Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 20 stations Applicable individual exhaust spacer assembly SYJ5000-17-1A Applicable interface regulator assembly ARBYJ5000-00-P R port Rc(PT) 1 8 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side How to Order 41 Type (5 Port/Base mounted) SS5YJ5-41-05 --M5 Stations 2 stations 02 : R port Rc(PT) : 1 8 20 stations 20 A, B port M5 X 0.8 M5 M5 X 0.8 A, B port side P port Rc(PT) 1 8 Applicable solenoid

7.4

S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

0 (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double with back pressure check valve 2 position double 2 position double o t r e w y q !1 u !

/

u u y t w e t t y w w e e q q q 1 port 2 port 1 port 2 port 1 port 2 port r r r !

Fieldbus System

P P P P P P P P SY5000 P P P P P P P P SY5000 P P P P C2 C3 C4 C6 C8 CM N1 N3 N7 N9 CM 2 One-touch fitting 1/8" One-touch fitting 3.2 One-touch fitting 5/32" One-touch fitting P P P P P P P P P P P P P P Straight Elbow Straight Elbow 4 One-touch fitting 1/4" One-touch fitting 6 One-touch fitting 5/16" One-touch fitting 8 One-touch fitting Straight port, mixed sizes LN3 LN7 LN9

MG

MGPM, MGPL Common Dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q CV 16 20 25 25, 50, 75, 100, 125, 150, 175, 200, 250 71 58 8 8 5 30 11 8 64 M4 15 15 22 M5 x 0.8 12 M5 x 0.8 4.3 8 4.5 M5 x 0.8 40 10 19 16 78 1.5 62 10 10 6 36 10.5 8.5 83 M5 18 18 24 M5 x 0.8 13 M5 x 0.8 5.6 9.5 5.5 1/8 37.5 10.5 25 18 25, 50, 75, 100, 125, 150

MGP

XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15 M5 X 0.8 4.3 5.6 5.6 M5 X 0.8 Rc1/8 Rc1/8 40 16 18 26 8 10 12 64 83 93 8 9.5 9.5 10 8 10 10 M4 M5 M5 4.5 5.5 5.5 19

21

P(2) P(1) P(1) Note 1) P P P P P P P P P P P P P P P P P P P P P P P P P Note 5) P Basic Foot Rod flange Head flange Integral clevis Single clevis Double clevis Note 3) Note 1) Note 1) P(1) Note 2) P(1) Note 2) P(1) P(1) P(1) Rod trunnion Head trunnion Boss-cut/Basic Boss-cut/Rod flange Boss-cut/Rod trunnion Note 1) Mounting nuts are not attached to the integral clevis, single clevis and

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

Modular Type Lubricators Series AL

Drip failure can cause damage to the components that need lubrication. 510 Lubricator Series AL10 to AL60 Construction AL10 AL20 w w q AC-A e q t AF-A OUT IN OUT IN AF-A y r u y u AR-A AL-A AW-A AC AL30, AL40 AL50, AL60 AF w q t e w q t e AF AR IN OUT IN OUT AL AL y r u r i AW AG E AV y AF u Component Parts No.

Integrated Controller

p. 44 Construction p. 46 Dimensions p. 47 Auto Switch Mounting p. 29, 53 Solid State Auto Switch, Normally Closed Solid State Auto Switch, 2-Color Indicator Solid State Auto Switch p. 30, 54 e-Actuator Electric Specifications p. 59 Wiring Examples p. 60 Operation Data Setting p. 61 Options p. 62 Slider Type Specific Product Precautions p. 33 Rod Type Specific Product Precautions

SMC Electronic Switch Series Variations

0 to 100kPa R(PT) 1/8, M5 X 0.8 L NPTF 1/8, M5 X 0.8 Note) M5 X 0.8 (female) thread.

51

Symbol Foot (mm) A AL D I B B1 C H1 H W GA GB H2 J KA LC LD LH LS LT LX LZ M MM NA P S X Y Z ZZ Bore size (mm) 20 25 32 40 50 63 80 100 12 20 5 12 14 4 33 10 14.5 34 13 8 6 4 26 M4 x 0.7 6 20 (3) 32 44 3 M8 x 1.25 24 M5 x 0.8 57 15 7 32 83 Width across flats 6 length 3.5 12.5 23 6 15 16.5 4 36 10 17.5 38.5 17 10 7 4 31 M5 x 0.8 6 22 (3) 36 49 3.5 M10 x 1.25 29 M5 x 0.8 60 15 7 35 89.5 Width

Stainless Steel One-touch Fittings Series KG

MS-5ALHU-4 P. 134 Body rotates at 360 around the stud axis. Nipple Fitting to work peice and fitting to fitting connection. MS-5N M5 male -M5 male 6/4-M5 MS-5ALHU-6 P. 133 P. 134 Hose nipple Unilversal nipple Body rotates at 360 around the stud axis. MS-5UN M5 male -M5 male PAT P. 134 4/2.5-M5 MS-5H-4 For nylon, soft nylon, and polyurethane tube.

Low Friction Cylinders Series MQ

Individual -X 1177 Series MQQ Dimensions Lateral load resisting type (Through hole & Double end tapped): MQQLB 10, 16, 20 2 x M5 x 0.8 H effective thread depth C 2 x 4 x OB 2 x 4 x OA effective depth RA Y Q F Depth of counterbore RB I 4 x N through 4 x N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4 x OA effective depth RA 2 x P 2 x 4 x OB Y

Modular Type Regulators Series AR

14 19 21 Z 28.5 38.5 42.5 H -2 3.5 3.5 P 44 46 54 AR20 AR30 AR40 Accessories Panel Mounting Nut (Optional) AR20P-260S AR30P-260S AR40P-260S Mounting Bracket Kit (Optional) AR20P-270AS-X48 AR30P-270AS-X48 AR40P-270AS-X48 Model AR20 AR30 AR40 D E 2 A C F IN OUT AA H P J Q V S W K U T Bracket and Mounting Nut (Optional) PANEL FITTING IN OUT X Z Y Plate Thickness AR20, 30: Max 3.5 AR40: Max 5

High Vacuum Angle Valve

Rc1/8 XLFV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLF 0.29 0.49 1.2 1.9 3.3 5.7 XLFV 0.34 0.54 1.3 2.0 3.4 5.8 1 Conductance is the value for the elbow with the same dimensions. *2 A coating of vacuum grease [Y-VAC2] is applied to the seal-material sliding portion of the vacuum part.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 440 Series MGZR Double Power Cylinder/ Without Non-rotating Mechanism Dimensions Basic style GA GB 2 x P (Rc, NPT, G) Y Y MM depth M D1 KA D C B 2 x 4 x J MC NA NB MA MB KA C B K H S + Stroke ZZ + Stroke MGJ MGP MGQ MGG MGC (mm) MGF Stroke range Bore size (mm) H J B MM D1 K M MA MB MC NA NB P S Y ZZ D C KA GA GB MGZ 20 25 32 40 50 63