5 Port Air Operated Valve q e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5
7 w w q @0 e q @0 e !4 i y !0 !1 !2 !4 i !5 !6 ASR530F-02 type ASR630F-03 type ASR530F-02 type ASR630F-03 type !8 u o !3 !8 u o !3 !7 !7 !9 !9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !
ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L
$6" " 6 " " " w 0C4,D 4 e B 6 !" r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.
w l Body ported type Base mourfied type With subplate R Port %,%NPTF X Port P Port (Extemal 3 Port Solenoid Valve Series NVZ100/300/500 NV2100 Gffir,rsn NVZ300 GU@ W f m NVZ500-GEIED I Power Consumption 1.8WDC (2.r wDC MrEol I Response Time NVZ100: 15 mSec or less N\2300/500:20 mSec or less Optimal Accessory/Bracket N\rz100-ooo .t 5.F itvz3020-o8o .u5f Nvz5020-ooo -01T-F Top ported/Nw4a
0 o t r e w y (B) (A) 2 4 (B) (A) 2 4 4(A) 3 5 1 3 5 1 (EB) (P) (EA) (EB) (P) (EA) 2(B) i 5(EA)/3(EB) 1(P) 2 position double 2 position double 2 position double with back pressure check valve t r e w y q !1 u !
Note) D: Max. diameter 8.4 27.5 34.1 30.6 12.7 2.2 2.2 8.4 10 3.2 10 30.1 2.2 2.2 3.2 2.7 R 1 8 M5 x 0.8 28.2 31.3 12.7 34.8 9.3 4 9.3 10 10 30.3 30.8 4.5 4.5 2.2 2.2 11 11 R 1 8 33.4 36.9 M5 x 0.8 K 11.6 13.5 11.6 10 10 6 32.9 R 1 8 M <R 1/8> H D MS <R 1/8> 2-applicable tubing T VMG T (With seal) Plug-in Reducer: KJR Effective area (mm2) Nylon Urethane Applicable tubing O.D.
Example: Set 20 W (100 W 20%) for the 100-W external regenerative resistors with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2. When set to the factory setting (Pn600 = 0), the DRIVERs built-in option has been used.
Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.
Electrical entry G Body Coil voltage Lead wire length 0.6 m 5: Plug lead sub-plate 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Lead wire length 1.5 m Grommet H Function Nil Y(1) R(2) Standard type (1 W) Low wattage type (0.5 W) External pilot Seal 0 1 Metal seal Rubber seal Note 1) Note 2) Applicable to DC specifications.
0 r w i Purge air for dehumidification Purge air for dehumidification Component Parts Material Description No.
AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z
Mounting angle view (-R specification) MPa OUT IN K P C U O S L H to 2 Air Combination Series ACG Accessory/Optional Combinations : Combination available : Combination not available : Varies depending on a model : Available only with NPT thread F.R.L. unit applicable model Combination Option Accessory Symbol D 1 2 3 6 8 J C N R W ACG20 ACG20C ACG20A ACG20B ACG20D ACG30 to to to ACG30C ACG30A
0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
The needle will fall out if it is turned more than 4 full turns. 1 Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Nil 6 VDC S 5 VDC R 3 VDC Applicable
0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port !4 !3 w !2 !
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
0 r t !1 y q e u o w i !3 !2 w Auto switch *No spacer !2 for Z type Parts List Repair Parts: Standard Seal Kit for Double Acting, Single Rod Remarks Description Material No.
Electrical entry 3 Note) Compatible with ZX1-VJ324Mand ZX1-VJ314only. 5 6 V S R L LN LO M MN MO G H Connector (0.3 m) Connector (w/o lead wire) Without connector Connector (0.3 m) Connector (w/o lead wire) Without connector Grommet (0.3 m) Grommet (0.6 m) Note) In the case of ZX1-VJ114, M, MN and MO cannot be used.