New Stepless control of air pressure proportional to an electrical signal Maximum supply pressure:5.0 MPa 5.0 MPa Power consumption 3 W or less 3 W or less Set pressure range:0.01 to 3.0 MPa 0.01 to 3.0 MPa Maximum flow rate:3000 L/min [ANR] 3000 L/min [ANR] Digital pressure display Supply pressure: 5.0 MPa Set pressure: 3.0 MPa Fluid: Air, N2, O2, Ar Air, N2, O2, Ar Wetted parts: Fluorine grease
Specifications Sleeve material Nylon Brass Fluid Air, N2, Water Turbine oil class(ISO VG32) Note 2) ,Note 3), Note 5) Air, N2 , Steam Turbine oil class(ISO VG32) Note 2) , Note 3) Ambient and fluid temperature -5 to 60oC (No freezing) Water: 0 to 60oC (No freezing) -5 to 150oC (No freezing) Operating pressure range Note 1 -101.3 kPa to 1 MPa Note 4) Proof pressure 7.0 MPa (at 60oC Lubricant
Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.
Types of fluid This product is designed for use with air, N2, CO2 and Ar as fluids. Consult SMC if it will be used with any other fluids. Since this product uses a bleed mechanism and fluid is released from the bleed hole, poisonous or corrosive gases cannot be used. 2. Fluids containing solids cannot be used.
SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations Order made Manifold spec. sheets 188 Order Made Specifications SY5000/7000/9000/SY500 DIN Connector (DIN 43650C Standard) DIN connector type with conformity
purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)
ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02
Recovery of circulating fluid 1 2 3 Customers equipment Customers equipment Customers equipment Circulating pump Circulating pump Circulating pump Internal pump Internal pump Internal pump Option Option Option N2 purge port N2 purge port N2 purge port Heat exchanger Heat exchanger Heat exchanger Main tank Main tank Main tank N2 Circulating fluid electrical resistance ratio control function
SS5Y5-M45Stations B Dimension L: Formulas for dimensions L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 70 L3 12.5 M = ( + 1) omit decimals L1 = 12.5 x M + 23 L2 = L1 10.5 L4 = (L1 L3)/2 n1: Number of SY3000 stations n2: Number of SY5000 stations 1.2-176 Order Made Specifications SY3000/5000/7000/9000 Body Ported Type with External Pilot Main Valve Fluoro Rubber Specification Energy Saving Solenoid
Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)
inlet 1500 psig (10.3 MPa) inlet Inlet pressure: 3000 psig (20.7 MPa) inlet 4000 27.6 3500 24.1 1/4-20 UNC Screw For Panel Mounting Delivery pressure (MPa) Delivery pressure (psig) 20.7 3000 Max. 0.25 (6.4) Panel Thickness 17.2 2500 2000 13.8 To 6.88 (174.7) 1500 10.3 1000 6.9 500 3.4 0.75 (19.1) 0.50 (12.7) 3.84 (97.5) Min. 1.50 (38.1) 0 0.0 0 1000 2000 3000 4000 5000 6000 Flow rate (slpm, N2
n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !
.: 3.5 to 7 Manual override (Non-locking) Pg7 ~ = 300 78.4 (Lead wire length) 70.9 4.5 7.5 44.5 R P 20 13.5 13 4 x Rc1/8 (Piping port) 40 4 x Rc1/8 (Piping port) Refer to grommet type for other dimensions. 1424 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Type 20 Manifold/Body ported (Top ported) VV5K3-20Station n1 = Number of VK3000 n2 = Number of VK300 Grommet: G DIN
Note 2) As an optional specification, the maximum number of stations can be increased by special wiring specifications. 654 B VQC5000 Series S VQC5000 Kit (Serial transmission kit): For EX600 Integrated-type (I/O) Serial Transmission System IP67 compliant VV5QC51 S kit (Serial transmission kit: EX600) Power supply with M12 connector L2 L1 47n2 + 82.5 5.5 4.4 10 8 26 47 x n2 47 59.5 P = 41
)(Ar)(CO2) CO21/2 <> [F 3] [FLU] N2 [F 3] -28No.PF-OMJ0005CN-I [F 4] 20 1 atm() 0 1 atm() <> [F 4] [rEF] 0.927= [F 4] -29No.PF-OMJ0005CN-I [F 5] <> [F 5] [rES] [F 5] -30No.PF-OMJ0005CN-I [F 6] <> [F 6] [dSP] [F 6] 9 L3 3 1 "0" -31No.PF-OMJ0005CN-I [F 7] "0" [---] 0 30ms GND <> [F 7] [inP] [F 7] [F 1][F 2] -32No.PF-OMJ0005CN-I <> PFM710n_11.6H_10.4() ON/OFFONn_1 OFF(n
-2No.PF-OMO0004CN-E / 1 1.5 *3) 1 1 [] -3No.PF-OMO0004CN-E () () () N2 () -4No.PF-OMO0004CN-E () * UL UL1310 2 UL1585 2 ,30[Vrms]42.4[V ] 2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMO0004CN-E * FG (49 N () ,IN () () -6No.PF-OMO0004CN-E * 6 33 () 30 m DC(-)() -7No.PF-OMO0004CN-E * () () CE 050 -8No.PF-OMO0004CN-E * 10 /23% 3 * OUT * 23 -9No.PF-OMO0004CN-E PFMB
-2No.PF-OMP0001CN-F / 1 1.5 *3) 1 1 [] -3No.PF-OMP0001CN-F () () () N2 () -4No.PF-OMP0001CN-F () * , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMP0001CN-F * FG (49 N ,IN () () -6No.PF-OMP0001CN-F * 6 33 () 10 m DC(-)() -7No.PF-OMP0001CN-F * () () CE 050 -8No.PF-OMP0001CN-F * 1015 10 /23% 3 LCD * OUT -9No.PF-OMP0001CN-F / PFMB 7 7 A*8 *8 2 501 5500 L/min 102 101000
-2No.PF-OMS0001CN-A / 1 1.5 *3) 1 1 [] -3No.PF-OMS0001CN-A () () () N2 () -4No.PF-OMS0001CN-A () * * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 N2 050 () JISB 8392-1 1.1.21.6.2 -5No.PF-OMS0001CN-A * FG (49 N 9022545 ,IN () () -6No.PF-OMS0001CN-A * () 6 33 () 10 m DC(-)() -7No.PF-OMS0001CN-A * () () CE 050 -8No.PF-OMS0001CN-A * 1015 10 /23% 3 LCD * OUT -9No.PF-OMS0001CN-A
(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.
(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.