Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Elbows (barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(6/4), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow (H), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Electric Actuator

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 5 10 15 20 0 10 20 30 40 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 00 0 5 10 15 20 0 0 0 4 2 6 8 10 10 20 30 L4 Vertical Work load [kg

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MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

V

www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M

LJ1H

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, R port C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) 1/8 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) 1/4 C8 (8 One-touch fitting) C10 (10 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port Manifold base weight W (g) Note 2) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m +

Electric Actuator

5: LEYG16 B M L Lead 5: LEYG16 AB M L Lead 10: LEYG16 AA M L 4.4 4.4 Lead 10: LEYG16 A M L 0 0 600 0 100 200 300 400 500 600 0 100 200 300 400 500 Speed [mm/s] Speed [mm/s] LEYG25 l M LEYG25 Al M L L 33 66 Lead 3: LEYG25 C M L Lead 3: LEYG25 AC M L Vertical work load [lb] Vertical work load [lb] 22 44 Lead 6: LEYG25 B M L Lead 6: LEYG25 AB M L 11 22 Lead 12: LEYG25 A M L Lead 12: LEYG25 AA

Compact Cylinder

Standard (mm) Bore size (mm) Stroke range (mm) A B C D E F H I J K L M N O P Q S U W Z 32 40 50 63 80 100 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 13 13 15 15 21 27 16 16 20 20 25 30 45 52 64 77 98 117 17 17 22 22 26 26 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M16 x 2.0 M20 x 2.5 10.5 10 13 13 16 14 14 17 17 22 27 7 7 8 8 10 12 34 40 50 60 77 94 5.5 5.5 6.6 9 11 11 65.5 72

Battery-less

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG32M E/40M E LEYG16M E 10 10 LEYG25M E LEYG16M E LEYG25M E 1 1 0.1 0.1 10 100 1000 10 100 1000 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

Step Motor Controller

LE CP 1 (14.2) (13.5) Connector C Actuator side (Terminal no.) 1 2 Cable length (L) 1 3 5 8 A B C (14) (18) A1 B1 8 1.5 m 3 m 5 m 8 m (17.7) (17.7) 5 6 1 2 Connector A A6 B6 Connector D 10 m L (11) (30.7) (14.7) 5 6 15 m (10) 20 m Controller side Produced upon receipt of order 8 10 15 20 LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) (Terminal no.) (14.2) (13.5

Basic type / Direct mount type Series CY3B/CY3R

M2 = W L1 = 10 0.05 = 0.5 [Nm] 2 = M2/M2 max = 0.5/16 = 0.031 W = 1 [kg] = 10 [N] W M Find the value M2 max when Va = 300 mm/s from Graph (3). L1 From V = 1.4 Va We = W V = 4/100 10 1.4 300 = 168 [N] Me3 = 1/3 We (L2 A) = 1/3 1680.032 = 1.8 [Nm] 3 = Me3/Me3 max = 1.8/7.2 = 0.250 cDynamic moment Examine Me3. Find the load equivalent to impact We.

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Applicable shaft type: W Applicable shaft type: W (mm) Q2 L2 max Y Size (mm) Q1 = M Q2 = M 10 Q1 L1 max X Size M4 Y 3 7 to 8 Y = 10 15 M4 X 5 9 to 14 M5 Y 3.5 8.5 to 9 L2 = L1 = 15 20 M5 X 6 11 to 18 M6 Y 4 10 X = 20 30 M6 X 7 13 to 20 M8 Y 5 13 30 40 M8 X 8 16 to 22 M10 Y 6 15 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0.5 m 31 63 R 22.5 3 2. 5 11-3-14 49 CRB2 CRBU2 CRB1 MSU CRJ CRA1 CRQ2 MSQ MRQ D2011-3-15 50 Rotary Actuator with Angle Adjuster Free Mount Type, Vane Style Series CRBU2WU Size: 10, 15, 20, 30, 40 How to Order Without auto switch CRBU2 W U 10 180 S Size 10 15 20 30 40 Size 10 15 With auto switch Size: 10, 15 90 CDRBU2 W U 10 180 S With auto switch Size: 20, 30, 40 CDRBU2 W U 20 180 S

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W Applicable shaft type: W (mm) Q2 L2 max Y Size (mm) Q1 = M Q2 = M 10 Q1 L1 max X Size M4 Y 3 7 to 8 Y = 10 15 M4 X 5 9 to 14 M5 Y 3.5 8.5 to 9 L2 = L1 = 15 20 M5 X 6 11 to 18 M6 Y 4 10 X = 20 30 M6 X 7 13 to 20 M8 Y 5 13 30 40 M8 X 8 16 to 22 M10 Y 6 15 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft

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amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

0.4

one-touch fitting made by CONINVERS GmbH Circular connectors (26 pins) C10: 10 one-touch fitting (C12: 12 one-touch fitting) DIN rail clamp screw R R 76.5 12 3 3 X 60 (12) (7.5) AXT100-MC26-050: 5 m AXT100-MC26-030: 3 m AXT100-MC26-015: 1.5 m Circular connector cable assembly 49.5 P X B B B B B B B B P12 30 25 18 1 1 A A A A A A A A 13.5 10 C10 [1(P) SUP port] C10: 10 one-touch fitting P

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vertical Mounting, Sliding Bearing q 70 mm stroke or less w Over 75 mm stroke 100 100 LEYG32M Load mass m [kg] Load mass m [kg] 10 LEYG32M LEYG25M 10 LEYG25M 1 0.1 1 10 100 1000 1000 10 100 Eccentric distance L [mm] Eccentric distance L [mm] * The limit of vertical load mass varies depending on lead and speed. Check SpeedWork Load Graph on page 748.