Electric Actuator

Selection Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEYG16 l M L LEYG16 Al M L 27 36 Lead 2.5: LEYG16 AC M L Lead 2.5: LEYG16 C M L 31.5 22.5 Lead 5: LEYG16 AB M L Lead 5: LEYG16 B M L 27 Lead 10: LEYG16 AA M L Pushing force [lbf] Pushing force [N] 18 Lead 10: LEYG16 A M L 22.5 18 13.5 13.5 9 9 4.5 4.5 0 30 40 50 60 70 80 90 0 40 50 60 70 80 90 100 Set value of pushing force [%] Set

Battery-less

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M E LEYG16M E 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 74 LEYG Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC) Horizontal Vertical LEYG16M L mE LEYG16M L mE for acceleration/deceleration: 2000 mm/s2 10 40 Lead 2.5: LEYG16M L EC 35 Horizontal work load

Electric Actuator

For using on moving parts, select the robotic cable. 2 Only available for the motor type Step motor. ( Actuator cable length [m] Nil 1 3 5 8 A B C Without cable 1.5 m 3 m 5 m 8 m Nil: Left I/O cable length [m] 1 + Controller/Driver type 1 10 m 15 m Nil 1 3 5 Without cable 1.5 m 3 m 2 Nil 6N 6P 1N 1P AN AP Without controller/driver 20 m LECP6/LECA6 (Step data input type) NPN PNP NPN PNP NPN

NCG/CG1

ZZ + Stroke Rod Side Flange Style M M Stroke range (mm) Bore size (mm) B E F FX FD FT H B 20 25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 35 40 40 50 58 58 71 71 LT LH LT LX X Y Y X LZ LS + Stroke

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[101.7] (Lead wire length) With interface regulator 140.7 15 53.5 [60.5] 50 24.5 68.5 [75.5] 16.5 68 65 11 11 7.5 32.5 P, EA, EB port 1/8 20.5 24.5 41 (36.8) With plug (12.5) 41 L plug connector (L): SY3 40(R)-L-01 3 4 5 M plug connector (M): SY3 40(R)-M-01 3 4 5 M8 connector (WO): SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

example of selecting an earth-leakage current breaker under the following conditions. 2 mm2 5 m 2 mm2 5 m NV Servo motor Servo amplifier Driver M MR-J4-40B HG-KR43 LECSS2-T8 LE-T8Ig1 Iga Ig2 Igm Use an earth-leakage current breaker designed for suppressing harmonics/surges.

Table of Contents

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

MGP

V = 400m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 25 25 5 5 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 20 20 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 20 20 50, 63 50, 63 Load weight m (kg) 50, 63 50, 63 50, 63 32, 40 32, 40 32, 40 32, 40 32, 40 50, 63 10 10 32, 40 5 20 50 76 75 100

High Vacuum Angle Valve

M: Size 16, 25, 40 only.

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 18 19 Courtesy of Steven

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators

Auto Switch Guide

(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Table of Contents

A VMG M-5ALN-4 M-5ALN-6 M-5ALU-3 M-5ALU-4 M-5ALU-6 1.4 2.4 1.1 1.4 2.4 1.8 2.5 1.6 1.8 2.5 5 7 4.5 5 7 9 11 8.5 9.3 11.3 13 15 12.5 13.3 15.3 4.0 4.4 4.0 4.1 4.5 M5 x 0.8 M-5ALN-6 M-5ALU-6 M5 x 0.8 Barb Elbow for Nylon Tubing: M-5ALHN-4/-6 Barb Elbow for Soft Tubing: M-5ALHU-3/-4/-6 Effective area (mm2) Weight (g) Width across flats 7 M-5ALHN-4 M-5ALHU-3/-4 Model A B C D M-5ALHN-4 M-5ALHN

ZP

Max. 0.35 inch shortened (9 m m) 0.43 inch shortened (1 1 m m) Pad unit With adapter Actual size Actual size 19.5 mm 12 mm 3 mm 8.5 mm ZP3 New New ZP3 New ZP(Conventional model) ZP(Conventional model) New Space-saving 2 piping reduces working space!

CRB2/CRBU2/CRB1

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 2-d Body (B) (mm) (mm) Size d Size Q M N 10 3.4 10 M3 8.5 9.5 15 3.4 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 Q N A port B port (Standard) (Altered) A port 30 30 B port 5.5 M5 15.5 14 40 40 M5 21 20 5.5 M 63 Series CRBU2 Symbol: C3 Symbol: C4 Change the position of the screws for tightening the

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

bearing CY1S6 to 40 !

Auto Switch Guide

(The switch will stay ON all the time.) 1) For an auto switch without a connect protection circuit, use a contact protection box when the wire length is 5 m or longer. 2) Even if an auto switch has a built-in contact protection circuit, when the wiring is more than 30 m long, it is not able to adequately absorb the rush current and its life may be reduced.

5

Pivot Bracket Pin (For CM2YC) Pivot Bracket Pivot brackets consists of a set of two brackets. 7.5 40 7.5 40 3.4 3.4 6.8 6.8 R3.4 R3.4 6.8 6.8 25 25 R3.4 R3.4 Dd9 d 0.2 17 0.2 17 R11 R11 m m L2 +0.15 +0.05 +0.15 +0.05 CD CD L1 t t 5.2 40 5.2 40 3.2 3.2 57 28 57 28 (mm) (mm) Applicable bore size Part no.