End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5 5.5(3.5) 10.5

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B ZZ -t2 xstrokes.1 12 + 2X!

Cylinder with Lock Series CLS

Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5

CNA

MGG (Max.)W1 B DX Z + Stroke MGC DDH10 hole 90 B MGF 4-DT B DS A DH DF CY1 DO DO DC DE DU DU DL DA 4-DR MY1 Rotation angle (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 A B A + B + 90 Part No.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

LJ1H

B 89 A A B Section BB Coupling P.C.D.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

214 26 13.5 24 17 75 100 130 25 CXW Pivot Bracket for Double Clevis CXS CXT Material/Iron die cast Surface treatment/Painted black MX MXU MXH MXS MXQ MXF Rotation Angle MXW Bore size (mm) A B A+B+90 MXP 40 to 100 12 60 162 MG Note) The dimensions above are for reference.

ZPT/ZPX

B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 144 195 13 63 65.1 45.5 67.6 31.5 43 58 80 155 206 21.5 75-B01-A18 75-B01-A18 180 231 191 242 ZPX50HBJ25-B01-A18 ZPX80HBJ25-B01-A18 112.5 163.5 125.5 176.5 50-B01-A18 50-B01-A18 50 51.9 35.7

MQQ

type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Guide Cylinder/Compact Type Series MGC

$9 $5 %4 CLG1 A' B' CL1 MLGC %2 Ball bushing bearing Front mounting flange View B-B' CNG #5 e #7 r #8 !

Air Cylinder Series MB

, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-F5LF D-P5DWL Bore size (mm) A A A A B A A A A B B B B B B B 32 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 40 12 11 7 4.5 0 0.5 3.5 4 0.5 9.5 8.5 4.5 2 1 1.5 0 50 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 63 12.5 11.5 7.5 5 0 1 4 4.5 1 10 9 5 2.5 1.5 2 0 80 15.5 14.5 10.5 8 2.5 4 7 7.5 4 14 13 9 6.5 5.5 6 2.5 100

ZP

B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80 21.5 144 195 155 206 75-B01-A18 75-B01-A18 180 231 191 242 ZPX50HBJ25-B01-A18 ZPX80HBJ25-B01-A18 112.5 163.5 125.5 176.5 50-B01-A18 50-B01-A18 50 51.9 35.7

LFE-OMY0008

(Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4. 2 No.LFE*-OMY0008 / 1 1.5 3 3) 1 1 () [] 3 No.LFE*-OMY0008 () () () () 4 No.LFE*-OMY0008 () * (100 20 ) () <> 2MPa 5 No.LFE*-OMY0008 * (1623 ) FG (49N ) () M12 IN IN OUT OUT OUT OUT () 6 No.LFE

CEx-OMQ0013

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4.

CLS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CNA CNS CLS Bore size (mm) 125 140 160 Tie-rod nut Bore size (mm) Tie-rod nut JIS B 1181 Class 1 M14 x 1.5 JIS B 1181 Class 1 M20 x 1.5 200 CLQ JIS B 1181 Class 1 M16 x 1.5 JIS B 1181 Class 1 M18 x 1.5 180 JIS B 1181 Class 1 M24 x 1.5 250 MLGP Wing nut

7

Hs Ht A B Hs A B Hs A B Hs Ht B D-P4DW D-M9 D-M9W D-M9A 12 D-A9 Hs D-B54 Note) The above drawing is the switch band mounting example for the D-P4DWS.

VQZ1000/2000/3000

3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.

SMC

A 5H9 depth 4 +0.030 0 NN-M6 x 1 thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G

LVQ

A B A B SMC SMC B A A B Description No.