ZP

A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10 16 12 18 15 16

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

CRB2/CRBU2/CRB1

CDRB2BW15-D CDRB2BW20, 30-D 1 The length is 24 when any of the following auto switches are used: D-90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Table of Contents

17 22.5 20.5 17.5 25 21.5 19.5 11.11 14.29 11.11 14.29 12.7 14.29 1 8 15.5 2.5 1 4 1 8 Applicable tubing 5 32 16 3 1 4 1 8 1 4 3 16 16 3.5 K 1 8 14.29 1 4 3 8 17 4.6 1 4 17.46 M Connection thread 1 8 15.5 20.5 14.29 1 4 3 8 5 16 18.5 6 H 13.5 17.46 30 16 19 1 4 17.46 22 28 D 3 8 1 2 3 8 21 7 14 22 22.23 30 33 22.5 24 28.5 30 MS 1 4 9 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

Table of Contents

1 (30) MSQ 3 MRQ D202 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

Air Cylinder Series CM2

Bore size (mm) Auto switch model 20 25 32 40 D-A9 D-M9 D-M9 W Note 1) qBM2-020 wBJ3-1 Note 1) qBM2-025 wBJ3-1 Note 1) qBM2-032 wBJ3-1 Note 1) qBM2-040 wBJ3-1 D-C7 /C80 D-C73C/C80C D-H7 D-H7 W D-H7BAL D-H7NF BM2-020 BM2-025 BM2-032 BM2-040 D-B5 /B64 D-B59W D-G5NTL D-G5NBL D-A3 A/A44ANote 2) D-G39A/K39A BA2-020 BA2-025 BA2-032 BA2-040 BM3-020 BM3-025 BM3-040 BM3-032 Note 1) Two kinds of auto

Air Cylinder Series MB

35 100 2 (Different surfaces, same surface), 1 10 D-Y69 D-Y7PV D-Y7WV 35 + 30 (n2) (n = 2, 3, 4) D-A3 D-G39 D-K39 10 + 30 (n2) 2 (n=2, 4, 6, 8) n (Different surfaces) n 100 + 100 (n2) (n = 2, 3, 4) n (Same surface) 2 (Different surfaces, same surface), 1 20 1 10 D-Y7BAL 20 + 45 (n2) 2 (n=2, 4, 6, 8) 35 55 2 (Different surfaces) 2 (Same surface) n 35 + 30 (n2) (n = 2, 3, 4) 2 (Different surfaces

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Auto Switch Guide

30-27 D-F59/F5P/J59/J51 Grommet CX Tie-rod Terminal conduit D-G39C/K39C D-M9N/M9P/M9B D8-30-28 D-M9NV/M9PV/M9BV 8-30-29 D-F8N/F8P/F8B -X 8-30-31 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P 208-30-30 D-Y69A/Y69B /Y7PV 8-30-32 D-Y7G/7H Data D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 8-30-33 Band Grommet D-G59W/G5PW/K59W 8-30-34 2-color indication D-F79W/F7PW/J79W 8-30-35 Solid State Switch Rail Grommet

Made to Order

MGC series 20 to 50 MGC Series (mm) C port SZ + Stroke B Cushion valve (Width across flats WH) Front mounting flange Bore size (mm) GC GD SA SB W 1 W 2 A, B port A port W 2 W 1 A 20 25 32 40 50 30 30 21 9 50 87 30 30 C port D port 21 9 50 87 B port W 2 W 1 10 A' 25 30 23 9 52 91 20 20 24 8 59 99 Cushion valve (Width across flats WH) D port ZZ + Stroke A + Stroke B SB + Stroke B SA + Stroke

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 (30) MSQ 3 MRQ D202 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

Air Cylinder Series CA2

8) (n = 4, 8, 12, 16) CS1 2 (Different surfaces and same surface) 1 65 70 75 10 60 CS2 D-M9AVL (n 2) 2 60 + 30 (n 4) 2 (n = 4, 8, 12, 16) 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) 70 + 30 (n 4) 2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) 2 (Different surfaces and same surface) 1 D-A5/A6 D-F5/J5 D-F5W/J59W D-F5BAL/F59F 120 110 100 15 90 (n 2) 2 90 + 55 (n 4)

1

LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D' Floating block FE Note 1) Section D-D' 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached from bottom with CAP bolt Bolt size: MD XB WF FG XA 2-SS (Helical insert thread) Body R S HL Note 1) Note 2) HB FF Note 1) Switch rail FC D' Section D-D' (mm) A BA BB CC FC FE (1) FG FH HB (1) HL L LA LF MD

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Compact Cylinder Series CDQ2 With Auto Switch Minimum Stroke for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-M9 D-F9W D-A7 D-A80 D-A73C D-A80C D-A9V D-F7W D-J79W D-F7BAL D-F79F D-F9BAL No. of auto switches mounted D-F7V D-J79C D-F9V D-F7WV D-F9WV D-F7BAVL D-P5DWL D-A9 D-A79W CUJ CU 1 pc. 2 pcs. 5 5 10 15 15 20 10 30 CQS 5 10 15 15 20 20 10 30 CQM (g) Weight (g) Additional Weight CQ2

Table of Contents

32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 17-3-76 7 The VX series will be revised shortly.

CA2

90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4,

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.