ZQ-OM01401 ) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25
A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10
Specifications 0.01 m (95% filtered particle diameter) Filtration of outlet air Max. 0.1 mg/m3 (ANR) (0.08 ppm) Note) Outlet air oil mist concentration (Prior to oil saturated 0.01 mg/m3 (ANR) or less, (0.008 ppm or less)) Note) With inlet air oil mist concentration of 30 mg/m3 (ANR) (24 ppm) Applicable Model Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
O After a few seconds at 10-6Torr 41
Q R Model Port size A B C D M P N B B E F G H J K L 1/8, 1/4 1/4, 3/8 124.5 153 153 188 3.3 4.3 0.8 0.8 80 80 80 105 140 181 181 238 38 38 38 41 40 48 53 70 147.5 56.8 60.8 60.8 65.5 30 41 41 50 50 64 64 84 24 35 35 40 5.5 7 7 9 8.5 11 11 13 5 7 7 7 22 34.2 34.2 42.2 50 70.5 70.5 88 23 26 26 33 AC2001 AC2501 AC3001 AC4001 194 194 229 1/4, 3/8 1/4, 3/8, 1/2 Option marks in the dimension diagram
R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5
R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 Series VQ5000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 5 1 08 03 F U1 Option Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc
42 Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.
In common Type 60 SY3 60 Cassette type Individual wiring SY5 60 P. 59 R Size and weight reduced by eliminating the manifold base + + P SY7 60 Type 41 Compact bar stock type Individual wiring SY3 40 SY5 40 + + + + P. 79 The base mounting facilitates maintenance after valves are changed.
x 26 Round head combination screw M3 x 26 Round head combination screw Manifold gasket Manifold gasket Applicable base Applicable base VK300-45-1 Sub-plate VV3K3-40 (-Q) (S) 42 (-Q) VV5K3-40 (-Q) (S) 41 (-Q) (S) 42 (-Q) VV3K3-20 (-Q) 21 (-Q) VV5K3-20 (-Q) 21 (-Q) Manifold base Manifold base Caution Mounting Screw Tightening Torques M3: 0.6 Nm Body ported VK300-41-1A Base mounted VK300-41
Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.
Spacer with Bracket: (Z) G F.R.L. body center C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X A G Seal Y200T Y400T F J H K D Applicable models F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50 EE 27 33 G 4.5
55 + Stroke 18 91.5 Special cap bolt 46 CLJ2 5 4 x 11 95 3.2 9 16.2 9 16.2 CLM2 113 70 + Stroke 122.2 + Stroke CLG1 CL1 MLGC Rod end nut 43.5 CNG Rod flange style: RLQF63 MNB CNA 60 80 CNS 9 4 x 9 92 41 55 + Stroke 18 108 CLS 114 + Stroke CLQ RLQ 43.5 Rod end nut MLU Head flange style: RLQG63 MLGP ML1C 80 60 41 55 + Stroke 9 8 92 4 x 9 113 + Stroke 108 Rod end nut 43.5 Double clevis style
.: 3.2, 1/8" 4, 5/32" 6, 1/4" 38.4 13.8 6 10 2 A 16 4.3 2 x 3.2 (For mounting) + 24.3 Manual override (Lead wire length) 29.9 Approx. 300 53.8 1.2 C6: 29.1 N7: 32.9 (3.2) With bracket Note) For bracket assembly part no., refer to page 16. 19.5 16.3 13.6 7 2 x 3.4 (For mounting) 41 VQZ115l-lGl1-M5-PR M5 x 0.8 (X: External pilot port)
9 16.2 70 + Stroke 122.2 + Stroke Rod end nut 43.5 Front flange type/RLQF63 60 80 9 92 108 4-9 41 55 + Stroke 18 114 + Stroke Rod end nut 43.5 Rear flange/RLQG63 60 80 4-9 41 55 + Stroke 9 8 113 + Stroke 92 108 Rod end nut 43.5 4-M8 x 1.25 Cap bolt Double clevis/RLQD63 8 Hole: 14 H10 Shaft d9 20 41 55 + Stroke 22 44 +0.4 +0.2 14 30 8 134 + Stroke 148 + Stroke -0.1 -0.3 Rod end nut 33.5 12
Port size: 1/4 1570 Air Operated Valve Common Exhaust Type 41 /Individual Exhaust Type 42 VPA300/500/700 Series VPA300 Series/Dimensions Type 41/Common exhaust: VV3PA3-411-02 Stations 72.5 24 2 x 6.5 (For mounting) N.C.
-15 -20 A M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l M3 x 27l M3 x 29l M3 x 31l M3 x 33l M3 x 38l M3 x 43l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 5 18 5 M3 x 18l 7-2-6 6 Mini-free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number of auto switches Nil 2 pcs. 1 pc.