High Vacuum Angle Valve, XL Series

MPa P MPa Double acting (dual operation) XLF-40 Normally closed XLG-40 Valve type Model 80 80 60 60 T msec T msec 40 40 O-ring seal 20 20 0 0 0.4 0.5 0.6 0.7 0.3 0.4 0.5 0.6 P MPa P MPa Valve type XLD-40 Normally closed Model Main valve Initial exhaust valve 600 600 400 400 Smooth exhaust valve T msec T msec 200 200 0 0 0.4 0.5 0.6 0.7 0.4 0.5 0.6 0.7 P MPa P MPa _ Response time when closed

MY1

/Y7PV D-Y7W/Y7WV D-Y7BA D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BA 5 5 5 5.5 5.5 5 5 5 5.5 5.5 Perpendicular electrical entry type and D-Y7BAL cannot be mounted on 16, 20, 50 and 63.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

MGG

Specifications Series MGG Bore size (mm) 20, 25, 32, 40, 50, 63, 80, 100 Reed type D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-A79W Applicable auto switches D-F7, D-F7V, D-F7BAL, D-F7F, D-F7W, Solid state D-F7WV, D-J79, D-J79C, D-J79W, D-F7NTL With the exception of the above, all other specifications and dimensions for this product are standard.

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A 30 Hs Auto SWitch uto ASWltch P roper Mountm Position (mm) ' D-ASO D-A60 D-A30 D-A44 D-G39 D-K39 D-M90 D-M9OV D-M9OW D-M9OWV D-M90AL D-M90 AVL D-FSOW D-J59W D-FSBAL o.F50 D-J50 o.F59F 0.=80 o.Y5DN60 o.Y7PIY7PV o.Y70W o.Y70WV o.Y7BAL ~ switcl:l . rnod8l o.A90 o.A9OV o.A59W D-F5NTL A B A B A B A B A I B A B A B Bore size 125 9 8 13 12 6.5 5.5 3 2 7 I 6 9.5 8.5 14.5 13.5 140 9 8 13 12 6.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

---M5 SYJ522M---M5 A port M5 x 0.8 Type 20 SS3YJ5--20-05 -Stations Bracket P, R port thread type + + + + Nil Nil 02 : 20 Rc G NPT NPTF 2 stations : 20 stations Without bracket Applicable blanking plate assembly SYJ500-10-1A R P 00F 00N 00T With bracket F P port 1/8 R port 1/8 Note) For more than 6 stations, supply air to both sides of P port and exhaust air from both sides of R port.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

9 Specifications p. 10 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link: Process Data p. 17 Functions p. 17 Internal Circuits and Wiring Examples p. 18 Dimensions p. 20 3-Screen Display High-Precision Digital Pressure Switch ZSE20A(F)/ISE20A Series How to Order p. 11 Specifications p. 12 Set Pressure Range and Rated Pressure Range p. 17 Analog Output p. 17 IO-Link

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

MK

Applicable Auto Switch Style Auto Switch Model Page Electrical entry (Function) Bore size D-A7, A8 D-A7lH, A80H D-A73C, A80C D-A79W D-A9l D-A9lV D-F7l, J79 D-F7lV D-J79C D-F7lW, J79W D-F7lWV D-F7BAL D-F7lF D-F7NTL D-F9l D-F9lV D-F9lW D-F9lWV D-F9BAL D-F5DWL 5.3-14 Grommet (Perpendicular) 5.3-15 Grommet (In-line) 20 to 63 Reed switch Solid state switch 5.3-16 Connector Grommet (2 color indication

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

20 5 15 20 15 B B B B 5 VP4 1.5 2n-M5 X 0.8 (Pitch) P=10.5 15.5 1.5 2n-One-touch fitting (A, B port) (A, B port) 15.7 (Pitch) P=10.5 Applicable tube: T0425 VQ Other dimensions are the same as the M5.

ZX

20 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K1-P Vacuum switch (ZSE3) ZX1-K1-D Spacer 1: ZX1-S1 ZX Exhaust port DOWN button ZR Spacer 1 (For side mounting) Adjustment needle UP button Manual override (Non-locking) 10 ZM 20.5 41.5 51.5 10 21.6 (Mounting hole) 1 34.4 9.3 ZH RESET button SET button 3.6(Mounting hole) 1 10 22.6 3.6 2-R1.8 19 18.7 2-R1.8

2/3 Port Valve

Water Air Oil Low vacuum (1 Torr) Coolant Steam Applicable fluid 1 8 1 4 3 8 1 2 3 4 Rc(PT) 1 Port size 1 4 1 1 2 1 2 32A 40A 50A Flange 65A 80A Page P.4.2-3 to P.4.2-10 P.4.2-11 to P.4.2-18 P.4.2-19 to P.4.2-27 P.4.2-28 to P.4.2-34 P.4.2-35 to P.4.2-42 4.2-2 2 Port Valve for Comressed Air and Air-hydro Circuit Control Process Valve SeriesVNA Universal 2 Port Valve Exclusively for air pressure

MY1

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 16 20 20 16 20 Mounting position Mounting position 16 A 70 90 93 73 94 A A 74 B 90 110 107 87 106 B B 86 Operating range Note) 11 7.5 6.5 8.5 6.5 Operating range

CLS

D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100 100 95 90 10 ML1C D-Y7BAL 125 125 120 115 20 D-X 20Data Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Title not found

Not thar ioLrbe and 3 rostion vaves cannol be 6ed vJhcfe s.q e so,Ano d ! ing Vr'hcn rh. h! t in r encer lype s !sed, keep t1e exlraust po lrom .omn! n d re.l.oract vrth llaler or olfer quds , E port position U slde (2 to lo statrons) D slde 12 to 1o stairons) Bolh sides (2 to 20 '!p to 18 socnoids possbe '_!

NCQ8

Applicable load IC circuit, Relay, PLC Load voltage 24 V or less 48 V or less 100 V or less AC DC AC DC AC DC Maximum load current 50 mA 40 mA 20 mA Contact protection circuit None 1 or less (including lead wire length of 118"(3m)) Internal resistance D-A93, D-A93V, D-A96, D-A96V (With indicator light) D-A93, D-A93V D-A96, D-A96V Auto switch part no.

Modular F.R.L. Unit

Unit AC10 to 60 Dimensions Pressure gauge port size AC10, 20 P G A Q E F L C B H OUT IN T H L J OUT Pressure gauge (Option) K M Square embedded type pressure gauge (Option) N Port size Lubricator Regulator Air filter Drain Min. clearance for maintenance D AC25, 30, 40, 50, 55, 60 Pressure gauge port size A P G E F Q L H B C OUT IN T H L OUT Pressure gauge (Option) K M Square embedded type