Compact Cylinder

P P Rc1/8 P P P P Rc1/8 P P Rc1/4 P P Rc1/4 P P Rc3/8 P P Rc3/8 P P P P Through-hole (Standard) Built-in magnet Pneumatic Air-hydro M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Piping Pipe thread NPT1/8 G1/8 P P P P NPT1/8 G1/8 P P P P NPT1/4 G1/4 P P P P NPT1/4 G1/4 P P P P NPT3/8 G3/8 P P P P NPT3/8 G3/8 P P P P 2.

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

Fieldbus System

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Port Symbol Caution VF1000 VF3000 VF5000 Supply P P (SUP) P Cylinder A, B A (CYL2) B (CYL1) A, B Connector R1 (EXH2) R2 (EXH1) R1, R2 EXH outlet EA, EB Lead wire JIS symbol Single solenoid Socket Hook 1: P (SUP) 2: B (CYL.1) 3: R2 (EXH.1) 4: A (CYL.2) 5: R1 (EXH.2) 1: P 2: B 3: R2 4: A 5: R1 Plug Connector Lead Wire Length 1: P 4: A 2: B 5: R1 3: R2 Standard length is 300 mm, but the following

7.5

Manifold Electrical Wiring P.28 Dimensions P.29 EX180 Serial Wiring How to Order P.34 Dimensions P.36 EX510 Gateway System Serial Transmission System How to Order Manifold P.42 Dimensions P.44 Manifold Exploded View P.49 How to Add Manifold Stations P.50 Non-plug-in Individual Wiring Manifold Individual Wiring How to Order P.52 Dimensions P.54 Manifold Exploded View P.59 Manifold Options

0.

N1 N3 N7 N9 N11 NM Note 1) M5 01 02 Symbol Nil N T F Rc 1/8" 5/32" 1/4" 5/16" 3/8" Mixed M5 thread 1/8 thread 1/4 thread NPT P P P P P VQZ100 NPTF Cylinder port P P P P P VQZ200 G P P P P P VQZ300 Note 1) Except VQZ100, mixing one-touch fittings and thread types is impossible. Note 2) Metric size one-touch fittings (Cl) are also available.

%silltr

The pressure supply is above the disc. tffi P F ISO Symbol A B t-vt A B rT--r] P E X P E X ffi P E X A E T t--l I T T I P E X Fig 7.12 Section through a Rotary Disc Valveand a disc for a 4/3 tunction with closed center P N E U U A T t c T E c H N o L o c Y I UALVE OPERATION M E C H A N I C A L O P E R A T I O N :E : Square Roller e Roller Lever A l:Ez : Plunger t-l n n tldt A !

SMC Basic Pneumatics

The pressure supply is above the disc. tffi P F ISO Symbol A B t-vt A B rT--r] P E X P E X ffi P E X A E T t--l I T T I P E X Fig 7.12 Section through a Rotary Disc Valveand a disc for a 4/3 tunction with closed center P N E U U A T t c T E c H N o L o c Y I UALVE OPERATION :E : Square Roller e Roller Lever M E C H A N I C A L O P E R A T I O N A l:Ez : Plunger t-l n n tldt A !

AC Servo Motor Driver

PG1 Model loop gain P PB08 PG2 Position loop gain P PB09 VG2 Speed loop gain P S PA08 ATU Auto tuning mode P S PB10 VIC Speed integral compensation P S PA09 RSP Auto tuning response P S PB11 VDC Speed differential compensation P S PA10 INP Control mode, regenerative option selection P PB12 OVA Overshoot amount compensation P S PB13 NH1 Machine resonance suppression filter 1 P S PA11 TLP

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

Compact Hydraulic Cylinder

Bore size (mm) NN P S X ZZ Y 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 238 Round Type Hydraulic Cylinder: 3.5 MPa Series CHmM Rod flange style: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S + Stroke

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) Production discontinued XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Connector manufacturers: P Hirose Electric Co., Ltd. P Sumitomo 3M Limited P Fujitsu Limited P Japan Aviation Electronics Industry, Ltd. P J.S.T. Mfg. Co., Ltd. D-sub Connector Cable Assembly Electric Characteristics Cable length (L) Item Characteristics Assembly part no.

LEC-OM02704CN

P-D 1 P P C C G3 D (2) 1) G4 5m (1) 1.

Hydraulic

Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +

45

= 16 (Pitch) P = 16 DIN rail release button SV 2n-One-touch fittings 2-One-touch fittings 2-One-touch fittings 2n-One-touch fittings (A, B port) (P , R port) Applicable tubing O.D.: 10 (P , R port) Applicable tubing O.D.: 10 (A, B port) Applicable tubing O.D.: 4 6 8 4 6 8 Applicable tubing O.D.: SZ DIN rail holding screw DIN rail holding screw SY SYJ SX 300 (Lead wire length) (Rail mounting