NCQ2/CQ2

P P P P P P Rc1/8 NPT1/8 G1/8 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc1/4 NPT1/4 G1/4 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P P P Rc3/8 NPT3/8 G3/8 P P P P Through-hole (Std.)

V

Forbidden Solenoid Supply 24V DC H O W T O O R D E R (N)ZM V A C U U M E J E C T O R (N)ZM D I M E N S I O N S W I T H VA C U U M S W I T C H D I M E N S I O N S B A S I C T Y P E N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm T Y P E 2 Body Ported 4 Manifold Type-Common SUP 6 Manifold Type-Individual SUP S U P P LY P R E S S U R E H 5 Bar M 3.5 Bar P O R T T H R E A D Nil

Base Mounted Metal Seal/Rubber Seal Series VQ

(4) P kit J kit G kit F kit VQZ w AXT100-1-J (4) U S AXT100-1-GU20 AXT100-1-F (4) e r VQD U S U S Note 1) Suffix -XP for dust-protected type SI unit.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Others (Special Order) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 2.71 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O N P A R T S A S S E M B L Y S E E I N S I D E F R O N T

0.4

(R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w VQ1A01 VQ1B01 4 (A) 2 (B) 4 (A) 2 (B) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 (P) 1 (P) r VQ1C01 4 (A) 2 (B) 5 (R1) 3 (R2) 1 (P) Component

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 40.1 39.3 18.8 18 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] 2-One-touch fitting One-touch fitting 2n1-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 [PE:

Table of Contents

e r t y No. q w e r t y u i o !

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

When P/R ports are located on the U side, the designated P/R ports on the other side are plugged.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators 3(R2) 1 (P) (R1)5 1 (P) (R1)5 3(R2) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/exhaust center/pressure center 3 position closed center 2(B) (A)4 q t r w 3(R2) 1 (P) (R1)5 (B) 2 (A) 4 3 position exhaust center 2(B) (A)4 3(R2) 1 (P) (R1)5 3 position pressure center u 2(B) (A)4 3

Table of Contents

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

Compact 5-Port Solenoid Valve

w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

0.4

e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2)

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

A

IS1000E-402 14 33 87 66 17.5 IS1000E-403 38 AC4000 IS1000E-404 12 IS1000E-406 34 50 87 66 17.5 H O W T O O R D E R P R E S S U R E S W I T C H *Without Yoke Clip.

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

High Vacuum Angle Valve

e, r 1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.