Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

For large flow (3.2 W) For large flow, vacuum (3.2 W) Nil V U W 02 2 stations Note) Note) 20 20 stations (Max.)

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

Table of Contents

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Air Cylinder

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS With double end lock Kit no. CBM2-20-PS-W CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W 11 Lock spring Stainless steel 12 Bumper Urethane * Seal kit includes @6 and @7. Order the seal kit, based on each bore size. (Except #3.) * Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

C85

O Head side trunnion: U (40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33

C85

(40) 51 35 25 32 0.7 64 DSeries CS1 only W Series C85: 20, 25 W 37 24 35 17 22 0.3 47 -X 100.0 T 27 18 26 12 16 0.5 35 2022 14 21 10 13 0.7 28 Foot: L Rod side flange: F Head side flange: G (100) (40) (40) (40) (40) (100) 0.3 Data Lateral load applied to the rod end fR (N) L (40) (40) (40) (40) (100) 89 0.5 W W W F 10.0 (40) (40) (40) 74 36 0.7 93 (40) 54 37 26 33 0.3 69 G 41 27 39 19 25

NCM

19.5 29.5 24.5 100 W W W (12) (12) 32 19 14.5 17 26.5 22 125 (12) (12) 29 17 13 15.5 24 20 150 (12) (12) 35 20.5 15.5 18.5 29 24 25 (12) 24 14 10.5 12.5 10.5 20 16 50 19 11 8 9.5 11 8.5 15.5 12.5 75 3 16.5 9 7 8 9 7 13 10.5 100 14.5 8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40)

Rotary Actuator/Vane Style Series CRB2

10 15 T99 L CDRB2 W F 180 S With auto switch Size: 10, 15 CDRB2 W B 180 S T79 L With auto switch Size: 20, 30, 40 Size Made to Order Refer to the table below for details.

A

K E O F F TA K EO F F T Y P E 1 "T" Type 4 "X" Type T H R E A D T Y P E Nil Rc(PT) N NPT P O R T S I Z E M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 mm mm Model Port Size A B C Model Port Size A B C D Y11-M5 M5X0.8 8 12 8 Y14-M5 M5 23 16 14 25 Y21-01 1/8 10 29 19 Y24-01 1/8 40 40 22 40 Y21-02 1/4 10 29 19 Y24-02 1/4 40 40 22 40 Y31-01 1/8 11 33 19 Y34-02 1/8 49 43 28 48 Y31-02 1/4 11 33 19 Y44

MB

Bore size (mm) Contents 32 40 50 63 80 100 32 40 50 63 80 100 MBB32-PS MBB40-PS MBB50-PS MBB63-PS MBB80-PS MBB100-PS MBB32-PS-W MBB40-PS-W MBB50-PS-W MBB63-PS-W MBB80-PS-W MBB100-PS-W Set of the No. @9, #0, #1, #2 and #3. Set of the No. @9, #0, #1, #2 and #3.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

Double acting with spring Vm/min -X Transferred article W Transferred article W Transferred article W Transferred article W Bracket Cancel cap Auto switch capable 20Mounting is possible with no protrusion from the body surface.

Cylinder with Lock

Example: Power supply is 24 VDC Internal voltage drop in auto switch is 4 V. 24 Cylinder with Lock Double Acting, Single Rod/Double Rod 32, 40, 50, 63, 80, 100 C96N Series RoHS How to Order C96N B 32 100 C J W C96ND M9BW S W C J 100 B 32 With auto switch With auto switch (Built-in magnet) Bore size 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm Rod Nil Single rod W Double rod Made

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

S2 S3 S6 S7 AC servo motor (Incremental encoder) 100 W PNP 2pcs. AC servo motor (Incremental encoder) 200 W PNP 3pcs.

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Modular F.R.L. Units

Example) AC30D-F03DM-SV-1NR-A q r t y w e q Symbol Description Body size 20 30 40 Nil N F Rc NPT G Thread type w + 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Port size e + Without auto drain N.C. (Normal close) Drain port is closed when pressure is not applied. N.O.

Thermo-chiller/Rack Mount Type

024 030 HRR -W HRR010-W-20 30 20 Facility water flow rate [L/min] Facility water flow rate [L/min] HRR030-W 25 15 HRR024-W 20 15 10 10 HRR018-W 5 5 HRR012-W 0 0 0 10 20 30 40 0 10 20 30 40 50 Facility water inlet temperature [C] Facility water inlet temperature [C] * This is the required facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the

V

www.stevenengineering.com I 6.12 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H B U F F E R ZPT N P A D D I A M E T E R M O U N T I N G T H R E A D 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 Symbol Thread dia. 2~8 10~32 40~50 A8 M8X1 Male thread A10 M10X1 A14 M14X1 V A C U U M E N T R Y Symbol Port size 2~8 10~32 40~50

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 700.05 With shims 70 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 400.05 With shims 40 Without shims 700.05 With shims 70 Without shims 700.05

Proposals for Energy Saving

32, 40, 50, 63 40, 50, 63, 80, 100 125, 140, 160, 180, 200, 250, 300 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 20, 25, 32, 40, 50, 63, 80, 100 32, 40, 50, 63, 80, 100 32, 40, 50 Wiper ring SCB scraper CVM5: Rubber bumper CV3, CVS1: Air cushion None Rubber bumper Rubber bumper (base cylinder unit) Air cushion (base cylinder unit) Rubber bumper Air cushion Rubber bumper