ZSE F/ISE

, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6.5 1.6 ZSP 20 41.5 Bracket A ZS-24-A View A ISA2 IS Bracket D ZSM A PF2 30 20 IF Data 20 45 55 4.5 4.2 11.5 40 15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5

S Couplers Series KK/KK13

19 31.1 10.2 7.5 35.3 24 Rc 1/4 51 Rc 1/2 117 55.5 42.5 -04F -04F 24 32.1 G 1/4 27 32 -G02F 17 Barb fitting type (for rubber hose) Barb fitting type (for rubber hose) 25 62 25 48 20 13 15 27.2 D D Width across flats 21 Applicable hose I.D. 1/4" Effective area mm Min. bore Weight g Model Applicable hose I.D. 1/4" Effective area mm Min. bore Weight g Model D D 17 81 KK13S-07B KK13P-07B 4.1

VQ5000

3 m Note) Note) Manifold Note) 1 Plug-in unit Note) Cylinder port Direct exhaust with silencer box: Exhaust from both U and D sides SB Stations 03 04 B CM Rc 3/8 Rc 1/2 Bottom ported Rc 1/2 Mixed Note) Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure SD SU W 02 2 stations Note) ... ... 12 12 stations D U D U Note) Combination

Speed Controller with

Note) The applicable cylinder bore sizes (mm) for AS1002F-02 are 2.5, 4, 6.

IR1000/2000/3000

VEX Output specifications NPN output PNP output 1-5 V output 4-20 mA output Symbol Standard model no. 20 AMR A B C D Note) Please contact SMC if a product with pressure gauge is desired. ITV Copper-free With digital pressure switch IC Ozone Resistant 3 Manifold Specifications (Except type IR2120 and series IR3000) 7 Fluoro rubber is used for rubber seal materials.

Vacuum Filter AFJ Series

Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

HRX-OM-O021

[] 60Hz 50Hz Fig. 9-5 Heating capacity(HRS050-A-20-(BJM)) 9.5.2 HRS050-W-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 5 20 25 32 40 1500 1500 5 20 25 32 40 Heating capacity [W] Heating capacity [W] 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature[] Circulating fluid temperature[] 50Hz 60Hz Fig. 9-6 Heating capacity(HRS050-W-20

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

2-M3 x 0.5 depth 4 8.45 20 Piping port M5 x 0.8 depth 5 6.4 Piping port R, NPT 1/4 18.35 3.5 12.4 7 7.8 25.1 2.5 10.7 2.6 8.45 10.1 12.4 30 15.2 14.5 22 Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55

Lubrication Equipment

-l06 to 10 ALD900-l12 to 20 D.P.

Ionizer Nozzle type IZN10 Series IZS

30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 445 IZN10 Series Flow Rate Characteristics (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 (3) Female threads for piping/IZN10-11 With Stainless steel 316 One-touch fitting + Anti-static tubing 0.7 Energy saving static neutralization nozzle/IZN10-01 0.3

5

MQ D-G5, K5, G5lW D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8 20 to 63 RHC 8.5 Auto switch 12 Auto switch Hs Hs RZQ 24.5 16 B 33 A B 26 A D-H7l, H7lW D-H7NF 20 to 63 D-C73C, C80C 20 to 63 8.5 Auto switch 8.5 Auto switch Hs Hs 16 16 B 29 A B 36.7 A D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 12 Auto switch Hs 8.5 Auto switch Hs 24.5 16 B 38.2 A B 33 A (mm) Auto Switch Mounting Height Auto Switch

asilltr

D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

70pvpump

SUP = 0.2 MPa 20 SUP = 0.2 MPa VX2 10 10 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 10 30 40 50 20 60 VX3 10 20 Discharge rate (l/min) Discharge rate (l /min) VXA Selection from Flow Characteristic Graph (PA3000) VN Required specifications example: Find

Air Cylinder NCQ7 Series Compact Cylinder

1" Black D-F79F D-F7LF D-F7NTL o oiagnoslic ouipui OUT 2 o Series NCDQT Auta-Switch / Operating Range D-A72. D-A73, D-A80 D-A72H, O.A73H, O.A76H, D-A8OH, D-F7NTL, D-F7P, D-F79, D.F79W, O-J79, D..t79W D-Fltr WV, D-F7tr V t,.A73C, D-A80C, D-J79C op6drirE ElE6 (* lid be*rw) I, Dimensiltn / Operating Range Series NCDQT Solid.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel 304 M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel plated

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

HRX-OM-M090

--20, HRS024--20 . 9-11 9.6 Pump capacity . 9-12 9.6.1 HRS012--10-(BJM), HRS018--10-(BJM) . 9-12 9.6.2 HRS012--20-(BGJM), HRS018--20-(BGJM), HRS024--20-(BGJM) . 9-12 9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT . 9-13 9.6.4 HRS012--20-T, HRS018--20-T, HRS024--20-T . 9-13 9.6.5 HRS012--20-MT, HRS018--20-MT, HRS024--20-MT . 9-14 9.7 Required facility water flow (for water-cooled

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

RHC

(Including band and screw) MVGQ Bore size (mm) 20 25 32 40 50 63 80 100 CC Applicable auto switch RB D-C7, D-C80 D-C73C, D-C80C Reed J BMA2-020 BMA2-032 BMA2-040 BMA2-050 BMA2-063 BMA2-025 D-H7/H7C D-H7W D-H7NF/H7BAL Solid state DD-B5, D-B64, D-B59W Reed -X D-G5/K59/G5W/K59W BA-04 BA-32 BA-05 BA-06 BA-01 BA-08 BA-10 BA-02 Solid state 20D-G5NTL, D-G5BAL D-A3, D-A44 Reed BD1-04M BD1-02 BD1

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.