Compact Cylinder

Z 2 x P Q L F K M E J (Port size) L Q Q B + Stroke B + Stroke A + Stroke A + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

Fieldbus System

1(P), 3/5(E) port] Applicable tube O.D.

•

/>B ' C . 0 E . F.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

e-Rodless Actuator

Refer to pages 5 and 6 for detailed selection procedures. 2 How to Select Series E-MY2 Moment / E-MY2C E-MY2C/M3 E-MY2C/M1 E-MY2C/M2 50 40 50 40 50 40 30 30 30 20 20 20 10 10 10 Moment (Nm) Moment (Nm) Moment (Nm) 5 5 5 E-MY2C25 E-MY2C25 4 4 4 3 3 3 E-MY2C25 2 2 2 E-MY2C16 E-MY2C16 E-MY2C16 1 1 1 0.5 0.5 0.5 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000

7.5

For built-in silencers, the 3/5(E) ports are plugged.

Table of Contents

C D E F Dimensions Part no.

LEC-OM02704CN

DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2] [5]

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the

C85

1 y q r e i !2 o !

C85

1 w e !3 !

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

MG

0 r o @2 e !

24

0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more MGJ 12 to 25 50 stroke or less JMGP MGP MGP MGPW 12 to 25 Over 50 stroke MGQ 50 or more MGG MGC MGF Component Parts Component Parts MGZ No.

Profi-E

t h l ow ri ppl e.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

Low Profile Air Gripper Series MHF2

7.7 14.8 15 19 25 E 4 x 3.4 through (Mounting hole) MHZ 0 0.1 20 27 1 27 1 MHF 4 x 5.5 M5 x 0.8 Close: 0 +0.1 0 Finger opening port E-E MHL Open: 481 Use the attached hexagon socket head screws for mounting holes.

AC Servo Motor Driver

Negative response [E] [e] Command error Command not existing in the specifications was transmitted.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.