AZ1000

140 160 180 200 Flow rate (slpm, N2) AZ1000 100 psig (0.69 MPa) 40 psig (0.28 MPa) Inlet pressure: 80 psig (0.55 MPa) 20 psig (0.14 MPa) 1.5 (38.1) 50 0.34 2.25 (57.2) 40 0.28 Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.00 (50.8) 10 0.07 A 0 0.00 0.88 (22.4) 0 20 40 60 80 Flow rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) Connections inch

Microspeed Cylinder

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MGQ MGG MGC MGF MGZ CY MY 3.8-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CY1 MY1 3.4-3 End Lock Cylinder Series CBM2 20, 25, 32, 40 How to Order L 40 150 H N CBM2 Standard L 40 150 C73 H N CDBM2 With auto switch Air cylinder with auto switch Number of auto switch Mounting 2 1 n S n Basic Axial foot Front flange Rear flange Single clevis Double clevis Front trunnion Rear trunnion B L F G C D U T Bore size 20 25 32 40 20mm 25mm 32mm 40mm Auto switch Without auto

Non-contact Gripper

rate [L/min (ANR)] 250 100 160 200 80 120 150 60 40/60/80 80 100 40 40 50 20 0 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 Supply pressure (MPa) Air Consumption [Low Profile Cyclone Type] Size: 20/25 35 Consumption flow rate [L/min (ANR)] 30 25 20/25 20 15

VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

CV/MVGQ

Standard Stroke Standard stroke (mm) Note) Bore size (mm) Symbol Specifications 25, 50, 75, 100, 125, 150 20 -XA Change of rod end shape 25, 50, 75, 100, 125, 150 25 25, 50, 75, 100, 125, 150, 200 32 25, 50, 75, 100, 125, 150, 200, 250 40 Note 1) Intermediate stroke except mentioned above is produced upon receipt of order.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Single Axis Electric Actuator Series LJ1S Series LJ1S Slider Guide Lead screw lead mm Mounting Page Model Series Guide type Motor type orientation Slide screw 20 20 20 20 20 20 LJ1S10 LJ1S20 LJ1S30 LJ1S10 LJ1S20 LJ1S30 88 Standard 90 motor 92 Slider guide LJ1S Horizontal 94 Standard 96 motor 98 Option specifications Page 100 Made to Order 101 Dust seal specification 116 TSUBAKI CABLEVEYOR

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Ionizer

Supply pressure: 0.1 MPa (7 L/min (ANR) per nozzle) Autobalance sensor [Body-mounting type] Installation height of sensor: 10 mm 20 Discharge time (s) 15 Without sensor 10 With sensor 5 0 500 1000 1500 2000 Distance (mm) Static neutralization features are based on the data using the charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

170 225 235.5 10 139.5 159.5 225 232.5 9 129 149 212.5 223 8 118.5 138.5 200 210.5 7 108 128 187.5 198 6 97.5 117.5 175 185.5 5 87 107 162.5 173 4 76.5 96.5 150 160.5 3 66 86 150 160.5 2 55.5 75.5 137.5 148 L1 L2 L3 L4 34.5 54.5 112.5 123 Dimensions: Side Entry Connector [-FS] n L 1 137.5 148 2 150 160.5 3 162.5 173 4 175 185.5 5 187.5 198 6 200 210.5 7 200 210.5 8 212.5 223 9 225 235.5

MLGP

1/4 M5 x 0.8 CLS Holding force (Maximum static load) (N) 157 245 402 629 982 1559 2513 3927 W Standard Stroke CLQ Bore size (mm) Standard stroke (mm) MLGP 20, 25 32 to 80 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU ML1C Spacer installation

MLGP

T-slot side mounting Locked Unlocked Bottom mounting Brake spring Lock ring Piston rod Wide Variations from 20 to 100 Standard stroke (mm) Series Bearing Locking direction Bore size (mm) Load direction LOCK FREE 20 25 30 40 50 75 100 125 150 175 200 250 300 350 20 25 32 40 50 63 80 100 Pivot Fulcrum Slide bearing Extension Locking Clearance Unlocking port: Air supplied 1.

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

V

Stations Max) V A LV E S TAT I O N S 02-10 .Double Wiring Specifications 11-20 .Applicable up to 20 Solenoids.

IIIIIIIIII

5 micron Part Number Description F-4103-30F-4103-33F-4103-36F-4103-37F-4103-38F-4103-39F-4103-39NF-4103-40F-4103-50-5 to 5 PSI -5 to 10 PSI -5 to 20 PSI -8 to 5 PSI -8 to 20 PSI -13 to 20 PSI 0 to 10 PSI 0 to 20 PSI, 3:1 RATIO 0 to 20 PSI, 5:1 RATIO XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX XX BARB OPTIONS ADJUSTING OPTION W/K = WITH ADJUSTING KNOB W/S = WITH 1/4" SHAFT W/0S = FLUSH

LEYx-OMZ0015

or less[High precision type] Lead[mm] (Including pulley ratio) 12 6 3 20 10 5 16 8 4 20 10 5 2.86 Impact resistance/vibration Resistance [m/s2] Note5) 50 / 20 50 / 20 50 / 20 Ball screw Drive method Ball screw and Belt [1:1] / Ball screw Ball screw and Belt [1.25:1] Ball screw Ball screw and Belt [4:7] Guide type Sliding bush (Piston rod part) Sliding bush (Piston rod part) Sliding bush

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(mm) Overhang L (mm) Graph (20) Stroke: Up to 150 stroke Graph (16) Stroke: Up to 150 stroke 20 20 10 10 2 3 4 5 3 4 5 40 40 32 32 Mass W (kg) Mass W (kg) 2 1 1 25 25 20 0.5 0.4 0.3 0.5 0.4 0.3 20 0.2 0.2 0.1 0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke

VQZ1000/2000/3000

Without light AXT100-20-1 With Indicator Light DIN Rail Removal/Mounting Rated voltage 24 VDC 12 VDC 100 VAC 200 VAC 110 VAC 220 VAC Voltage symbol 24V 12V 100V 200V 110V 220V Part no. AXT100-20-2-05 AXT100-20-2-06 AXT100-20-2-01 AXT100-20-2-02 AXT100-20-2-03 AXT100-20-2-04 Circuit with indicator light Removing 1. Loosen the clamp screw on the (A) side of both ends of the manifold. 2.

MY1

20 1.