF3000 1/8", 1/4" [4(A), 2(B) port] 2 x 4.3 (For mounting) 25.5 10 Manual override 4A 1 26.4 20 2B 23 19 (1.6) 66.2 G: Approx. 300 H: Approx. 600 (Lead wire length) (6) 90.9 (AC: 93.1) (Indicator light) 55.5 (10) (E type) (AC) 38.6 42 (45) (55) 31.5 35 35 19.6

0.

.: 3.2, 1/8" 4, 5/32" 6, 1/4" C6: 44.1 N7: 47.9 (3.2) 15 1/8 [1(P), 3(R) port] 8 L4 L3 M5 x 0.8 [2(A) port] 2 x 4.3 (For mounting) L5 6.5 13.4 16.3 (8) 19.3 21.6 41.2 46.5 A 2 A 2 A 2 A 2 A 2 1 P R 3 59.3 43.9 35 1 P R 3 (5.5) (66) (35) + + + + + (4.5) Manual override (DIN rail) Approx. 300 44.9 5.5 5.5 (Lead wire length) (Pitch) P = 10.5 M5 x 0.8 (PE: Pilot EXH port) 16.5 (DIN rail clamp

High-Precision Digital Pressure Switch

-B ZS-46-5F Panel mount adapter + Front protection cover ZS-35-E F Options/Part Nos.