100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

IDUS/IDFS

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Special Specifications:

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping directions Maximum stroke Cushion Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes,

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 1200mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 900mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 1000mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 250mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 700mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 100mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 400mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 450mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 600mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 150mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 300mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 500mm

Piping: Standard, Bore Size: 40mm, Port Thread: (M5 Thread-6~15mm)(Rc-20~63mm), Stroke: 1500mm