SMC Pneumatic Clean Series

10-/21-CG1W63 25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

Plate Cylinder

Series MU 500 MU63 300 MU50 200 MU40 MU32 100 MU25 50 Load weight (kg) 30 20 10 5 3 2 1 0.5 100 1000 50 500 200 300 Maximum speed (mm/s) Front matter 1 Plate Cylinder: Double Acting, Single Rod 25, 32, 40, 50, 63 Series MU How to Order B 25 D 30 M Z MU B 25 D 30 Z M S M9BW MDU With auto switch With auto switch (Built-in magnet) Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

B J A D EA K MM TDe8 AL F KA FA M G N R TT P TX (mm) 125 140 160 180 200 250 300 1/2 90 0.050 0.089 145 115 M14 x 1.5 M30 x 1.5 170 50 47 36 59 43 15 31 14 19 16 35 98 1 50 32 25 to 1000 Lube Non-lube Air-hydro 1/2 90 0.050 0.089 161 128 M14 x 1.5 M30 x 1.5 190 50 36 59 15 47 43 14 31 19 16 35 1.5 98 55 36 30 to 1000 3/4 90 0.050 0.089 182 144 M16 x 1.5 M36 x 1.5 212 18.5 56 40 59 17 53 43

High Power Cylinder Series RHC

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-A9 D-M9 D-M9W Note 1) qBMA2-040 wBJ3-1 Note 1) qBMA2-050 wBJ3-1 Note 1) qBMA2-063 wBJ3-1 Note 1) qBMA2-020 wBJ3-1 Note 1) qBMA2-025 wBJ3-1 Note 1) qBMA2-032 wBJ3-1 D-C7/C80 D-C73C D-C80C D-H7 D-H7W D-H7BAL D-H7NF BMA2-020 BMA2-025 BMA2-032 BMA2-040 BMA2-050 BMA2-063 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL/G59F D-G5NTL D-G5NBL

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a:1>20 . 25 I 932 >40 1>50 2T 3T 4T Response time (sec) Aclsorpti&." area (em:!)

CV/MVGQ

(0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 40 50 63 80 100 Note 1) ( ): Denotes the values of non-lube type.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Note 2) Standard lead wire length: 300 mm High speed response/ External pilot type BR Note 1, 2) (0.9 W) High pressure/External pilot type (Metal seal type only) KR Note 1, 2) (0.9 W) Coil voltage 1 2 3 4 5 6 IP65 compliant 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC [115 VAC] (50/60 Hz) 220 VAC [230 VAC] (50/60 Hz) 24 VDC 12 VDC Note 1) Option Note 2) For details on external pilot type

Series VQ Base Mounted Metal Seal/Rubber Seal

Coil voltage 3 VZ 1 2(1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Pilot valve 3 position exhaust center Symbol Specification DC AC VF 3 4(1) (1.0W) (1) 4 VV5Q11-09C6FU2 VQ1100-5 VQ1200-5 VV1000-10A-1 1 set (F kit 9 station manifold base No.) 4 sets (Single solenoid No.) 4 sets (Double solenoid No.) 1 sets (Blank plate No.)

SMC

end) 30 30 76 46 73 58 FF 22.5 5H9 depth 5 +0.030 0 F 25 5H9 depth 5 +0.030 0 N 1 x F 2 51 2-M6 x 1 thread depth 13 37 M 0.5 46.5 50 Z ZZ H G (NN1) x H 11.5 29 11.5 29 B A 9.5 5.1 11 11 5H9 depth 5 +0.030 0 30 1.5 NN-M6 x 1 thread depth 12 B A 6 Section AA Section BB HA GA 5H9 depth 5 +0.030 0 (mm) Model F 50 50 50 60 35 60 70 70 80 ZZ 121 121 121 131 146 185 238 292 344 M 83 83 83 93 108

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Compact Cylinder

Relationship between Number of Needle Rotations and Piston Speed 32, 40 50, 63 800 800 32 32 50 700 700 600 600 63 Piston speed (mm/s) Piston speed (mm/s) 40 40 500 500 50 400 400 63 300 300 200 200 100 100 1 0 1 2 3 4 5 6 0 0 1 2 3 4 5 6 7 8 9 10 7 Fully opened Without restrictor Without restrictor Fully opened Number of restrictors needle rotations Number of restrictors needle rotations

VZS

Electrical entry F: Plug-in type Option Port size Nil 01 Without sub-plate Rc 1 8 50 01 F Z VZS2 1 2 Plug-in 5 G 50 VZS2 Non plug-in 2 01 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Coil rated voltage Symbol Thread type 1 2 3 2 position single 100 VAC, 50/

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

7 19 88 154 32 With rod boot h l Symbol e f 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 81 93 106 131 156 12.5 25 37.5 50 75 100 35 17 68 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 35 17 72 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 35 17 90 102 115

Compact Manifold Regulator Series ARM5

8 1 8 ARM1000 57 1 8 1 8 VEX1 1 4 1 8 ARM2000 136 1 8 1 8 SRH How to Order SRP ARM 1000 A1 5 01 G SRF Option Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting ARX20 Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Air Cylinder Series MB

(Non-lube) 50 to 700mm/s 50 to 1000mm/s Operating piston speed +1.0 0 +1.4 0 +1.8 0 up to 250: , 251 to 1000: ,1001 to 1500: Allowable stroke tolerance Cushion Note 1) Both ends (Air cushion) JIS class 2 Thread tolerance 1/8 1/4 1/4 3/8 3/8 1/2 1/2 Port size (Rc, NPT, G) JIS Symbol Double acting Basic, Foot, Front flange, Rear flange, Mounting Single clevis, Double clevis, Center trunnion

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

1 Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 CRB2 CRBU2 CRB1 MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ D20Series MSQ now includes smaller sizes 1, 2, 3 and 7 11-9-1 2 Compact rotary table