Clean Gas Filter

IDU 24 40 50 IN IDF FS 2 x 4.5 66 IDFA IDFB Model Connection Rc 1/4 NPT 1/4 M5 SFB100-02, 200-02 SFB101-02, 201-02 SFB104-M5 IDH ID IDG SFB102-02, SFB202-02: TSJ 1/4 (Tube Swage Joint) IDK 2 x 4.5 Bracket AMG 2 x TSJ 1/4 Width across flats AFF 24 40 50 AM IN AMD 87 AMH AME SFB103-02, SFB203-02: UOJ 1/4 (Union O-ring Joint) AMF 2 x 4.5 Bracket ZFC 2 x UOJ 1/4 Width across flats 7 6.5 SF SF

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

AZ1000

Delivery pressure Code 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 02 06 10 15 Bonnet Standard Panel Installation 3) Bonnet port (NPT 1/8 inch) Code No code P BP Material 3) Panel mounting hole: dia.39.6 mm.

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Thermo-chiller

Power consumption P: 7 [kW] Q = P = 7 [kW] Cooling capacity = Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] w Derive the heat generation amount from the power supply output.

HRX-OM-S004

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months . 7-4 7.2.4 Inspection every 6 months . 7-6 7.2.5 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1

HRX-OM-Q026

Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 7.2.2 Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid .

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

: 48.4 N02: 48.9 Atmospheric vent port 02 4 x 2.6 Depth 7 or less 20 30 25 8.5 11 R1/4 M5 x 0.8 Thread depth 5 4.2 N02 30 20 NPT1/4 17 Piping port 02: R1/4 N02: NPT1/4 2.5 If there is a possibility that the atmospheric vent port of the switch will be exposed to water or dust, insert a tube into the atmospheric vent port and route the other end of the tube to a safe place away from water or

Electric Actuators

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD SG 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector.

P

14.7 19.5 3.8 Deep style (D) ZP10Dl to 40Dl Model Nom.size U02 A 2 B 2.6 C 1.2 D 7 E F 12 Y 0.8 _ _ _ _ ZP02Ul ZP04Ul ZP06Ul ZP08Ul ZP10Ul ZP13Ul ZP16Ul ZP20Ul ZP25Ul ZP32Ul ZP40Ul ZP50Ul U04 4 4.8 1.6 7 12 0.8 U06 6 7 2.5 7 12 0.8 U08 8 9 2.5 7 12 1 U10 10 12 4 13 7.7 12 3 U13 13 15 4 13 7.7 12 3 U16 16 18 4 13 8.2 12.5 3.5 U20 20 23 4 15 9.5 14 4 U25 25 28 4 15 9.5 14 4 U32 32 35 4 15

Gun Type Ionizer

Blow setting Trigger setting 0 Slide Trigger linked 1 Trigger lock 2 OFF timer 3 s 3 5 s 4 7 s 5 Continuous blow Trigger linked 6 Trigger lock 7 OFF timer 3 s 8 5 s 9 7 s Pulse blow Mode setting switch Wiring AC adapter type IZG10-m01, 02 Connect the M8 connector on the power cable for AC adapter to the power connector on the main unit.

VQ5000

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,

Table of Contents

7 !8 !

SL5200

Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Code 0 M V X Specification Standard Sub-atmospheric Code V3 L 1 H 2 4 10 40 -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa 0 to 1.4 MPa 0 to 3 MPa 0 to 7

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Compatible Fluid(l/min): 140, Type: Vacuum Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Control Side Connecting Tube Diameter: -, Set Pressure Range(kPa): -100～-1.3, Control Method: Directly Operated, Shape: Retainer Pin/Stopper Set, Control Side Connection Type: Rc (R), Supply Side Connecting Tube

Compatible Fluid(l/min): 240, Type: Vacuum Regulator, Supply Side Connection Type: Rc (R), Supply Side Plumbing Thread Nominal: 1/4, Control Side Plumbing Pipe Thread Nominal: 1/4, Control Side Connecting Tube Diameter: -, Set Pressure Range(kPa): -100～-1.3, Control Method: Directly Operated, Shape: Retainer Pin/Stopper Set, Control Side Connection Type: Rc (R), Supply Side Connecting Tube

The IRV series vacuum regulator is offered in 3 compact, lightweight sizes. Adjustment resolution is possible within 0.13kPa.  Port sizes available are 1/8Rc(PT), and 1/4, 3/8 and 1/2 with Rc(PT), NPT or G(PF) thread types.Single sided connections series, Mass reduced by 20%, Max. flow 140  /min (ANR) and 240  /min (ANR), Integrated digital pressure switch for panel mounting, Built-in one-touch