Aluminum High Vacuum Angle Valve Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.
-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.
During Auto tuning Auto tuning failure A T 1 E R R 1 9 P V < 2 3 . 0 C # 1 A T F a i l u r e A u t o T u n i n g M O D E S h u t O f f C a n c e l : A T k e y <4> External sensor sampling cycle setting: Mode indication External Sensor Sampling Cycle. Default value: 180 sec. Setting range 10 to 999 sec.
U1 U U1 X1 X X X1 2 x 5.3 Mounting hole 2 x 5.3 Mounting hole D G1/2 D 280 Q F 11 Q F 23 C R C R E IN OUT IN OUT 1.2 1.2 E B B1 B1 B 2 x P Port size 2 x P Port size Terminal part Faston connector 250 Series 11 9 6.5 15 (mm) Bracket mounting B B1 C D E F U U1 W X X1 Y One-touch fitting P Model 69 37.5 90 (96.5) 35 15.5 22 54 27 44 65 32.5 56 VXZ2 3 A 10, 3/8", 12 Electrical entry Conduit Faston
7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.
Piping Applicable fluid Series Output type Enclosure Copy function 1/4 (R, NPT, G) (URJ*1/TSJ*2) M5 female thread 1/8 (R, NPT) ZSE20(F)/ ISE20 1 output IP40 U U p. 7 ZSE20A(F)/ ISE20A 2 outputs New New Analog output (Voltage/Current) IP40 U U Air p. 9 ZSE20B(F)/ ISE20B 2 outputs New New Analog output (Voltage/Current) IP65 U U U p. 11 ZSE20C(F)/ ISE20C(H) 2 outputs General fluids New
( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH SDJ1 SDJ2 SDQ SDR1 SDR2 SDV L kit Lead wire kit with 0.6 m cable Note 3) Lead wire kit with 1.5 m cable 1 to 12 stations Lead
(Except L kit) U D U D The maximum and minimum number of stations are varied depending on kit. (Refer to the table below.)
Finger Position/Narrow Type 11.6 MHZ2-16N 5.8 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 12.6 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible.
Finger Position/Narrow Type 11.6 MHZ2-16N 5.8 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 12.6 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible.
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description
nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40
A port B port 3-Q1 For unit mounting (mm) A B C D E(g6) F(h9) G H J K L M N P Q1 R S1 S2 T U V W X Model CRBU2W15-D CRBU2W15-DE CRBU2W20-D CRBU2W20-DE CRBU2W30-D CRBU2W30-DE M5 x 0.8 M3 x 0.5 10.5 10.5 11 10 11.511 14 13 12 13 15.514 0.004 0.012 0 0.043 5 12 34 25 9 18 1.5 15.5 6 10 0.5 29 M3 x 0.5 3.5 M3 x 0.5 21 3 29 36 48 0.004 0.012 0 0.043 6 14 42 34.5 10 20 1.5 M5 x 0.8 17 7 10 0.5
u u Drain Drain Drain Parts list Material No.
Hi Lo Auto shift input Time Repeatability IP65 compatible Dust-tight/Splash proof type 0.2% F.S. 1digit or less 111 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO ISE40 01 22 ZSE40 01 22 Nil F A Bracket B (ZS-24-B) B Bracket D (ZS-24-D) D Panel mount (ZS-22-A) E Description Bracket A Bracket B Bracket D Panel mount Panel mount + Front protection Symbol A B D E F Nil M Lead
light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.
Auto Switch Mounting Heights (mm) D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-M9 D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V D-Y69 D-Y7PV D-Y7WV Bore size (mm) U 21.5 24.5 31.5 35.5 40.5 Note) U 28 30 34 38.5 44.5 53 63.5 76 U 25.5 27.5 31.5 36 Note) U 31.5 35.5 40.5 48.5 58.5 71 U 31.5 35.5 41.5 50 60.5 73 20 25 32 40 50 63 80 100 48.5 58.5 71 50.5 61 73.5 Note 1) D-A9/A9V models cannot be
W D E W a MA A K F NA NB U CX 0.3 S + Stroke H L 0 0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074
Connector type F: D-Sub connector (25 pins) P: Flat cable (26 pins) Supply/Exhaust block mounting position Power supply terminal specifications U D B M U Side (2 to 10 stations) D Side (2 to 10 stations) Symbol P P12 N N12 Specifications Both sides (2 to 20 stations) 24VDC, positive common Special specifications 12VDC, positive common In the case of special specifications, indicate separately