Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VS7-6

VFR VP7 Individual SUP Style An individual SUP spacer (VV72-P-03, 04) mounted on the manifold-block allows each valve to be supplied individually.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Default) Spare Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 3 36 4. STARTUP 4.

AS-FG/ASD-FG

Note) Use Series AS-F with -X214 for the throttle valve.

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.

VQZ1000/2000/3000

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Blanking plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 6 8 10 12 31.5 32 35 39 43 3.2 4 6 8 10 16 16 18

VFA3000

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

Air Cylinder Series CM2

CJ2 Rod boot Mounting style Basic style B F U None Nil J K CM2 Rod side flange style Nylon tarpaulin Rod side trunnion style Heat resistant tarpaulin CG1 Made to Order (Refer to page 200 for details.) MB 32 F CM2 P 150 MB1 CA2 32 With auto switch CDM2 150 F M9BW P CS1 Number of auto switches Centralized piping type CS2 With auto switch (Built-in magnet) 2 pcs.

7

/VXD2 Body Material: Aluminum, C37, Stainless Steel Grommet 3 A VXD2 Port size 04 (1/2) (With bracket) 300 U E C 7.5 1.6 7.5 1.6 5.5 T A b a B 5.5 OUT IN OUT IN M b a OUT IN 18 2 x P Port size d e (D) L K f J F I f 2 x P Port size d e Grommet (with surge voltage suppressor) C 300 U E A B T OUT IN M I J F 2 x P Port size L K (D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN

HRX-OM-Y120

(C or F). Read the circulating fluid discharge temperature which is displayed on the touch panel.

Vacuum Pad: Ball Joint Type

F P ZPT40F12.5 18.5 39 39 40 43 8 12 14 ZPT50F13.5 19.5 40 40 50 53 712 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry: With Buffer ZPT Series How to Order ZPT 10 F GN J 20 04 A10 Mounting (Refer to Table (1) for applications.)

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

NL F D C Y 2.5 A B Dimensions (mm) A B C D F N NL P Y Model ZPT40F-B8 M8 x 1.25 8 12 40 43 12.5 18.5 39 5 ZPT40F-B01 Rc 1/8 6.2 14 ZPT50F-B8 M8 x 1.25 8 12 50 53 13.5 19.5 40 6 ZPT50F-B01 Rc 1/8 6.2 14 13-11-105 10 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry With Buffer Series ZPT How to Order ZPT 10 F GN J 20 04 A10 Mounting thread diameter/Male thread (Refer to Table (1) for applications

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

flats 12 N 8 R F Applicable tube O.D.

AC Servo Motor Driver

PULSE F 10m max.

SYJ300/500/700

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/Surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (MO): SYJ52-WO-M5 (-F) Applicable cable O.D.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Barrier 52-SY7000 Without barrier Z728.H MTL728P+ KFD0-SD2-Ex1.1065 Nil A B F Note) One barrier per solenoid supplied.

90

Note) When ordering ejector without valve, select Nil for mounting. 04 KJH C2 Port size 04 06 03 07 !

CL

Symbol Bore size 40 to 100 125 to 160 40 to 160 CLQ Rod boot Note) Nil MLGP F Cushion Note) Auto switches are not available with steel tube.

CL

How to Order CL Number of auto switches L 100 200 F JN CL1 CL1 Without auto switch 2 pcs. 3 pcs. 1 pc. n pcs.

Plug-in/Plug Lead: Single Unit

How to Order Single Valves (Example) VQC VQ5100 5 04 SQ Cylinder port Port size Thread type 1(P), 5(R1), 3(R2) and 4(A), 2(B) port How to Order Manifold VQ0 VQ5100 R 5 04 VQ4 Nil N T F Rc NPT NPTF G External pilot specifications VQ5 VQZ How to Order Manifold VQD VV5Q51 08 03 FU1 Cylinder port Port size Thread type 1(P), 5(R1), 3(R2) and 4(A), 2(B) port External pilot port Rc 1/8 External