Vacuum Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.
Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.
B A A A B B B B A A A A SY 3 L1 L2 SV 2 11 11 71.5 (Pitch) P = 51 (Pitch) P = 51 71.5 6 [2] 1 SYJ 2n x 1/2, 3/4 (A, B port) Stations SZ 24 [23] 70 [71 .5] 58 28 105.5 176.5 209 9 9 20 2n x 1/2 VP4 D side Plug assembly: VVFS2000-30A(Option: Refer to page 1326.)
Please consult SMC when considering the necessity of the regeneration option. 200 Horizontal/Lateral Horizontal/Lateral Lateral Horizontal a Mep L1 (mm) L2 (mm) L3 (mm) Pitching Rolling Yawing 100 m a=1000 a=2000 a=3000 L1 0 30 20 10 Transfer load m (kg) Maximum load L2 200 a=3000 Regeneration option model Driver type Mer a=2000 A1 A2 B1 B2 a=1000 Not required. Not required.
Not required. 200 L2 Mer 10 20 30 0 Transfer load m (kg) m a=1000 Half load 4000 a=2000 L3 (mm) Regeneration option model Driver type L3 a=3000 2000 A1 A2 B1 B2 Not required. Not required. Not required.
Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.
Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.
Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.
(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal
l (mm) A A' s i s .D I E I F GA I GsJ H I I Bore Size J MM NN 6 7 9 14 14 3 10.5 8 6 6 17 10 10 12 15 17 5 13 I 8 6 I 7 20 L .. 6 M3x O.5 MlO xlO 7 3.4 1.6 24 16 32 97 ; ~ 4.5 Hi ' 28 1S 10 5.5 1 2.3 36 22 49 ~ 7 I M4X O.7 M12X1 .. 0 15 12 14 20 1 19 6 15.5 I 10 6 I 7 24 9 I M5X O.8 MI4 X tO - Series CJP 2-M5xo.B z H s A F GA G8 A A' jI ~: 1=r=if1+ :' -,LitL*'ft ? .. =.'
Keep the manual in a safe place future reference. Observe the tightening torque for screws. Tighten the screws to the recommended torque for mounting the product. D o n o t m a k e a n y a l t e r a t i o n s t o t h i s p r o d u c t .
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
(For 15m: Max. 20% reduction) Note 5"Pushing speed is the allowable speed for the pushing operation. When transporting and pushing a workpiece, operate the actuator with the "vertical load capacity" or less. Note 6This is a reference value for correcting errors in reciprocating motion.
Eody Asdnbly-l/a. NF IF p.rt!. Inctuda body .nd (2) tocktno ths. sprir|oSt AXT0r&4 Spnig-spool rotlm xmosl0 of!!L-!!9qtq 4RP568414 5'Oool A s|erD Aas,y Galket-aolnold cov.r xTot1{l 1 spac.r AXT!1&5 1 cavr asldnbly-a"c. 3ol6nold. cnmB|3 ol cov.r, recsd no}tocking oplralor, and {4) dot, 12, Cdor a!.mt,y-A,C. tol.|lold, wltioul manual oprrtor, and Nith oorator mounllng hol. pl!
HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product
A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?
(Pages 10, 12, 15, 17) L-Tees Combine an elbow with a Tee. Mixed sizes of barbed branches are available. (Pages 9, 11, 15, 17) V-Tees orient the barbed branches on adjacent hex surfaces. Mixed branch sizes are available. (Pages 10, 12, 15) 1/8 NPT Male manifolds Hundreds of combinations for the OEM needing a fitting that requires a minimum amount of labor to install.
FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT,SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, .88880 lb
FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT, BTM PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, 0.77161 lb