Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard Nil P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Magnetically Coupled Rodless Cylinder: Low Profile Guide Type ø 10, ø 15, ø 25 CY1F Series

A90 100 V 2-wire No A90V IC circuit 100 V or less 1Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Precision Cylinder Series MTS

A93 3m . L (Ex.) A93L 5m . Z (Ex.) F9NWZ Solid state auto switches marked with a "" are produced upon receipt of order.

CM2 Series ø 20, ø 25, ø 32, ø 40 Air Cylinder: Standard Type Double Acting, Single Rod

V A93V*2 A93 V V V V Grommet Reed auto switch No 100 V or less A90V A90 V V IC circuit Yes 100 V, 200 V B54 V V V Relay, PLC No 200 V or less B64 V V Yes C73C V V V V 2-wire 24 V 12 V Connector No 24 V or less C80C V V V V IC circuit Terminal conduit A33A V PLC 100 V, 200 V A34A V Relay, PLC DIN terminal A44A V Yes Diagnostic indication (2-color indicator) Grommet B59W

Heavy Duty Stopper Cylinder ø 50, ø 63, ø 80 RS2H Series

A90 12 V 5 V,12 V IC circuit 100 V Relay, PLC 2-wire No 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

MONOSASHI-KUN

125 150 175 200 250 300 400 500 2-2-2 Applicable Auto-Switch Models Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV M9NWV D-M9NWV 2-color Indication Solid State Auto-Switch A93V D-A93V M9PV D-M9PV M9PWV D-M9PWV A96V D-A96V M9BV D-M9BV M9BWV D-M9BWV

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

A90 100 V Relay, PLC 2-wire 12 V 24 V No IC circuit 100 V or less 1Water-resistant type auto switch can be mounted to the models with the above mentioned part numbers, but this does not guarantee the water resistance of the cylinder.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

Lead wire length (m) Load voltage Auto switch model Electrical entry direction Wiring (Output) Special function Electrical entry Indicator light Style 0.5 (Nil) 3 (L) Applicable load AC DC 12V Horizontal 100V 24V Reed switch 2-wire Relay, PLC Grommet Yes A93 12V 3-wire (NPN) M9N 24V Solid state switch Relay, PLC Grommet Yes 12V 2-wire M9B Lead wire symbol 0.5mNil (Example) A93

Rotary Table

Yes Reed circuit Grommet 100V A93V*2 A93 2-wire 24V 12V Relay, PLC No 100V or less A90V A90 IC circuit *1 Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. *2 1m type lead wire is only applicable to D-A93.

Series 11-MXJ Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes 24 V 100 V Relay, PLC M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes 24 V Relay, PLC M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Lead wire length (m) Auto switch model Electrical entry direction Load voltage Wiring (Output) Special function Electrical entry Indicator light Type 0.5 (Nil) 3 (L) Applicable load AC DC 12 V In-line A93 Reed auto switch 2-wire Grommet Yes Relay, PLC 100 V 24 V M9N 3-wire (NPN) 12 V Solid state auto switch Grommet Yes Relay, PLC 24 V M9B 2-wire 12 V Lead wire length symbols 0.5 mNil

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

CE

A /B 90 0.1mm/ 2-1. 2-2 F.G CE1-R** CE1 CEU5 OUT1OUT5 RS-232C OUT1OUT20(bank ) (31 ) 221 () B L F G D 0.5 L 3 Z 12 12mm 20 20mm 32 32mm 40 40mm 50 50mm 63 63mm 4063 N R H (mm) (mm) (mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 20 32 40 50 63 222 A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW D-M9PW A96 D-A96 M9B D-M9B M9BW D-M9BW A90V D-A90V M9NV D-M9NV

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.

Cylinder with Lock/Double Acting, Single Rod Series CLS

function Wiring (output) Type Electrical entry 0.5 (Nil) 3 (L) 5 (Z) DC AC 3-wire (NPN) 3-wire (PNP) 2-wire M9N M9P M9B A90 A93 5 V, 12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161

High Vacuum Slit Valve

Opening size 50336 : H 50mm,W 336mm Valve type 2 : Standard Cassette 3 : Half MESC Cassette The number of axes and sealing type 1 : axes and bellows Valve size 3 : for 300mm wafer Model of high vacuum slit valve Auto switch and connector Symbol Auto switch Connector NIL Not provided Not provided A D-A93 Lead wire length : 0.5m C Multi connector (C016 30C006 100 12 : AMP) (2 pcs in total,

3-Position Rotary Table MSZ Series Size: 10, 20, 30, 50

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Compact Slide ø 6, ø 10, ø 16, ø 20 MXH Series

A90 100 V 100 V or less Relay, PLC 2-wire 12 V No 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.