MHZ

C S C S C S C 0.016 0.043 MHZ2-10 K 7 12f8 52.8 11 15 Applicable tubing End boss assembly MHZ2-16 K 0.016 0.043 10 16f8 58.7 15 20 MHZ2-20 K 0.020 0.053 D2 12 20f8 70.5 19 22 0.020 0.053 MHZ2-25 K 15 25f8 82.9 24 25 D1 MHZ Other dimensions and specifications correspond to the standard type.

Step Motor Controller

The controller will be damaged if a commercial power supply (100V/200V) is added to the controller,s servo motor power (U, V, W). Be sure to check wiring such as wiring mistakes when the power supply is turned on. 2. Connect the ends of the U, V, W wires from the motor cable correctly to the phases (U, V, W) of the servo motor power.

Series SV

Mounting 20 Tie-rod base 20 stations Direct mount DIN rail mount (with DIN rail) DIN rail mount (without DIN rail) Nil D D0 D3 SS5V W 1 05 U 10CD Note) When a DIN rail longer than the specified stations is required. (Specify a rail longer than the standard length.) Cassette base For 3 stations SS5V W 05 16CD 1 U ... ...

CNA

40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LH LS LT LX LY MM N P Q H S T V W X Y

CNA

40 10 95 17 56.5 20 13 15 12 11 M8 x 1.25 7 18 Up to 600 35 32 86 27 115 1/4 1/4 64 20 40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 Bore size (mm) 40 50 63 80 100 LD LH LS LT LX LY MM N P Q H S T V W

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

LVQ

5 M 7 N 15 P 53.5 Q 21 R 25.3 W 64 LVQ2 S-Zm LVQ3 S-Zm LVQ4 S-Zm LVQ5 S-Zm LVQ6 S-Zm 1 2 1 2 28.5 57 34.5 69 45.4 107.5 16.5 137 32 50 6 7 20 59.5 25 31.2 82 1 2 28.5 57 34.5 69 45.4 113 22 151 37.5 55.5 6 7 20 59.5 25 31.2 87.5 1 2 42 84 48 96 75 153.2 25 202 50.2 78.2 10 7 20 73 38.5 45 128 1 2 42 84 48 96 75 163 32 236 60 88 10 7 20 73 38.5 45 137.5 560 Series LVQS-Z Air Operated Type

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

CL

116 145 161 182 18 18 22 26 31 31 36 43 43 43 27 27 32 41 9.0 11.5 13.5 13.5 19 19 19 88 105 124 140 145 160 180 20 23 28 29 14 20 20 120 140 164 180 190 212 236 58 64 84 100 100 112 118 144 170 198 220 230 255 275 17 17 21 21 16 16 18.5 17 17 21 21 16 16 18.5 73 84 77 92 85 100 112.5 141.5 121 150 133 167 Without rod boot With rod boot M M1 MM N RT RY S W P Bore size (mm) Stroke range H

Modular F.R.L. Unit

Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D

C85

Rod flange Rod foot Bore AO XV TZ TM TD e8 UW W TT UF FT TF FBH13 W UR UR XS AV TR JS14 LT NH AB US 8 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 10 13 38 26 4 20 6 40 30 4.5 22 26 11 12.8 25 3.2 16 12.8 4.5 23.8 35 3.2 5 12 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 16 18 58 38 6 25 8 52 40 5.5 30 33 14 18 32 4 20 18 5.5 32 42 4 6 20 20 66

C85

TR JS14 TD e8 FBH13 XS AV TM NH FT TF XV LT AO UR W UR UF W TT UW TZ AB US 8 3.2 25 4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 10 3.2 25 4 4.5 11 26 16 23.8 12.8 13 3.2 26 22 30 40 6 20 38 12.8 4.5 35 5 12 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 16 4 32 6 5.5 14 38 20 32 18 18 4 33 30 40 52 8 25 58 18 5.5 42 6 20 5 40 6 6.6 17 46 25 36 19 20 5

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

across corners I) E (mm) Bore size (mm) N CD CT CZ D E FT FX FZ G H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5

MY1

GR-S-010 (10 g), GR-S-020 (20 g) Technical Data 1353 MY1W Series Dimensions: 16, 20 (LL) L 4 x MM depth M 4 x B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW Q+ Stroke PG M5 x 0.8 M5 x 0.8 (Hexagon socket head plug) (Port) W CH LH RR SS NE H RR SS NH HH QQ NC M5 x 0.8 M5 x 0.8 2 x 2 x M5 x 0.8 PP TT UU (Port) This port is not available for use.

Compact Manifold Regulator Series ARM5

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at handle locked) 55 (at handle locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

Air Slide Table Series MXP

Cylinder: MXP10-10 Mounting: Horizontal wall mounting Average speed: Va = 300 [mm/s] Load mass: W = 0.2 [kg] L2 = 20 mm L3 = 30 mm Model to be used Model to be used Mounting orientation Mounting orientation Average speed Va (mm/s) Average speed Va (mm/s) W W Load mass W (kg): Fig. (1) Load mass W (kg): Fig. (1) L3+A3 L3+A3 Overhang Ln (mm): Fig. (2) Overhang Ln (mm): Fig. (2) L2

CG1

Bore size (mm) MM W TC NA P S TA ZZ WA WH 30 30 25 20 20 20 20 20 M8 M10 X 1.25 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 24 29 35.5 44 55 69 80 100 M5 M5 Rc(PT)1/8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)1/2 77 77 79 87 102 102 122 122 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 147 157 159 187 218 218 264 264 16 16 16 16 18 18 22

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

3 4.5 8 9.5 4 Section AA' 6-M3 x 0.5, depth 14 15 15 Mounting reference planes D B Q QL Without magnet and rail 8 2-M2 x 0.4, depth 3 3.15 2.5 (mm) G Model Z J H K L M QL Q S V W L MXP8-10 8 52 60 40 44 10 21 20 20 32 32 14 2-M2.5 x 0.45, depth 4 MXP8-20 50 20 82 36 36 41 20 74 65 90 50 20 8-8-27

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

type W, only DC voltage is available.