AC Servo Motor Driver (CC-Link Type ）

Set "0" to send back data in less than 800 s or "1" to send back data in 800 s or more. Parameter No.PC21 RS-422 communication response delay time 0: Invalid 1: Valid, reply sent in 800 s or more (3) Station number setting Set the station number of the driver in parameter No.PC20. The setting range is station 0 to 31. 14 6 14.

Mechanically Jointed Rodless Cylinder Series MY1

m1 x g x X m2 x g x X m4 x g x Z M1 M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

V100

Grommet (G), (H): V11 24(A)-G H-M5 13.1 (Light/Surge voltage suppressor) 5 + 13 15.5 3 13 3 28.5 [32.4] 10 G: Approx. 300 H: Approx.600 (Lead wire length) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 30.9 [33.1] 25.1 11.4 5.7 5.7 5.7 2 1 7 5 9.5 5 19 (Piping

Ejector Valve Unit Series ZYY/ZYX 1

ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP Precautions ZCU Be sure to read before handling.

Cylinder with Lock Series CLS

Rolled steel plate Rod cover Individual -X Rolled steel plate Head cover Seal kit includes a grease pack (125 to 160: 40 g, 180, 200: 50 g, 250: 60 g). Aluminum alloy Hard anodized (125 to 200) Order with the following part number when only the grease pack is needed.

Modular F.R.L. Unit

Unit AC10A to 40A Dimensions AC10A, 20A A N F E P K C G G IN OUT Q Q B Pressure gauge (accessory) K H OUT Pressure gauge port size Square embedded type pressure gauge (accessory) J L Port size Lubricator M Drain Min. clearance for maintenance Filter regulator D AC30A, 40A A N F E P K C G G OUT IN B Pressure gauge (accessory) K OUT Pressure gauge port size J L Square embedded type pressure

Mechanically Jointed Rodless Cylinders

Coordinates and Moments Load Weight and Static Moment Horizontal mounting Wall mounting Ceiling mounting z M1 M3: Yawing M2 M3 M1 M2 M2 y m1 x g X x Y y m2 x g z X Z m3 x g x X x Y M1: Pitching Vertical mounting Mounting direction Static load m Horizontal m1 Ceiling m2 Wall m3 Vertical m4 Note) m3 x g x Z m3 x g x X m1 x g x X m1 x g x Y m2 x g x X m2 x g x Y m4 x g x Z m4 x g x Y y M1

VNB

, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main port VX3 G (Grommet terminal: E) H (Conduit terminal: T) In the case of EZ or TZ, the length is longer by 10 mm.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Refrigerated Air Dryers Series IDF/IDU

D-G

Booster Regulator Series VBA1110 to 4200 1

G H AV OUT port AU AF 4-12 mounting hole Silencer (Option) O EXH port: 1 position AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F EXH port: 1 position D E IR A 300 404 B 126.5 167 C 53 96 D 73 116 E 118 150 F 98 130 G 46 62.8 H 43 62 I 60.5 90 J 18 17 K 15 15

C95

1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 Port size Basic style, Axial foot style, Rod side flange style, Head side flange style, Single clevis style, Double clevis style, Center trunnion style Mounting Minimum Stroke for Auto Switch Mounting Refer to page 6-12-16 for Minimum Stroke for Auto Switch Mounting.

Table of Contents

(g) Bore size (mm) Hexagon socket head cap screw dia.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

A B 1 Actuator section PPS 2 Body PFA A B 3 Diaphragm PTFE 4 End plate PPS 5 Flow rate adjuster section PPS 17-5-51 10 Series LVD Dimensions Basic type A D L K 4-M (Q) 2-P one-touch fitting Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Breathing port PB H C PA G

Cylinder with Lock

Seal kit includes a grease pack (40 and 50: 10 g, 63 and 80: 20 g, 100: 30 g). Order with the following part number when only the grease pack is needed.

70pvvna

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Main port VX3 G (Grommet terminal: E) In the case of EZ or TZ, the length is longer by 10 mm.

CL

Basic Foot Front flange W/o rod boot W/ rod boot S W/o rod boot W/ rod boot W/o rod boot W/ rod boot S Stroke range LS Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 WB S Bore (mm) Bore (mm) Bore (mm) Stroke range 201 to 350 301 to 400 301 to 450 301 to 800 GB GB TB GB ZZ 206 223 226 250 ZZ ZZ 210 ZZ ZZ 206 223 226 250 ZZ 20 25 32 40 20 25 32 40 20 25 32 40 186 201 204 230 190 201

ZSE30/ISE30

76 g 81 g Weight Without lead wire with connector 40 g 38 g 43 g 16-2-5 6 Series ZSE30/ISE30 Setting Pressure setting Press the button.

Electric Rotary Table

D-G

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0