Cooling Capacity: Cooling Capacity: 1500/1700W, 50/60 Hz, Cooling Method: Water-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: M [Applicable to DI Water (Deionized Water) Piping]

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Elbows (barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(3.18/2)

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Elbows (barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5)

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(3.18/2)

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5)

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Male, Straight (Barb)] Male Straight (Barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Male, Straight (Barb)] Male Straight (Barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(6/4), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(3.18/2), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(6/4), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbows] Hose elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbows] Hose elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(6/4), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Elbows (barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Elbows (barb), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(6/4), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow, Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

Connection Type: Screw⇔Tube Connection, Connection screw: M, Thread-to-Tube Connection Shape: [Elbow (Barb)] Barb Elbow (H), Material: [Resin] 00010, Applicable tube material (O.D./I.D.): Polyurethane　(4/2.5), Gasket Material: Nylon 66・GF30%, Made to Order Specifications: N/A

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Electric Actuator

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 5 10 15 20 0 10 20 30 40 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 00 0 5 10 15 20 0 0 0 4 2 6 8 10 10 20 30 L4 Vertical Work load [kg

Table of Contents

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

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www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M