10

S Conduit 24 VDC C37 5 With surge voltage suppressor 3/8 8 T 100 VAC 10 (N.C. only) U 110 VAC 1/2 10 (N.C. only) V 200 VAC 5 W 230 VAC 1/4 8 10 (N.C. only) Flat terminal Stainless steel 5 Y 3/8 24 VDC 8 10 (N.C. only) 1/2 10 (N.C. only) Z Other voltages For special options, refer to pages 21 to 23.

NCQ8

0 r t !1 y q e u o w i Male thread Parts List Remarks Remarks Description Material No.

0.4

of rated voltage Allowable voltage fluctuation VQ 1/2 VQ 1/2 Coil insulation type Equivalent to Class B (R1)5 1 (P) 3(R2) 3-position pressure center 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC VQ 4/5 2(B) (A)4 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA) (R1)5 1 (P) 3(R2) 100 VAC VQC 1/2 Power consumption (Current) 4-position dual

Vacuum Unit

How to Order w q e r t y ZK2 A C K 5 K W 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle size 07 0.7 10 1.0 12 1.2 15 1.5 Symbol Body Exhaust type Symbol Supply valve Release valve N.C. N.C.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

Axial foot (L) [mm] XA + Stroke Bore size [mm] E1 TR AH AO AT AB SA XA C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch Made to Order Related Products 32 48 32 32 10 4.5 7 142 144 40 55 36 36 11 4.5 10 161 163 50 68 45 45 12 5.5 10 170 175 63 80 50 50 12 5.5 10 185 190 80 100 63 63 14 6.5 12 210 215 100 120 75 71 16 6.5 14.5

1

X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

0.55

Since voltage drops due to the internal circuit in S, Z, T types (with power saving circuit), the allowable voltage fluctuation should be within the following range. 24 VDC: 7% to +10% 12 VDC: 4% to +10% Made to Order (Refer to page 24 for details.)

Series VQ Base Mounted Metal Seal/Rubber Seal

AXT100-2-P (2) P kit w U S D-sub connector housing ass'y =Number of pins: 25, 15 AXT100-2-F (2) F kit e VK AXT100-2-TB1 (4) Terminal block assembly (8 terminals) T kit r AXT100-2-TB2 (4) Terminal block assembly (8 terminals) T kit t VZ Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PS20) of q SI unit and w P kit (20 pin).

0.55

stations stations Manifold base W = 29n + 21 W = 51n + 35 W = 63n + 64 W = 97n + 80 W = 139n + 550 Weight: W [g] Stations: n Note) Supply pressure to 1(P) ports and exhaust pressure from R ports on both sides for 10 stations or more (5 stations or more for the VF5000).

LVQ

Symbol Breathing port thread type Metric sizes Threaded Threaded NPT 1/8 Rc 1/8 Nil 06 10 12 19 25 6 10 12 19 25 R Inch sizes 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Variations LVQH20-T LVQH30-T LVQH40-T LVQH50-T LVQH60-T Model Connection fitting size Orifice diameter 4 8 10 16 22 Millimeter 6 10 12 19 25 Inch Type 1 Symbol 1/4 3/8 1/2 3/4 90 Degree turn type B A Multi-turn type B A 578 Series LVQH-T

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

H I L O P Q R B A Stroke 50 30 225.5 103.5 20 8 35.5 32 64 20 73 93 16 122 85 44 9 1/8 10 36 14 depth 5 63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9

•

"'t I( r: i-: 1 \ W 'll f:: l '-'; I Q c...::; I ~"~ ...Ab.. ,..;= ~ -LK F N -H S + Stroke .!'!. FT ZZ1 +t+ Stroke Z Z t Stroke (mm) .. ,.,.,." .".

SYJ3000/5000/7000

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

SX

-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A In common between +COM and COM.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In the case of w/ One-touch fitting, the 5 mm stroke with 32 bore is the same external dimensions as 10 mm stroke.

%silltr

S Y M B O L S S H O W T H E F U N C T I O N O F A C O M P O N E N T B U T D O N O T I N D I C A T E T H E C O N S T R U C T I O N .

CRQ2

shaft Reversed shaft W W W W 10, 15 20, 30, 40 10, 15 W W W W W W 10, 15, 20, 30, 40 10, 15, 20, 30, 40 10, 15 Stepped round shaft with double-sided chamfer W W 10, 15 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made to Order Chart 2.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !