CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Standard Strokes (mm) Bore size Standard stroke Note1) Maximum manufacturable stroke Note 2) 1 Cylinders with rubber bumper have no bumper. 2 Only compatible with cylinders with rubber bumper, but has no bumper. 20 25, 50, 75, 100, 125, 150, 200 201 to 1500 25 32 40 50, 63 80 100 25, 50, 75, 100, 125, 150, 200, 250, 300 301 to 1500 Refer to pages 355 to 361 for cylinders with auto switches

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

Load voltage Lead wire length (m) Auto switch model Indicator light Applicable load Pre-wired connector Type Special function Electrical entry Wiring (Output) 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line DC AC M9N M9P M9B M9NW M9PW M9BW M9NA1 M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 5 V, 3-wire (NPN) IC circuit 12 V 3-wire (PNP) Reed auto switch Solid state auto switch 2-wire

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Indicator light Auto switch model Perpendicular In-line DC AC Load voltage Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) None (N) Applicable load Type Special function Electrical entry Wiring (Output) Pre-wired connector 1 (M) 20 to 63 12, 16 20 to 63 12, 16 M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA F79F P4DW M9NV M9PV M9BV 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Grommet 2-wire 12 V

CRQ2

IC circuit Reed switch Solid state switch A96 A96V 5 V Grommet Yes Relay, PLC A93 A93V 12 V 2-wire 24 V 100 V 3-wire (NPN) M9N M9NV 5 V, 12 V IC circuit 3-wire (PNP) M9P M9PV 2-wire M9B M9BV 12 V Relay, PLC 3-wire (NPN) F9NW F9NWV 5 V, 12 V 24 V IC circuit Grommet Yes Diagnostic indication (2-color) 3-wire (PNP) F9PW F9PWV F9BW F9BWV 12 V 2-wire Water resistant (2-color) F9BA Although it

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Load voltage Lead wire length (m) 0.5 (Nil) AC Wiring (output) Indicator light DC Auto switch model Applicable load Type Special function Electrical entry 3 (L) 5 (Z) Perpendicular In-line 3-wire (NPN) 5 V, 12 V M9N M9NV IC circuit 3-wire (PNP) M9P M9PV Solid state switch M9B M9BV 2-wire 12 V Relay PLC Grommet Yes 24 V 3-wire (NPN) F9NW F9NWV 5 V, 12 V IC circuit Diagnostic indication

RSQ

A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A93 M9N M9P M9B F9NW F9PW F9BW F9BA 200 V Grommet MVGQ Yes Yes 100 V 12 V Relay, PLC 2-wire 24 V Connector CC 12 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) RB 5 V, 12 V IC circuit 3-wire (PNP) Grommet J 2-wire

CEx-OMB0075

L 3 m Connector Nil w/ connector Stroke(mm) Made To Order Fluoro rubber packing (Ex.) 2-2-2 Applicable Auto-Switch Models Z w/o connector 25, 50, 75, 100 Mark Auto-Switch Model Mark Auto-Switch Model Mark Auto-Switch Model A90 D-A90 M9N D-M9N M9NW D-M9NW A93 D-A93 M9P D-M9P M9PW 2-color D-M9PW A96 Reed D-A96 M9B Solid State D-M9B M9BW Indication Solid State D-M9BW A90V Auto-Switch D-A90V

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

MHK2

Model Bore size (mm) Opening/Closing stroke (mm) Option Series Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluoro rubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P(V) D-M9B(V), Water resistant (2-color indication), D-F9BAL MHK2-12 12 4 MHK2-16 Parallel opening/closing 16 6 Standard type Series MHK2 Longer strokes

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-M9P(M)(L)(Z) M9B(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Mechanically Jointed Rodless Cylinders

Indicator light Load voltage Pre-wired connector Applicable load Auto switch model Lead wire length (m) Electrical entry Solid state switch Type Reed switch Wiring (Output) Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) DC AC M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit 5 V, 12

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

(Body tapped) (Body tapped) MHR Lateral mounting MHK MHS MHC MHT (Body tapped) (Body through-hole) Interchangeable with Series MHQG2 MHY Series Variations MHW Model Option Bore size (mm) Opening/Closing stroke (mm) Finger option Carbon steel (Standard), Stainless steel Dust cover option Chloroprene rubber (Standard) Fluororubber Silicon rubber Auto switch Solid state switch D-M9N(V), D-M9P

Compact Rotary Actuator

setscrew (with urethane damper) as setscrew. 6-3 Auto switch set position B Port A Port Fig.12 Set screw Auto switch Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75

Rotary Table

Load voltage Auto switch model Lead wire length (m) Indicator Electrical Wiring Pre-wire Type light Special function connector Applicable load DC AC Perpendicular In-line 0.5 1 3 5 entry (Output) (Nil) (M) (L) (Z) M9NV M9N 3-wire(NPN) F8N IC 5V, 12V circuit M9PV M9P 3-wire(PNP) Solid state auto switch F8P M9BV M9B 2-wire 12V F8B Relay, Grommet Yes 24V PLC 3-wire(NPN) M9NWV M9NW IC 5V,

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180

10

Load voltage Auto switch model Lead wire length [m]1 Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Wiring (Output) Type Special function Electrical entry M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v Solid state auto switch 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

240

Auto switch model Lead wire length (m) Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Indicator light Electrical entry Type Special function Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) 3 (L) 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV1 M9N M9P M9B M9NW M9PW M9BW M9NA1 M9PA1

CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

CQM Load voltage Wiring (Output) Pre-wired connector Applicable load DC AC Auto switch model Lead wire length (m) Indicator light Electrical entry Type Special function 3 (L) Perpendicular In-line 0.5 (Nil) 5 (Z) 1 (M) MU 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit IC circuit M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 5 V, 12 V Solid state