Aluminum High Vacuum Angle Valve K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.
Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)
Bellows, O-ring Seal P.20 to P.25 105 to 10-6 10-10 10-11 2 Eliminates pump over loads XLDV (With solenoid valve) Standard For portable equipment not requiring air Standard XLH Bellows Seal Standard 105 to 10-6 10-10 10-11 0.1 P.26, P.27 Manual Particulate free completely cleaned Single acting (N.C.)
50 20 20 10 10 10 5 4 3 2 1 40 30 20 0.2 1 2 3 4 5 0.3 0.4 10 m1max m2max m3max m1max m3max m2max Weight (kg) Weight (kg) 10 Model Selection Series MY3A/3B MY350 w When the external guide is used. 300 400 500 Collision deceleration (m/s2) 200 External guide load factor selection 2300 N 100 External shock absorber Impact force and absorption capacity confirmation 30 40 50 20 10 2 3 4 5 10
10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.
A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number. Grease pack part number: GR-S-010 (10 g) D197 Rotary Actuator: Angle Adjustable Type (Angle adjustment mechanism is provided as standard.)
This control is not for synchronizing the position of the main axis and slave axis. 10 10 Current position Current position Origin 0 0 Origin 10 20 30 40 50 Axis 1 10 20 30 40 50 Axis 1 For 3 Axes JXC92 Series For 4 Axes JXC73/83/93 Series p. 3 p. 4, 5 VParallel I/O/ V Type V Width: Approx. 38% reduction Type V Width: Approx. 18% reduction 78 47 mm shorter 140 30 mm shorter JXC73/83 JXC92
Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.
Type Pneumatic 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Specifications Mountable Auto switch Pneumatic Type Refer to pages 11-7-10 to 11-7-12 for dimensions.
MY1B10G Stroke 10 10 7.3 7.8 2 x M5 x 0.8 (Hexagon socket head plug) 2 x 2 x 3.4 through-hole Bottom side M4 x 0.7 depth 7 4 x M3 x 0.5 depth 5 30 50 5.9 5.9 25 26 22 28 17 100 + Stroke 5 Floating bracket mounting thread (2 x M3 x 0.5 thread depth 5) 2 x 5 counterbore depth 2 25 24 3.5 1 2 x M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110
Load weight (kg) Load weight (kg) Load weight (kg) 10 10 10 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 2. Reference formula [Dynamic moment at impact] Use the following formulae to calculate dynamic moment when taking stopper impact into consideration.
Special cap bolt Double Clevis CD hole H10 axis d9 [mm] Stroke range (mm) A CL CD CT size 10 to 100 160.5 150.5 25 10 5 101 to 200 185.5 175.5 CU RR CW L CL + Stroke A + Stroke +0.4 +0.2 CX 10 to 100 180.5 170.5 32 10 6 0.1 0.3 CZ 101 to 200 210.5 200.5 Stroke range (mm) CW CX CZ L RR CU size 10 to 100 25 14 20 18 36 14.5 10 101 to 200 10 to 100 32 14 22 18 36 18.5 10 101 to 200 Material:
5 10 15 4 6 10 15 10 12 19 27 11.5 13.9 22 31 Variation Action Mounting Note 2) Bore size (mm) Mounting Series Bore size (mm) Standard stroke (mm) 5, 10, 15 (20) Note 1) Series Action Standard stroke (mm) 5, 10, 15 5, 10, 15 5, 10, 15 5, 10, 15 4 6 10 16 4 6 10 15 Basic Flange Foot Clevis Trunnion Panel mount type, Embedded type Single acting, Spring return Double acting, Single rod 5, 10
50 60 70 80 10 20 Work load [kg] Work load [kg] LEJS63/Ball Screw Drive: Vertical LEJS63;A LEJS63;B 20 Duty ratio: 50% 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty ratio: 50% 15000 15000 10 10 Duty ratio: 75% Duty ratio: 75% 5000 5000 0 0 0 10 2.5 5 7.5 0 20 15 5 10 Work load [kg] Work load [kg] LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive: Horizontal 20
Model Cushion Rubber Air Bore size (mm) Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Relief type Vacuum suction type 10-/21-CJ210 10 15, 30, 45, 60, 75, 100, 125, 150 Double 10-/21-CJ216 M5 x 0.8 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Band mounting only Standard acting, Non-lube 10-/22-CJ210 15, 30, 45, 60, 75, 100, 125, 150 10 Single rod 10-/22-
size M10 x 1.0 M12 x 1.0 11 11 10-0.022 0 12-0.027 0 6-2 A Air Cylinder CJ2 10-/1121-/22Mounting Nut Rod End Nut d d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no.
15-10 RS Q G RS H A RZQ Series CVM5/CVM5K 20 25 32 40 Standard MI W S 10-15-16 10-15-26 Double acting Nonrotating rod CEP1 CE1 Series CVM3/CVM3K Single acting (Spring return) (Spring extend) CE2 20 25 32 40 Standard 10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/
X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.
(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)