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When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

When 1 digit = 1 kPa, the pressure is given with an increment of Digit (Min. setting unit) 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

When 1 digit = 1 kPa, the pressure is given with an increment Digit (Min. setting unit) of 1 kPa, e.g., 1, 2, 3,, 99, 100. E Energy saving automatic control Indicate that the vacuum pressure during adsorption is monitored and ON and OFF of the ejector is automatically controlled.

AFF20 AFF30 AFF40 Port size 1/8, 1/4 1/4, 3/8 1/43/8, 1/2 Fluid Air Ambient and o fluid temperature -5 to 60 oC (No freezing) Proof pressure 1. 5MPa Max. operating pressure 1. 0MPa Min. operating pressure 0.05MPa Min. operating pressure of auto drain N.C. 0.1MPa 0.15 MPa N.O. 0.1MPa Nominal filtration rating Note 1) 1 m (99% filtered particle size) Water droplet removal ratio Note2) 99% Max

Min. operating pressure of auto drain 0.1MPa N.O. 1m Nominal filtration ratingNote1) (99% filtered particle size) Water droplet removal ratioNote2) 99% Max. air flow capacityNote3) 2200L/min(ANR) 3700L/min(ANR) Compressed air purity classNote4) ISO8573-1:2010 [4:7:4] 100cm3 Drain capacity Bowl material Stainless steel Weight 1.23kg 1.46kg Note1) Conditions in accordance with [Test method

) Water droplet elimination factor Note5) 99% Note 1) When selecting Option H, Option J Note 2) Air flow capacity with 20 oC, atmospheric pressure and relative humidity of 65 %.

OPERATING PRESSURE 0.05MPa (With auto drain : 0.1MPa) AMBIENT TEMPERATURE 5 to 60 FLUID TEMPERATURE 5 to 60 FLOW RATE (m3/min) 12.4 23.7 30 45 CAPACITY (m3) 0.023 0.023 0.038 0.054 WEIGHT (kg) 50 50 72 88 3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol Nil FILTRATION RATING 0.3m (FILTRATION EFFICIENCY 99) for FILTRATION RATING Symbol X13 ELEMENT LIFE One year or when pressure

1.5 x 15 95 8.7 12 M8 x 1.25 10.5 M20 x 1.5 REC P PA PB Model PW Q QW S T TT ta tb W Z TN Nil TF CY REAS15 50 75 30 62 12.5 22.5 0.5 1 72 97 30 75 M5 x 0.8 REAS20 40 70 90 90 38 73 16.5 25.5 87 115 Rc 1/8 NPT 1/8 G 1/8 CX REAS25 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 Rc 1/8 NPT 1/8 G 1/8 REAS32 75 110 50 91 18.5 28.5 0.5 1 119 138 40 122 Rc 1/8 NPT 1/8 G 1/8 MQ REAS40 105 120 64 99

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

13 7 59 4.5 118 114 140 19.5 11 L1 Rod end nut 100 53.5 13 7 71 137 136 162 6 23 12.5 Front flange type: CLQF/CDLQF FV M Front flange type (mm) A + Stroke L FT B + Stroke G 4-FD FZ FX With auto switch Without auto switch Bore size (mm) Stroke range FD FT FV FX FZ G L L1 M A A B B 36 92 10 to 50 63 102 46 9 9 80 92 108 38 18 43.5 60 46 102 75, 100 43.5 106.5 10 to 50 80 116.5 53.5 11 11 99

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

Bore size 20, 25 32, 40 50 Stroke range 16 to 49 21 to 99 31 to 99 Allowable kinetic energy Stroke range Refer to "Selection" on page 22 regarding the allowable kinetic energy. Part number: RQB32-47 A special tube is manufactured for a 47mm stroke.

Bore size (mm) 32, 40 50, 63 Stroke range (mm) 21 to 99 31 to 99 Stroke range Part number: RLQB32-47-B A special tube is manufactured for a 47 mm stroke.

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

. + 5 95 (mm) E Mounting screw Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size Y 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)/2 63.5 ( 20 Stroke)/2 61 ( 25 Stroke)/2 63.5 ( 30 Stroke)/2 63.5 ( 40

(DI control kit) M Various alarm displays (Refer to page 117.) 99 Electrical Resistivity Control Communications DI control kit (Refer to Options on page 118.) Electrical resistivity of circulating fluid (ethylene glycol aqueous solution and deionized water) can be controlled.

Setting of slave addresses for simple communication protocol Setting range: 1 to 99 to Setting/Checking: Communication speed (simple communication protocol) 15. Press the [SEL] key once. Setting screen of communication speed (simple communication protocol) is displayed on the digital display. PV SV 16.

Set range is 1 to 99. to Communication speed (MODBUS) Setting and checking 11. Press the [SEL] key once. The set screen of communication speed (MODBUS) is displayed on the digital display. PV SV 12. Select communication speed (MODBUS) from the table below with [] key or [] key, and confirm by pressing SEL.

Conductor size: AWG24 to 30 Dimensions [mm] Model LA LB LC LD LEC-MR-RB-032 30 119 99 1.6 LEC-MR-RB-12 40 169 149 2 MR-RB manufactured by Mitsubishi Electric Corporation. 24 Series LECSS-T Options USB cable PC Setup software (MR Congurator2) LECSS2-T Setup software (MR Congurator2) (LECSA, LECSB, LECSC, LECSS common) LEC MRC2 Display language SW1DNC-MRC2manufactured by Mitsubishi Electric