Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 (30) MSQ 3 MRQ D202 2 15 20.5 CDRBU2W15-D (Approx. 26.5 for connector type) CDRBU2W20/30-D 1.

1

LF Body Switch rail FG X A FH XA HL HB Note 1) Note 1) FF D' Floating block FE Note 1) Section D-D' 20, 25, 32, 40 D Attached from top with CAP bolt Floating block L LA A LF Attached from bottom with CAP bolt Bolt size: MD XB WF FG XA 2-SS (Helical insert thread) Body R S HL Note 1) Note 2) HB FF Note 1) Switch rail FC D' Section D-D' (mm) A BA BB CC FC FE (1) FG FH HB (1) HL L LA LF MD

ZP

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Compact Cylinder Series CDQ2 With Auto Switch Minimum Stroke for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-M9 D-F9W D-A7 D-A80 D-A73C D-A80C D-A9V D-F7W D-J79W D-F7BAL D-F79F D-F9BAL No. of auto switches mounted D-F7V D-J79C D-F9V D-F7WV D-F9WV D-F7BAVL D-P5DWL D-A9 D-A79W CUJ CU 1 pc. 2 pcs. 5 5 10 15 15 20 10 30 CQS 5 10 15 15 20 20 10 30 CQM (g) Weight (g) Additional Weight CQ2

Table of Contents

32.5 38 49 20 20 23 30 30 35 23 23 25 113 127 162 103 118 152 33 37 28 1 1 1 2 17-3-76 7 The VX series will be revised shortly.

CA2

90 100 1 Different sides With 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4, 6, 8 80 + 30(n2) n = 2, 4, 6, 8 90 + 30(n2) n = 2, 4, 6, 8 100 + 100(n 2) n = 2, 3, 4 100 + 100 (n2), n = 2, 4, 6, 8 Different sides With n Same side 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides With 2 Same side 35 + 30(n2) n = 2, 3, 4 75 + 30 (n 2) n = 2, 4,

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

ISO Cylinder

Auto Switch Mounting Height [mm] [mm] Band mounting Rail mounting Auto switch model Auto switch model D-M9l*1 D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l*2 D-A9lV D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7BA D-A7lH D-A80H D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-M9l D-M9lW D-M9lA D-A9l*1 D-M9lV D-M9lWV D-M9lAV D-A9lV*1 D-F7lV D-F7lWV D-F7BAV D-J79C D-A7l D-A80 D-A73C D-A80C *2 D-A79W D-H7C D-C73C

Table of Contents

8 B C D D Flat E Flat with ribs F: M6 x 1 F: M8 x 1.25 D F: Rc Y 1 8 D G Flat Flat with ribs F: M5 x 0.8 F: M6 x 1 E D G F: Rc Y Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 40 43 18.5 19.5 6.2 8 6 3.3 32 6.5 10 1.7 12 12 3 27 21 21 50 53 33 7.5 3.8 6.2 12 5 8 8 6 13 1.8 15 12.5 3.5 27.5 21.5 21.5 16 1.2 18 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

Battery-less

9@0 q @2 @3 y@7 A A u i @1 !5 @1 !0 !4 A-A r t B C o @4 B C e @5 @6 D-D C-C B-B !1 !3 !6@8 D w D !2 Component Parts No. Description Material Note 19 End cover LEFS16 Aluminum alloy Anodized No.

MY1

in = 25.4 mm D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B 105 Series MY1 Solid State Switch Specifications Auto Switch Mounting Positions/D-Y5, D-Y6, D-Y7P(V) / Dimensions (mm) 1 in = 25.4 mm MY1B (Basic type) Note) The operating range is a guide including hysteresis, but is not guaranteed.

CV/MVGQ

D-Y7P/Y7PV D-Y7W D-Y7WV D-G5W D-K59W D-G59F D-G5 D-K59 D-G5NTL Auto switch model D-F5 D-J5 D-F5W D-J59W D-F59F D-A5, D-A6 D-A3/A3C D-A44/A44C D-G39/G39C D-K39/K39C D-A59W D-F5NTL D-B5/B64 Bore size (mm) A A A A A A A B B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5)

CV/MVGQ

1 Different sides 2 Same side 100 100 110 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4 100 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 100 100 110 90 100 110 90 100 110 10 35 55 1 Different sides 2 Same side 35 + 30 (n 2) n

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Stability of suction position,

ZP3EU-YF4JB10 [Weight: 430 g] ZP3EU-YF4JB30 [Weight: 461 g] ZP3EU-YF4JB50 [Weight: 486 g] Width across flats 17 Width across flats 30 Width across flats 17 Width across flats 30 Bushing Bushing 50 8 8 8 8 50 A B Bushing Bushing M22 x 1.5 M22 x 1.5 B A D-D D-D Rc1/8 Rc1/8 22 22 D D D D 26 26 32 32 11 11 42 42 19 19 4 4 11.11) 11.11) 30 (Rotating angle) 30 (Rotating angle) 50 61 Dimensions

ZP

M6 x 1 Width across flats 8 04 4 06 6 D D 45.5 C Model A B C D Fitting part min. hole size Vacuum inlet direction q Pad dia.

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1