Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Table of Contents

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

RZQ

J C A B DFull stroke -X 20Data eEntire stroke extension by pressurizing A, B and C ports. 10-10-1 2 3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9N Mounting style Number of auto switches A B L F G D Nil Both ends tapped 2 pcs.

MXW Series Long Stroke Slide Table

29 26 6.5 Operating port M5 x 0.8 Y Y 26 103 Operation direction B 5H9 +0.03depth 4.5 0 (Plug : M-5P) Operation direction B A 9 8 10 15 15 10 7.5 19.2 A 35 26.5 20 Z A Cross section AA (scale 50%) 4-M5 x 0.8 thread depth 10 3 x H G Bottom through hole 4.2 H 6 depth 4.5 5H9 +0.03 0 F E 5H9 +0.03depth 4.5 0 Model Z J H G F E MXW12-50 205 84 35 50 88 58 MXW12-75 230 89 40 55 103 63 Note) Adjuster

10

Bore size [mm] 10 16 20 25 Fluid Air Action Double acting A large amount of gripping force is provided through the use of a double piston mechanism, while maintaining a compact design.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

MXW

direction (B) 24 84 (Plug: M-5P) Operating direction (B) (A) 7 10 13 10 13 6.5 A 14.8 30 7 24 A 15.8 Z 3 Cross section AA (N-1) x H G H 6 depth 4.5 5H9 +0.030 Bottom through-hole 3.3 NN-M4 x 0.7 thread depth 8 0 5H9 +0.030 depth 4.5 0 F E (mm) Model Z E F G H N J MXW8-25 157 55 48 47 32 3 64 MXW8-50 182 53 76 46 30 4 71 Note) Adjuster bolt (Y) shown in the section above is attached only

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Fluoropolymer Piping Equipment

type Type Metric Inch Symbol 1, 2 A, B LVP LVW Size combination (Metric) Size combination (Inch) B side (Center) C side (Right) A side (Left) LQ1 LQ1 B side (Center) C side (Right) A side (Left) Class Model Applicable tubing size (mm) Class Model Applicable tubing size (inch) LQ3 10 x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

Modular Type Air Filter Series AF

Note 3) Bowl assembly for AF30 to 60 models comes with a bowl guard (steel band material). 26 AF10 to 60 Dimensions L AF10, 20 AF50, 60 A G D Bracket (Option) L Bracket (Option) F D M G K K F M J J B E E B H OUT IN C OUT IN H C Port size OUT OUT Port size o s AF10: 25 AF20: 40 Drain A P Min. clearance for maintenance AF30, 40, 40-06 L Bracket (Option) A D G F M K J B E Drain Min. clearance

CC

Data The stop and skip valves must be normally closed. 10-17-5 6 Air-hydro Unit Series CC How to Order The air-hydro unit consists of a converter and a valve unit that are compactly integrated.

o

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

o

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

a : I ;l q L l5i < F : 10-32 Nom (M5) 6 ports ManualOperator ,,, ', L Type Plug Connector (L) r a r . l r a & r M Type Plug Connector(M) (5) .a e q 2.03 (51.5) Stations 7 8 10 ']l 12 't3 14 15 16 17 1a 't9 20 L1 1.40 1.41 (46) (56.512.64 (67) 3.O5 3.46 (77.5) (88) 3.84 (e8.5) 4.29 (109) 4.70 (119.5) 5.12 h30) 5.53 (140.s) 5.94 6.36 (15r) (161.s) \172) (182.5) 7.60 (is3) 8.O1 8.43 (203.5)

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B