Free Mount Cylinder Series CU

, Pressure control equipment Air preparation equipment Relief port 2-M5 x 0.8 2-P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2-P through A 4-T counter bore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 GA A Bore size B C D E P R T GB GC H J MM 10 7 13 22 3 23 3.2 7 31 16 15 13 10 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89 80 85 90

Air Slide Table Series MXP

A A F F A F L L L 6 6 6 L = 80 mm L = 80 mm L = 80 mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 0.05 0.05 0.06 0.04 0.04 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 50 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N

1.1

Specify the quantity of units necessary for use with your piping system. 29 Series HRG Dimensions [Dustproof filter set] HRG-FL001 HRG-FL005 A A (10) (25) (25) B (25) (25) (10) B Surface fastener HRG-FL010 A (10) (25) (25) B (390) (390) HRG-FL015 A (10) A (10) (25) (25) (25) (25) B (Large) (Small) B (390) (390) (mm) A B C Part no.

MHS

M40.7 2.1 8 MHSJ3-20D MHSH3-20D M40.7 2.1 8 MHSJ3-25D MHSH3-25D M40.7 2.1 8 M40.7 2.1 8 MHSJ3-32D MHSH(J)3-32D M50.8 3.2 10 M40.7 2.1 8 MHSJ3-40D MHSH(J)3-40D M50.8 3.2 10 M50.8 3.2 10 MHSJ3-50D MHSH(J)3-50D M61 7.3 12 M61 7.3 12 MHSJ3-63D MHSH(J)3-63D M81.25 18 16 M61 7.3 12 MHSJ3-80D MHSH(J)3-80D M81.25 18 16 MHSH(J)3-DAMHSH(J)3-DB Nm mm MHSH(J)3-32DA MHSH(J)3-32DB M50.8 3.2 10 MHSH(

Modular Type Air Filters Series AF

NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 36 38 40 G 57 73 H 28 30 35 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AL20 AL30 AL40 5 4 6 S F 3 7 8 2 9 1 W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A E H L IN OUT Bracket (Optional) D Sight glass assy not applicable to AL20 9 Accessories 2-10 Residual Pressure Relief 3 Port Valve (V) 1 With the use of a 3 port valve

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Rotary Table

Shock absorber External shock absorber With adjustment bolt 0.007[J] 0.025[J] 0.048[J] 0.081[J] 0.240[J] 0.320[J] 0.560[J] With internal shock absorber 0.039[J] 0.116[J] 0.116[J] 0.294[J] 1.100[J] 1.600[J] 2.900[J] Allowable Kinetic Energy (J) With external shock absorber (For low energy) 0.161[J] 0.574[J] 0.805[J] 1.310[J] With external shock absorber (For high energy) 0.231[J] 1.060[J

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Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

HRX-OM-W038

Facility having a small installation area (that can not vent the air naturally) Make a forced air exhaust vent on a wall at a high level and an air vent on a wall at a low level.

Free Mount Cylinder

Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18

Regulator

-10-01-L NPT G36-10-N01-L G46-10-N01-L (Round type, with color zone) G G36-10-01-L G46-10-01-L Square embedded type pressure gauge Note 3) (Including part (5)) GC3-10AS-D NPT Z : Both in MPa and psi (5) Pressure gauge cover assembly (4) GC3-P10AS-D-X30 136150A Right angle square type pressure gauge Note 3) GC3-10AS-J-D (6) GC3-P10AS-J-D-X30 NPT Z : Both in MPa and psi (7) GC3-10AS-JA-D

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN 1) x H Section AA Section BB (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108 147 200 254 306 Z 81.5 81.5 81.5 91.5 106.5 145.5 198.5 252.5 304.5 K 31 41 51 61 71 96 121 146 171 J 44 44 44 54 69 108 113 155 190 I 10 10 10 10 10 10 58 70 87 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 44

MGP

2-Rc 3/8 (plug) DL GA GC 2-Rc 3/8 PB GB J JA 10 WB Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke

24

2 x P GC PB GB GA 10 2 x P (Plug) Q S WB DL JB JA K 6H9 depth 10 Z WA J PA + Stroke End lock mechanism Manual release Non-lock type FB FA C + Stroke G 6H9 depth 10 E B + Stroke A + Stroke With rod end lock HN b a DM 6H9 d c 23 e 7 5 6H9 T-slot dimensions [mm] 10 End lock mechanism (Manual release lock type) Bore size [mm] T-slot dimensions a b c d e 80 13.3 20.3 12 8 22.5 100 15.3 23.3 13.5

M-E05-1-LQ1

4 4-13 LQ1-4N13 LQ1-4B13 8 x 6 LQ1E5A-T-R8 5 5-19 LQ1-5N19 LQ1-5B19 6 x 4 LQ1E6A-T-R1 6 6-25 LQ1-6N25 LQ1-6B25 12 x 10 5-17 A Tubing Extension Union Tee Reducing LQ1T-T-R B side B side A side C side C side A side T1 type T2 type Metric size Model Size A side B side C side Insert pin/Name plate symbol Part no.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

MG

6H7 depth 10 PB GB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com WB J JA 10 Q PA + Stroke C + Stroke B + Stroke A + Stroke WA Z JB 6H7 depth 10 FB FA S K E G With head end lock 7 6H7 HN 10 5 6H7 DM 23 b a Detailed figure of section XX T-slot dimensions e c d End

Membrane Air Dryer

Dew point indicator kit IDG-DP01-X001 (Option: PS) IDG-DP01-X001 (Option: P) 10 With O-ring (1 pc.) 10 Series IDG<A/IDG Reduced purge IDG<A Series Dimensions IDG30<A IDG50<A o q Option OUT IN With fitting for purge e air discharge (Option: P) r w i Purge air for dehumidification Purge air for dehumidification y IDG60<, 75<, 100< IDG60<A, 75<A, 100<A o q Option IN OUT t e With fitting for

Metal Seal/Rubber Seal Series VQ Body Ported

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

Digital Flow Switch (Remote type sensor unit)

If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute. K When an object is placed in a fluid stream, a vortex will be created in the fluid on the downstream side. This vortex is called a Karman vortex.