Table of Contents

Aluminum die-casted Aluminum die-casted Material Note q Description Housing Body Chrome treated Epoxy coating on inner surface w e Note: Sight glass is indicated in the figure above for easy understanding of parts, however mounting position is different. Refer to dimensions on pages 14-20-46 to 14-20-47 for details. Sight glass Tempered glass AMF850 is aluminum casted.

MU

46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.2

MU

46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.2

VCL

VCL30: 8 W, VCL40: 11.5 W Power consumption DC VCL20: 22/19 VA VCL30: 36/30 VA VCL40: 45/37 VA Note 2) Inrush VCL20: 8.5 VA VCL30: 10 VA AC 50/60 Hz Apparent power VCL20: 10/8 VA VCL30: 15/13 VA VCL40: 19/16 VA VCL40: 13 VA Holding Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

Table of Contents

52 46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Vacuum Pad

Pad Calculation W = P x S x 0.1 x 1 t W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W = P x S x 0.1 x 1 t W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting This type of application should basically be avoided.

Vacuum Pad

Pad Calculation W = P x S x 0.1 x 1 t W P S t : Lifting force (N) : Vacuum pressure (kPa) : Pad area (cm2) : Safety factor Horizontal lifting: 4 or more Vertical lifting: 8 or more Horizontal lifting Vertical lifting This type of application should basically be avoided.

Digital Flow Monitor

Remarks Sensor connector (For PFMB) ZS-28-C-1 Sensor connector (For PFMC and PF3A7) ZS-28-CA-4 Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

XL

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Clamp Cylinder with Lock Series CLK1

cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 GA W GB 17 1010 32 3 BX 14 30 45 45 M 3 Approx.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously, supply pressure to port P on both sides and exhaust from port R on both sides, using "stations B (SUP/EXH block both sides)".

Plate Cylinder

2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

Intrinsically Safe Valve

(g) n: Stations W = 100n + 151 W = 79n + 127 W = 61n + 101 Note 1) For 10 stations or more (5 stations or more for the 53-SS5Y7), supply pressure to P port on both sides and exhaust from EA/EB port on both sides.

Rotary Actuator

-XC47 to -XC58 S, W, Y -XC59 to -XC61 Change of port direction S, W, X, Y Z, T, J, K -X7* Heat resistant type (100C) S, W, X, Y Z, T, J, K Angle adjusting screw -X16 Fluororubber seal S, W, X, Y Z, T, J, K -X10 Both sides angle adjustable S, W, X, Y Z, T, J, K 0 0 9 0 y 1 a y A port B port w a y n w e -X11 One side angle adjustable, One side with cushion io k y of e S, W, X, Y Z, T, J, K

EX120/121/122

w w e r e r w No.

smcmaintenancepartslist

CBG1A Air cushion type Locking at both ends 20 25 32 40 CBG1N20-PS-W CBG1N25-PS-W CBG1N32-PS-W CBG1N40-PS-W Above no. @5, @6, @7, @8. And a grease pack. CBG1N Rubber bumper type Locking at both ends 20 25 32 40 CBG1A20-PS-W CBG1A25-PS-W CBG1A32-PS-W CBG1A40-PS-W Above no. @5, @6, @7, @8, $0, $1. And a grease pack.

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.