Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

Electric Rotary Table

DP V1 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 156 k/625 k/2.5 M/ 5 M/10 M Communication speed [bps] 10 M/100 M 125 k/250 k/500 k Configuration file Note 2) GSD file EDS file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 57 words Output 57 words Input 256 bytes Output 256 bytes Input 200 bytes Output 200

KJ

Red 1 4 1 8 3 16 3 8 1 2 07 1 4 1 4 3 8 Nil VMG 09 5 16 11 3 8 1 2 13 1 2 Same dia. rod Same dia. tubing 1 8 tubing tubing 5 32 tubing 3 16 tubing 1 4 tubing 5 16 tubing 3 8 tubing 1 2 Model Male connector Straight Different dia. straight H Hexagon socket head male connector S F Female union Male elbow Elbow Plug-in elbow Reducer elbow 45 male elbow L K V VS VF LF VD VT Z ZD ZT W Universal

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

sides n = 2, 3, 4 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 2, 4, 6, 8 100 + 100 (n 2) 100 + 100 (n 2) n = 4, 6, 8 Same side n = 2, 3, 4 10 1 pc. 90 75 80 35 75 Different sides 80 90 55 75 Same side 80 90 35 + 30 (n 2) 75 + 30 (n 2) 80 + 30 (n 2) 90 + 30 (n 2) Different sides D-A44 n = 2, 3, 4 n = 2, 4, 6, 8 n=2, 4, 6, 8 n = 2, 4, 6, 8 55 + 50 (n 2) 75 + 50 (n 2) 80 + 50 (n 2)

Programless controller Step motor (servo 24 VDC)

Safety Instructions . 4 2.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

Electric Actuator/Slider Type

Note 2) The direction of rod end width across ats ( K) differs depending on the products.

Series 10-, 21- AW-B Filter Regulator

Note 2) Drain guide is NPT1/8 (applicable to the 10-/21-AW20(K)-B) and NPT 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 3) Drain guide is G1/8 (applicable to the 10-/21-AW20(K)-B) and G 1/4 (applicable to the 10-/21-AW30(K)-B to AW60(K)-B). Note 4) Option B, G, H are not assembled and supplied loose at the time of shipment.

Air Cylinder Series CS1

MB1 f l CA2 h + l ZZ + l + 2 stroke (With rod boot on one side) CS1 CS2 With rod boot (Both sides) FA G G FA Width across flats KA Width across flats KA 2 x P MM MM e D e D E E d d M AL AL l + Stroke A f l N N A K f K h + l h + l + Stroke S + Stroke ZZ + 2l + 2 stroke (mm) Type Stroke range (mm) Bore size (mm) AL B C D E EA F FA G J K KA M MM N P S A With rod boot Without rod boot 1 2 1 2

Clamp Cylinder with Lock

9 @0 #8 #1 @8 @2 r $0 #6 #5 $2 @6 @7 $5 !5 !0 !6 !2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

Vacuum Unit Ejector / Vacuum Pump System

Replacement Parts for Single Unit/How to Order (Including single unit for manifold) (5) Valve assembly ZK2-VA A K 5 L AC -A [1] [2] [3] [4] [5] [2] Valve type [1] Applicable system K Supply valve: N.C., Release valve: N.C. A Ejector system R Supply valve: Self-holding release valve linked, Release valve: N.C.

AC Servo Motor Driver (Network card type ）

OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 F 2 D 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN

10

1 15 20 20 D-A5l D-A6l n (Different surfaces) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different

Electric Actuator with Integrated Guide

LTF8F-K Symbol 2H 3H 2V 3V Motor capacity 100W 200W 100W 200W 1) 1) 2) 2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

NCG/CG1

CG1BA Basic style mm Standard stroke range (mm) Long stroke range (mm) Bore size (mm) B1 A C D E F GA GB H H1 I J K KA MM NA P S TA TB TC ZZ WA WB WH W AL 69(77) M5 x 0.8 12 14 18 25 30 32 40 50 24 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 14 8 10 12 16 20 20 25 30 2 2 2 2 2 2 3 3 12 12 12 13 14 14 20 20 10(12) 35 5 6 6 8 11 11 13 16 26 M4 x 0.7 depth 7 5 6 8 10 14 18 18 22 26

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Metric size Inch size Series Appearance Size 1/4" 3/8" None 1/8" 1/2" 3/4" 1" 6 8 10 12 19 1/8" 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 25 4 3 1 1/4" 1 2 3 4 5 6 7 1 2 3 4 5 6 P.326 Male Connector LQ3H K P.327 M Female H 1 2 3 4 5 6 1 2 3 4 5 6 P.328 KK Male D Elbow LQ3L MS P.329 LQ Female MQR 1 2 3 4 5 6 1 2 3 4 5 6 P.330 T Male Branch tee LQ3B P.331 Female 1 2 3 4 5 6 1 2 3 4 5 6 P.332 Male Run tee

/

J thread depth K 2 x J thread depth K DIN terminal: D Conduit terminal: T S Q F 34 D Cable 6 to 12 (Q) F G1/2 D 25 Width across flats H Width across flats H T C M C R R E E (S) A 2 x P Port size A 2 x P Port size B B M 2 x J thread depth K G1/2 2 x J thread depth K (mm) Electrical entry Grommet Mounting dimension Model Orifice diameter Port size P A Q R Conduit T DIN terminal Conduit terminal

CL

75 10 Rod Boot Material 75 + 55 (n 2) n 2 2 20 + 50 ( ) (n = 2, 4, 6) D-B59W 20 75 15 Symbol Rod boot material Maximum ambient temperature D-A3A D-G39A D-K39A D-A44A 70C Nylon tarpaulin J 35 + 30 (n 2) 100 + 100 (n 2) 35 100 10 110C Heat resistant tarpaulin K Maximum ambient temperature for the rod boot itself. 9-2-18 17 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Mounting

VCC

How to Order SUS316L Stainless Steel Fitting VCC1 00 2 q VVCC1 10A 2 1 q VCK 02F K 1075 q w q Type (Passage number) q Type (Passage number) q Type (Shape) w Piping port 2 3 2D For 2 port valve For 3 port valve 2 3 K L H 1209 1008 1075 0806 0604 40 swivel elbow 90 swivel elbow Male connector 2 port valve 3 port valve 2 port/Diaphragm type Piping port for 12 x 9 Piping port for 10 x 8 Piping

Electric Actuator Miniature Rod Type Miniature Slide table Type

Attainment point: 20[mm] In pos[mm] k Position[mm] c 0 5 10 15 20 25 Stroke [mm] Condition 2) In case the pushing operation is Step no.1 to Step no.2.