C95

K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-12-10 Series C95 ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double

Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

CV/MVGQ

18 22 26 86 83 83 84 85 27 30 31 37 40 38 43.5 49 63 73 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 18 18 18 20 20 Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 221 231 239 271 283 W l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke H 51 58 58 71 72 ZZ 229 239 247 280 292 h 59 66 66 80

C95

23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50 70 25 11 76 96 6-12-10 11 ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 Dimensions: Piston Rod Mounting Accessory [First angle projection] Floating Joint JA Steel M Part no.

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Compact Cylinder with Lock Series CLQ

42 14 22 30 M14 x 1.5 12 14 10 50, 63 Y-G05 56 20 28 40 M18 x 1.5 16 20 50, 63 I-G05 14 22 56 18 28 40 M18 x 1.5 16 20 14 80 Y-G08 71 23 38 50 M22 x 1.5 21 27 80 I-G08 18 28 71 21 38 50 M22 x 1.5 21 27 18 100 Y-G10 79 24 44 55 M26 x 1.5 24 31 100 I-G10 22 32 79 21 44 55 M26 x 1.5 24 31 22 Applicable bore size (mm) Applicable pin part no.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

MXS

MX With end lock(25) MXS25-llR With buffer(25) MXS25-llF 2-M8 X 1.25 thread 15 deep MXU J 18 Operating port 2-Rc (PT) 1/8 MXS 25.5 18 70 MXQ MXF 31 50 MXW 0.5 55 35 MXP * Dimensions not indicated are the same as the basic style.

3 Port Air Operated Valve Series SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

High Power Cylinder Series RHC

flats KA 10 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) A AL D E F FL GA GB H H2 H1 JC JD K KA LD LH Bore size (mm) 20 43 18 10 30.5 15.5 14.5 5 16 8 11.5 7 53.5 25 47.5 44 8 5 25 39 22 12 25.5 19.5 18 5.5 16 10 11.5 7 56.5 28 49.5 48 8 6 32 36 22 12 28.5 19.5 18 5.5 19 10 14.5 7 55 30 51.5 51 9 6 40 32 24 16 23 21 20.5 7.5 21 14 16.5 9 56 35 51.5 54.5 11 8 LT LX LY

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm) Female rod end A1 8 8 12 13 18 18 MM M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5

CP95

(mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-13-12 12 Series CP95 ISO/VDMA Cylinder: Standard Type Double

CP95

9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12

CNG

15.5 13 38 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12

MY1

Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

HRX-OM-W002

19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6

Fieldbus System

P. 20 How to Order Specifications Parts Description Dimensions P.27 Series SV (IP67) Analog Unit Manifold solenoid valves Unit to input or output analog (voltage/current) signals P. 10 P. 15, 16 P. 18 P. 20 How to Order Specifications Parts Description Dimensions End Plate P.39 Unit to supply power to the EX600 system P. 10 P. 16 P. 18 P. 19 How to Order Specifications Parts